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Is it possible to grow InGaN ternary alloy by HVPE?

Research Project

Project/Area Number 24656011
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Applied materials science/Crystal engineering
Research InstitutionTokyo University of Agriculture and Technology

Principal Investigator

KOUKITU Akinori  東京農工大学, 大学院・工学研究院, 教授 (10111626)

Project Period (FY) 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2012: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Keywords窒化物半導体 / InGaN, HVPE成長,原料分子制御 / 気相成長 / エピタキシャル成長 / InGaN / HVPE成長 / 原料分子制御
Research Abstract

On the study, InGaNof the key material for Energy-saving society could be grown using a new growth system, where high quality growth of InGaN and high growth rate were realized.
The wavelength emitted from InGaN can be varied from 365nm to 1900nm by controlling the solid In composition in InGaN alloy. Therefore, InGaN has attracted attention as a high-efficiency LED, LD and solar cell. However, it is difficult to grow InGaN of In >20%. There is no example of successful high quality InGaN. It was found that InGaN ofIn > 20% could be grown by a new growth system.

Report

(2 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • Research Products

    (17 results)

All 2013 2012 Other

All Journal Article (6 results) (of which Peer Reviewed: 6 results) Presentation (10 results) (of which Invited: 2 results) Remarks (1 results)

  • [Journal Article] Effects of substrate nitridation and buffer layer on the crystalline improvements of semi-polarInN(10-13) crystal on GaAs(110) by MOVPE2013

    • Author(s)
      H. C. Cho, H. Murakami, Y. Kumagai and A. Koukitu
    • Journal Title

      J. Crystal Growth

      Volume: vol. 367 Pages: 122-125

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Thermodynamic analysis of InGaN-HVPE growth using group-III chlorides, bromides, and iodides2013

    • Author(s)
      Takahide Hirasaki
    • Journal Title

      Physica Status Solide C

      Volume: 10 Issue: 3 Pages: 413-416

    • DOI

      10.1002/pssc.201200695

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of substrate nitridation and buffer layer on the crystalline improvements of semi-polar InN(10- 13) crystal on GaAs(110) by MOVPE2013

    • Author(s)
      H.C. Cho, R. Togashi, H. Murakami, Y. Kumagai, A. Koukitu
    • Journal Title

      Journal of Crystal Growth

      Volume: 367 Pages: 122-125

    • DOI

      10.1016/j.jcrysgro.2012.12.020

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Suppression of twin formation for the growth of InN(10-1-3) on GaAs(110) by metalorganic vaporphase epitaxy2012

    • Author(s)
      H. Murakami, K. Kumagai and A. Koukitu
    • Journal Title

      Physica Status Solide C

      Volume: vol.10 Pages: 472-475

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Thermodynamic analysis of InGaN-HVPE growth using group-III chlorides, bromides, and iodides2012

    • Author(s)
      T. Hirasaki, H. Murakami, Y. Kumagai and A. Koukitu
    • Journal Title

      Physica Status Solide C

      Volume: vol.10 Pages: 413-416

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Suppression of twin formation for the growth of InN(10-1-3) on GaAs(110) by metalorganic vapor phase epitaxy2012

    • Author(s)
      Hisashi Murakami
    • Journal Title

      Physica Status Solide C

      Volume: 10 Issue: 3 Pages: 472-475

    • DOI

      10.1002/pssc.201200685

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Presentation] Thermodynamic analysis of HVPE -Is it possible to grow InGaN by HVPE?-2013

    • Author(s)
      A. Koukitu
    • Organizer
      2012 Meijo International Symposium on Nitride Semiconductors (Invited)
    • Place of Presentation
      Meijo University
    • Year and Date
      2013-02-28
    • Related Report
      2012 Final Research Report
  • [Presentation] HVPE growth of the group III nitrides for bulk growth -from thermodynamic analysis to crystalgrowth?2013

    • Author(s)
      A. Koukitu
    • Organizer
      12th Akasaki esearch Center Symposium (Invited)
    • Place of Presentation
      Nagoya University
    • Year and Date
      2013-02-27
    • Related Report
      2012 Final Research Report
  • [Presentation] Thermodynamic analysis of InGaN-HVPE growth using III-bromides and III-iodides2012

    • Author(s)
      T. Hirasaki, H. Murakami, Y. Kumagai and A. Koukitu
    • Organizer
      The 4th International Symposium on Growth of III-Nitrides
    • Place of Presentation
      Hotel St. Petersburg, Russia
    • Year and Date
      2012-07-17
    • Related Report
      2012 Final Research Report
  • [Presentation] GaAs(311)A及び(311)B上半極性InNのMOVPE成長2012

    • Author(s)
      堀田哲郎、村上尚、熊谷義直、纐纈明伯
    • Organizer
      第4回窒化物半導体結晶成長講演会
    • Place of Presentation
      東京大学生産技術研究所
    • Year and Date
      2012-04-28
    • Related Report
      2012 Final Research Report
  • [Presentation] 様々なハロゲン化合物を用いたInGaN-HVPE成長の熱力学解析2012

    • Author(s)
      平崎貴英、花岡幸史、村上尚、熊谷義直、纐纈明伯
    • Organizer
      第4回窒化物半導体結晶成長講演会
    • Place of Presentation
      東京大学生産技術研究所
    • Year and Date
      2012-04-28
    • Related Report
      2012 Final Research Report
  • [Presentation] GaAs(110)基板上半極性InN成長における水素添加効果2012

    • Author(s)
      村上尚、堀田哲郎、富樫理恵、熊谷義直、纐纈明伯
    • Organizer
      第4回窒化物半導体結晶成長講演会
    • Place of Presentation
      東京大学生産技術研究所
    • Year and Date
      2012-04-28
    • Related Report
      2012 Final Research Report
  • [Presentation] GaAs(311)A及び(311)B上半極性InNのMOVPE成長

    • Author(s)
      堀田哲郎
    • Organizer
      第4回窒化物半導体結晶成長講演会
    • Place of Presentation
      東京大学生産技術研究所
    • Related Report
      2012 Annual Research Report
  • [Presentation] Thermodynamic analysis of InGaN-HVPE growth using III-bromides and III-iodides

    • Author(s)
      T. Hirasaki
    • Organizer
      The 4th International Symposium on Growth of III-Nitrides (ISGN-4)
    • Place of Presentation
      Hotel "Saint-petersburug", St. Petersburg, Russia
    • Related Report
      2012 Annual Research Report
  • [Presentation] HVPE growth of the group III nitrides for bulk growth - from thermodynamic analysis to crystal growth -

    • Author(s)
      A. Koukitu
    • Organizer
      12th Akasaki Research Center Symposium
    • Place of Presentation
      Nagoya University, Japan
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Thermodynamic analysis of HVPE -Is it possible to grow InGaN by HVPE?-

    • Author(s)
      A. Koukitu
    • Organizer
      2012 Meijo International Symposium on Nitride Semiconductors (MSN2012)
    • Place of Presentation
      Meijo University, Japan
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Remarks]

    • URL

      http://koukitu-lab.jpn.org/

    • Related Report
      2012 Final Research Report

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Published: 2013-05-31   Modified: 2019-07-29  

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