| Project/Area Number |
24651160
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Multi-year Fund |
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| Research Field |
Microdevices/Nanodevices
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
Saito Shigeki 東京工業大学, 理工学研究科, 准教授 (30313349)
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| Co-Investigator(Kenkyū-buntansha) |
KIKUTANI Takeshi 東京工業大学, 理工学研究科, 教授 (70153046)
TAKAHASHI Kunio 東京工業大学, 理工学研究科, 教授 (70226827)
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| Project Period (FY) |
2012-04-01 – 2016-03-31
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| Project Status |
Completed (Fiscal Year 2015)
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| Budget Amount *help |
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2014: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2013: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2012: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
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| Keywords | 表面電位 / マイクロセンシング / 同時多極 / マイクロコンタクト / マイクロセンサー / IC / 導通 / プローブ / 高分子 / リソグラフィー / リソフラフィ― |
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| Outline of Final Research Achievements |
This project started with the scope of development of micro-sensing device to simultaneously investigate the conductivity of multiple-electrodes of Integrated-Circuit (IC) or Micro-electro-mechanical systems (MEMS). However, throughout the research activities in the whole period, it has turned out that with the same mechanisms and/or structures, the usage as the device for measuring the surface potential of the specimen should be more feasible and effective rather than that for the conductivity. Thus, in the last research period, focusing on the usage of simultaneous measurement of the surface potential, the influence of mutual electrostatic interaction among multiple probes has been investigated, and then the calibration method to reduce the excessive influence is suggested according to the experimental and theoretical discussions.
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