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Vacuum gauge available from high vacuum to beyond atmospheric pressure based on leakage of surface acoustic wave propagating on ball to surrounding gases.

Research Project

Project/Area Number 24656060
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeSingle-year Grants
Research Field Applied physics, general
Research InstitutionTohoku University

Principal Investigator

YAMANAKA Kazushi  東北大学, 工学(系)研究科(研究院), 教授 (00292227)

Co-Investigator(Kenkyū-buntansha) TSUJI Toshihiro  東北大学, 大学院工学研究科, 助教 (70374965)
Project Period (FY) 2012-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2013: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2012: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Keywords弾性表面波 / 漏洩減衰 / SAWセンサ / 真空計 / 圧力計
Research Abstract

The pressure dependence of the leaky attenuation was measured using ultra-long propagation of naturally collimated surface acoustic wave (SAW) in a ball SAW device and the realization of the vacuum gauge available from beyond atmospheric pressure was attempted. The ball SAW device with an interditgital transducer of Al film, useful for suppressing the scattering, succeeded in measuring the waveform after propagating 1 m by S/N of 20 at 100 kPa in N2. Moreover, precise measurement of the attenuation was succeeded by fitting an amplitude decay curve to an exponential function. The leaky attenuation is measured by subtracting extraneous attenuation independent of the pressure. As a result, it was observed that the pressure dependence was linear in the pressure range from 300 kPa down to 0.03 kPa. From these results, the foundation of the pressure gauge available beyond atmospheric pressure was established based on the measurement of the leaky attenuation by the ball SAW device.

Report

(3 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • Research Products

    (53 results)

All 2014 2013 2012 Other

All Journal Article (11 results) (of which Peer Reviewed: 8 results) Presentation (30 results) (of which Invited: 2 results) Book (6 results) Remarks (2 results) Patent(Industrial Property Rights) (4 results)

  • [Journal Article] SiOx膜を用いたボールSAWセンサによる高感度微量水分測定システムの開発2014

    • Author(s)
      萩原啓, 大場俊弘, 小清水秀和, 辻俊宏, 大泉透, 竹田宣生, 赤尾慎吾, 大木恒郎, 高柳浩介, 柳沢恭行, 中曽教尊, 塚原祐輔, 山中一司
    • Journal Title

      圧電材料・デバイスシンポジウム2014講演論文集

      Pages: 47-52

    • Related Report
      2013 Final Research Report
  • [Journal Article] SiOx膜を用いたボールSAWセンサによる高感度微量水分測定システムの開発2014

    • Author(s)
      萩原啓、大場俊弘、小清水秀和、辻俊宏、大泉透、竹田宣生、赤尾慎吾、大木恒郎、高柳浩介、柳沢恭行、中曽教尊、塚原祐輔、山中一司
    • Journal Title

      圧電材料・デバイスシンポジウム2014 講演論文集

      Volume: 2014 Pages: 47-52

    • Related Report
      2013 Annual Research Report
  • [Journal Article] Fast and Sensitive Ball SAW Hydrogen Sensor with Porus Pd-Pt Alloy Film2013

    • Author(s)
      Toshihiro Tsuji, Satoshi Hagihara, Toru Oizumi, Nobuo Takeda, Tsuneo Ohgi, Takayuki Yanagisawa, Shingo Akao, Noritaka Nakaso, Kazushi Yamanaka
    • Journal Title

      Proceedings of Symposium on Ultrasonic Electronics

      Volume: Vol.34(2013) Pages: 155-156

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Highly Sensitive Trace Moisture Ball SAW Sensor Using SiOx film2013

    • Author(s)
      Satoshi Hagihara, Toshihiro Tsuji, Toru Oizumi, Nobuo Takeda, Shingo Akao, Tsuneo Ohgi, Kosuke Takayaangi, Takayuki Yangisawa, Noritaka Nakaso, Yusuke Tsukahara, Kazushi Yamanaka
    • Journal Title

      Proceedings of Symposium on Ultrasonic Electronics

      Volume: Vol.34(2013) Pages: 381-382

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Pd-Pt合金膜を用いたボールSAWセンサによる水素の高感度計測2013

    • Author(s)
      辻俊宏, 三原亮祐, 齋藤智弘, 萩原啓, 大泉透, 竹田宣生, 大木恒郎, 柳沢恭行, 赤尾慎吾, 中曽教尊, 山中一司
    • Journal Title

      圧電材料・デバイスシンポジウム2013講演論文集

      Pages: 85-86

    • Related Report
      2013 Final Research Report
  • [Journal Article] Measurement of Trace Moisture Using Ball SAW Sensor2012

    • Author(s)
      Satoshi Hagihara, Toshihiro Tsuji, Toru Oizumi, Nobuo Takeda, Shingo Akao, Tsuneo Ohgi, Takayuki Yanagisawa, Noritaka Nakaso, Kazushi Yamanaka
    • Journal Title

      Proceedings of Symposium on Ultrasonic Electronics

      Volume: Vol.33 Pages: 439-440

    • Related Report
      2013 Final Research Report 2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Frequency Dependence Analysis of Ball SAW Sensor's Response2012

    • Author(s)
      Toshihiro Tsuji, Satoshi Hagihara, Toru Oizumi, Nobuo Takeda, Shingo Akao, Kosuke Takayanagi, Tsuneo Ohgi, Takayuki Yanagisawa, Noritaka Nakaso, Kazushi Yamanaka
    • Journal Title

      Proceedings of Symposium on Ultrasonic Electronics

      Volume: Vol.33 Pages: 49-50

    • Related Report
      2013 Final Research Report 2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Continuous Measurement of Multiple Gases Using Ball Surface Acoustic Wave Gas Chromatograph2012

    • Author(s)
      Toshihiro SAKAMOTO, Shingo AKAO, Takamitsu IWAYA, Toshihiro TSUJI, Noritaka NAKASO, Kazushi YAMANAKA
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51

    • NAID

      210000140945

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Developement of High Precision Metal Micro-Electro-Mechanical-Systems Column for Portable Surface Acoustic Wave Gas Chromatograph2012

    • Author(s)
      Takamitsu IWAYA, Shingo AKAO, Toshihiro SAKAMOTO, Toshihiro TSUJI, Noritaka NAKASO, Kazushi YAMANAKA
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51

    • NAID

      210000140947

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Continuous Measurement of Multiple Gases Using Ball Surface Acoustic Wave Gas Chromatograph2012

    • Author(s)
      Takamitsu IWAYA, Shingo AKAO, Toshihiro SAKAMOTO, Toshihiro TSUJI, Noritaka NAKASO, Kazushi YAMANAKA
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Issue: 7S Pages: 07GC22-07GC22

    • DOI

      10.1143/jjap.51.07gc22

    • NAID

      210000140945

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Journal Article] Development of High Precision Metal Micro-Electro-Mechanical-Systems Column for Portable Surface Acoustic Wave Gas Chromatograph2012

    • Author(s)
      Iwaya Takamitsu, Akao Shingo, Sakamoto Toshihiro, Tsuji Toshihiro, Nakaso Noritaka, Yamanaka Kazushi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Issue: 7S Pages: 07GC24-07GC24

    • DOI

      10.1143/jjap.51.07gc24

    • NAID

      210000140947

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Presentation] 微量水分計測のためのボールSAWセンサシステムの高度化2014

    • Author(s)
      辻俊宏, 萩原啓, 大場俊弘, 小清水秀和, 大泉透, 竹田宣生, 赤尾慎吾, 大木恒郎, 高柳浩介, 柳沢恭行, 中曽教尊, 塚原祐輔, 山中一司
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンハ?ス(神奈川)
    • Year and Date
      2014-03-18
    • Related Report
      2013 Final Research Report
  • [Presentation] SiOx膜を用いたボールSAWセンサによる高感度微量水分測定システムの開発2014

    • Author(s)
      萩原啓, 大場俊弘, 小清水秀和, 辻俊宏, 大泉透, 竹田宣生, 赤尾慎吾, 大木恒郎, 高柳浩介, 柳沢恭行, 中曽教尊, 塚原祐輔, 山中一司
    • Organizer
      圧電材料・デバイスシンポジウム2014
    • Place of Presentation
      東北大学(宮城県)
    • Year and Date
      2014-01-29
    • Related Report
      2013 Final Research Report
  • [Presentation] 微量水分計測のためのボールSAWセンサシステムの高度化2014

    • Author(s)
      辻俊宏、萩原啓、大場俊弘、小清水秀和、大泉透、竹田宣生、赤尾慎吾、大木恒郎、高柳浩介、柳沢恭行、中曽教尊、塚原祐輔、山中一司
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川県
    • Related Report
      2013 Annual Research Report
  • [Presentation] SiOx膜を用いたボールSAWセンサによる高感度微量水分測定システムの開発2014

    • Author(s)
      萩原啓、大場俊弘、小清水秀和、辻俊宏、大泉透、竹田宣生、赤尾慎吾、大木恒郎、高柳浩介、柳沢恭行、中曽教尊、塚原祐輔、山中一司
    • Organizer
      圧電材料・デバイスシンポジウム2014
    • Place of Presentation
      宮城
    • Related Report
      2013 Annual Research Report
  • [Presentation] Fast and Sensitive Ball SAW Hydrogen Sensor with Porus Pd-Pt Alloy Film2013

    • Author(s)
      Toshihiro Tsuji, Satoshi Hagihara, Toru Oizumi, Nobuo Takeda, Tsuneo Ohgi, Takayuki Yanagisawa, Shingo Akao, Noritaka Nakaso, Kazushi Yamanaka
    • Organizer
      The 34th Symposium on Ultrasonic Electronics USE2013
    • Place of Presentation
      同志社大学(京都)
    • Year and Date
      2013-11-20
    • Related Report
      2013 Final Research Report
  • [Presentation] Fast and sensitive H2 detection by ball surface acoustic wave (SAW) sensor with porous Pd-Pt alloy film2013

    • Author(s)
      Toshihiro Tsuji, Ryosuke Mihara, Tomohiro Saito, Satoshi Hagihara, Toru Oizumi, Nobuo Takeda, Tsuneo Ohgi,Takayuki Yanagisawa, Shingo Akao,Noritaka Nakaso,Kazushi Yamanaka
    • Organizer
      2013 Joint UFFC, EFTF and PFM Symposium
    • Place of Presentation
      Prague Congress Center (Prague Czech Republic)
    • Year and Date
      2013-07-25
    • Related Report
      2013 Final Research Report
  • [Presentation] Response of quartz ball surface acoustic wave (SAW) sensor to trace moisture,2013 Joint UFFC2013

    • Author(s)
      Kazushi Yamanaka, Satoshi Hagihara, Tomohiro Saito,Oizumi Oizumi,Nobuo Takeda,Shigo Akao,Kosuke Takayanagi, Takayuki Yanagisawa, Noritaka Nakaso, Yusuke Tsukahara, Toshihiro Tsuji
    • Organizer
      EFTF and PFM Symposium
    • Place of Presentation
      Prague Congress Center(Prague Czech Republic)
    • Year and Date
      2013-07-24
    • Related Report
      2013 Final Research Report
  • [Presentation] Highly Sensitive Ball SAW Hydrogen Sensor with Porous Pd Alloy Film2013

    • Author(s)
      Toshihiro Tsuji,Ryosuke Mihara, Tomohiro Saito,Satoshi Hagihara,Toru Oizumi,Nobuo Takeda,Tsuneo Ohgi, Takayuki Yanagisawa, Shingo Akao,Noritaka Nakaso, and Kazushi Yamanaka
    • Organizer
      3rd International Symposium on Laser Ultrasonics and Advanced Sensing
    • Place of Presentation
      Yokohama Red Brick Warehouse (Kanagawa,Japan)
    • Year and Date
      2013-06-27
    • Related Report
      2013 Final Research Report
  • [Presentation] ボールSAWセンサの最近の展開2013

    • Author(s)
      山中一司
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学(神奈川県)
    • Year and Date
      2013-03-29
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Pd-Pt合金膜を用いたボールSAWセンサによる空気中水素の測定2013

    • Author(s)
      辻俊宏, 三原亮祐, 齋藤智弘, 萩原啓, 大泉透, 竹田宣生, 大木恒郎, 柳沢恭行, 赤尾慎吾, 中曽教尊, 山中一司
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学(神奈川県)
    • Year and Date
      2013-03-29
    • Related Report
      2013 Final Research Report
  • [Presentation] Pd-Pt合金膜を用いたボールSAWセンサによる水素の高感度計測2013

    • Author(s)
      辻俊宏, 三原亮祐, 齋藤智弘, 萩原啓, 大泉透, 竹田宣生, 大木恒郎, 柳沢恭行, 赤尾慎吾, 中曽教尊, 山中一司
    • Organizer
      圧電材料・デバイスシンポジウム2013
    • Place of Presentation
      東北大学(宮城県)
    • Year and Date
      2013-01-28
    • Related Report
      2013 Final Research Report
  • [Presentation] Highly Sensitive Trace Moisture Ball SAW Sensor Using SiOx film2013

    • Author(s)
      Satoshi Hagihara, Toshihiro Tsuji, Toru Oizumi, Nobuo Takeda, Shingo Akao, Tsuneo Ohgi, Kosuke Takayaangi, Takayuki Yangisawa, Noritaka Nakaso, Yusuke Tsukahara, Kazushi Yamanaka
    • Organizer
      The 34th Symposium on Ultrasonic Electronics USE2013
    • Place of Presentation
      京都
    • Related Report
      2013 Annual Research Report
  • [Presentation] Fast and Sensitive Ball SAW Hydrogen Sensor with Porus Pd-Pt Alloy Film2013

    • Author(s)
      Toshihiro Tsuji, Satoshi Hagihara, Toru Oizumi, Nobuo Takeda, Tsuneo Ohgi, Takayuki Yanagisawa, Shingo Akao, Noritaka Nakaso, Kazushi Yamanaka
    • Organizer
      The 34th Symposium on Ultrasonic Electronics USE2013
    • Place of Presentation
      京都
    • Related Report
      2013 Annual Research Report
  • [Presentation] Response of quartz ball surface acoustic wave (SAW) sensor to trace moisture2013

    • Author(s)
      Kazushi Yamanaka, Satoshi Hagihara,Tomohiro Saito, Oizumi Oizumi, Nobuo Takeda, Shigo Akao, KosukeTakayanagi, Takayuki Yanagisawa, Noritaka Nakaso,Yusuke Tsukahara, Toshihiro Tsuji
    • Organizer
      2013 Joint UFFC, EFTF and PFM Symposium
    • Place of Presentation
      チェコ、プラハ
    • Related Report
      2013 Annual Research Report
  • [Presentation] Fast and sensitive H2 detection by ball surface acoustic wave (SAW) sensor with porous Pd-Pt alloy film2013

    • Author(s)
      Toshihiro Tsuji, Ryosuke Mihara,Tomohiro Saito, Satoshi Hagihara, Toru Oizumi, Nobuo Takeda, Tsuneo Ohgi,Takayuki Yanagisawa, Shingo Akao,NoritakaNakaso,Kazushi Yamanaka
    • Organizer
      2013 Joint UFFC, EFTF and PFM Symposium
    • Place of Presentation
      チェコ、プラハ
    • Related Report
      2013 Annual Research Report
  • [Presentation] Detection of Trace Water Vapor Using SiOx-Coated Ball SAW Sensor2013

    • Author(s)
      Kosuke Takayanagi, Shingo Akao, Takayuki Yanagisawa, Noritaka Nakaso, Yusuke Tsukahara, Satoshi Hagihara, Toru Oizumi, Nobuo Takeda, Toshihiro Tsuji, Kazushi Yamanaka
    • Organizer
      3rd International Symposium on Laser Ultrasonics and Advanced Sensing
    • Place of Presentation
      神奈川県
    • Related Report
      2013 Annual Research Report
  • [Presentation] Meander Propagation Route of Surface Acoustic Wave on a Trigonal Crystal Ball Observed Using Non Contact Electrodes2013

    • Author(s)
      Takayuki Yanagisawa, Tsuneo Ohgi, Shingo Akao, Noritaka Nakaso, Yusuke Tsukahara, Yoshikazu Ohara, Toshihiro Tsuji, Kazushi Yamanaka
    • Organizer
      3rd International Symposium on Laser Ultrasonics and Advanced Sensing
    • Place of Presentation
      神奈川県
    • Related Report
      2013 Annual Research Report
  • [Presentation] Measurement of trace water vapor using ball surface acoustic wave (SAW) sensor2013

    • Author(s)
      Satoshi Hagihara, Tomohiro Saito, Ryosuke Mihara, Toru Oizumi , Nobuo Takeda, Shingo Akao, Tsuneo Ohgi, Kosuke Takayanagi, Takayuki Yanagisawa, Noritaka Nakaso, Toshihiro Tsuji, and Kazushi Yamanaka
    • Organizer
      3rd International Symposium on Laser Ultrasonics and Advanced Sensing
    • Place of Presentation
      神奈川県
    • Related Report
      2013 Annual Research Report
  • [Presentation] Highly Sensitive Ball SAW Hydrogen Sensor with Porous Pd Alloy Film2013

    • Author(s)
      Toshihiro Tsuji, Ryosuke Mihara, Tomohiro Saito, Satoshi Hagihara, Toru Oizumi, Nobuo Takeda, Tsuneo Ohgi,Takayuki Yanagisawa, Shingo Akao, Noritaka Nakaso, and Kazushi Yamanaka
    • Organizer
      3rd International Symposium on Laser Ultrasonics and Advanced Sensing
    • Place of Presentation
      神奈川県
    • Related Report
      2013 Annual Research Report
  • [Presentation] ボールSAWセンサの最近の展開2013

    • Author(s)
      山中一司
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川
    • Related Report
      2012 Research-status Report
    • Invited
  • [Presentation] ボールSAWセンサを用いた微量水分の高感度測定2013

    • Author(s)
      萩原啓、齋藤智弘、三原亮祐、大泉透、竹田宣生、赤尾慎吾、大木恒郎、柳沢恭行、高柳浩介、中曽教尊、辻俊宏、塚原祐輔、山中一司
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川
    • Related Report
      2012 Research-status Report
  • [Presentation] Pd-Pt合金膜を用いたボールSAWセンサによる空気中水素の測定2013

    • Author(s)
      辻俊宏、三原亮祐、齋藤智弘、萩原啓、大泉透、竹田宣生、大木恒郎、柳沢恭行、赤尾慎吾、中曽教尊、山中一司
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川
    • Related Report
      2012 Research-status Report
  • [Presentation] Pd-Pt合金膜を用いたボールSAWセンサによる水素の高感度計測2013

    • Author(s)
      辻俊宏、三原亮祐、齋藤智弘、萩原啓、大泉透、竹田宣生、大木恒郎、柳沢恭行、赤尾慎吾、中曽教尊、山中一司
    • Organizer
      圧電材料・デバイスシンポジウム2013
    • Place of Presentation
      宮城
    • Related Report
      2012 Research-status Report
  • [Presentation] Frequency Dependence Analysis of Ball SAW Sensor's Response2012

    • Author(s)
      Toshihiro Tsuji, Satoshi Hagihara, Toru Oizumi, Nobuo Takeda, Shingo Akao, Kosuke Takayanagi, Tsuneo Ohgi, Takayuki Yanagisawa, Noritaka Nakaso, Kazushi Yamanaka
    • Organizer
      The 33rd Symposium on Ultrasonic Electronics USE2012
    • Place of Presentation
      Chiba University (Chiba,Japan)
    • Year and Date
      2012-11-13
    • Related Report
      2013 Final Research Report
  • [Presentation] Continuous Monitoring of Multiple-Gas Concentrations Using Ball SAW Gas Chromatograph2012

    • Author(s)
      Toshihiro Tsuji, Satoshi Hagihara, Shingo Akao,Tsuneo Ohgi,Takayuki Yanagisawa, Noritaka Nakaso,Kazsuhi Yamanaka
    • Organizer
      2012 IEEE International Ultrasonics Symposium
    • Place of Presentation
      International Congress Center(Dresden,Germany)
    • Year and Date
      2012-10-09
    • Related Report
      2013 Final Research Report
  • [Presentation] Measurement of Trace Moisture by Differential Operation of Dual Ball SAW Sensors2012

    • Author(s)
      Satoshi Hagihara, Tosihiro Tsuji, Toru Oizumi, Shingo Akao, Kosuke Takayanagi Tsuneo Ohgi, Takayuki Yanagisawa, Noritaka Nakaso, Kazushi Yamanaka
    • Organizer
      2012 IEEE International Ultrasonics Symposium
    • Place of Presentation
      International Congress Center(Dresden,Germany)
    • Year and Date
      2012-10-09
    • Related Report
      2013 Final Research Report
  • [Presentation] Frequency Dependence Analysis of Ball SAW Sensor's Response2012

    • Author(s)
      Toru Oizumi, Nobuo Takeda, Shingo Akao, Kosuke Takayanagi, Tsuneo Ohgi, Takayuki Yanagisawa, Noritaka Nakaso, Kazushi Yamanaka
    • Organizer
      第33回超音波エレクトロニクスの基礎と応用に関するシンポジウム(USE2012)
    • Place of Presentation
      千葉
    • Related Report
      2012 Research-status Report
  • [Presentation] Measurement of Trace Moisture Using Ball SAW Sensor2012

    • Author(s)
      Satoshi Hagihara, Toshihiro Tsuji, Toru Oizumi, Nobuo Takeda, Shingo Akao, Tsuneo Ohgi, Takayuki Yanagisawa, Noritaka Nakaso, Kazushi Yamanaka
    • Organizer
      第33回超音波エレクトロニクスの基礎と応用に関するシンポジウム(USE2012)
    • Place of Presentation
      千葉
    • Related Report
      2012 Research-status Report
  • [Presentation] Measurement of Trace Moisture by Differential Operation of Dual Ball SAW Sensors2012

    • Author(s)
      Toshihiro Tsuji, Satoshi Hagihara, Shingo Akao, Tsuneo Ohgi, Takayuki Yanagisawa, Noritaka Nakaso, Kazsuhi Yamanaka
    • Organizer
      2012 IEEE International Ultrasonic Symposium (IUS)
    • Place of Presentation
      ドイツ、ドレスデン
    • Related Report
      2012 Research-status Report
  • [Presentation] Continuous Monitoring of Multiple-Gas Concentrations Using Ball SAW Gas2012

    • Author(s)
      Satoshi Hagihara, Tosihiro Tsuji, Toru Oizumi, Shingo Akao, Kosuke Takayanagi Tsuneo Ohgi, Takayuki Yanagisawa, Noritaka Nakaso, Kazushi Yamanaka
    • Organizer
      2012 IEEE International Ultrasonic Symposium (IUS)
    • Place of Presentation
      ドイツ、ドレスデン
    • Related Report
      2012 Research-status Report
  • [Book] Advance in Acoustic Microscory and High Resolution Imaging,12 Ultrasonic atomic force microscopy2013

    • Author(s)
      Kazushi Yamanaka, Toshihiro Tsuji
    • Publisher
      Wiley VCH
    • Related Report
      2013 Final Research Report
  • [Book] Acoustic Scanning Probe Microscopy,Chapter6 Ultrasonic Atomic Force Microscopy2013

    • Author(s)
      Kazushi Yamanaka, Toshihiro Tsuji
    • Publisher
      Springer
    • Related Report
      2013 Final Research Report
  • [Book] Characterization of MATERIALS vol.3,ULTRASONIC ATOMIC FORCE MICROSCOPY2012

    • Author(s)
      Kazushi Yamanaka, Toshihiro Tsuji
    • Publisher
      Wiley
    • Related Report
      2013 Final Research Report
  • [Book] ULTRASONIC ATOMIC FORCE MICROSCOPY Characterization of MATERIALS vol.3(2012)2012

    • Author(s)
      Kazushi Yamanaka, Toshihiro Tsuji
    • Publisher
      Springer
    • Related Report
      2012 Research-status Report
  • [Book] Acoustic Scanning Probe Microscopy Chapter6 Ultrasonic Atomic Force Microscopy2012

    • Author(s)
      Kazushi Yamanaka, Toshihiro Tsuji
    • Publisher
      Springer
    • Related Report
      2012 Research-status Report
  • [Book] Advance in Acoustic Microscory and High Resolution Imaging2012

    • Author(s)
      Kazushi Yamanaka, Toshihiro Tsuji
    • Publisher
      Wiley-VCH
    • Related Report
      2012 Research-status Report
  • [Remarks]

    • URL

      http://www.material.tohoku.ac.jp/~hyoka/lab.html

    • Related Report
      2013 Final Research Report
  • [Remarks] 山中研究室

    • URL

      http://www.material.tohoku.ac.jp/~hyoka/lab.html

    • Related Report
      2013 Annual Research Report
  • [Patent(Industrial Property Rights)] 水分濃度センサ2013

    • Inventor(s)
      高柳浩介, 塚原祐輔, 山中一司, 辻俊宏
    • Industrial Property Rights Holder
      凸版印刷株式会社, 国立大学法人 東北大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2013-130728
    • Filing Date
      2013-06-21
    • Related Report
      2013 Final Research Report
  • [Patent(Industrial Property Rights)] 水分濃度センサ2013

    • Inventor(s)
      高柳浩介、塚原祐輔、山中一司、辻俊宏
    • Industrial Property Rights Holder
      凸版印刷株式会社、国立大学法人東北大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2013-130728
    • Filing Date
      2013-06-21
    • Related Report
      2013 Annual Research Report
  • [Patent(Industrial Property Rights)] ガスセンサ2012

    • Inventor(s)
      辻俊宏, 山中一司, 小原良和, 坂本俊裕, 岩谷隆光
    • Industrial Property Rights Holder
      国立大学法人東北大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-266906
    • Filing Date
      2012-12-06
    • Related Report
      2013 Final Research Report
  • [Patent(Industrial Property Rights)] ガスセンサ2012

    • Inventor(s)
      辻俊宏、山中一司、小原良和、坂本俊宏、岩谷隆光
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-266906
    • Filing Date
      2012-12-06
    • Related Report
      2012 Research-status Report

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Published: 2013-05-31   Modified: 2019-07-29  

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