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Development of Birefringence Analysis Code for Single Crystal Optical Elements

Research Project

Project/Area Number 24656086
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeSingle-year Grants
Research Field Materials/Mechanics of materials
Research InstitutionKyoto University

Principal Investigator

MIYAZAKI Noriyuki  京都大学, 工学(系)研究科(研究院), 名誉教授 (10166150)

Project Period (FY) 2012-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2013: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2012: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywords複屈折 / 残留応力 / クリープ変形 / 有限要素法
Research Abstract

Steady state creep constitutive equation was formulated using the experimental data on compressive tests under constant strain rates at elevated temperatures. Residual stress in a calcium fluoride single crystal ingot after ingot annealing was calculated by the nonlinear finite element analysis using the steady state creep constitutive equation. In the birefringence analysis, optical path difference was obtained from the residual stress. The distributions of the optical path difference obtained from the analysis were compared with those of experimental measurements. It is found that analysis results agree well with experimental measurements. Thus the subsystem for residual stress estimation was verified. The birefringence was estimated for a calcium fluoride single crystal chamber window of an ArF excimer laser light source with a wave a length of 193nm used in a semiconductor lithography system.

Report

(3 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • Research Products

    (6 results)

All 2013 2012

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (4 results) (of which Invited: 1 results)

  • [Journal Article] フッ化カルシウム単結晶の真性複屈折を考慮した複屈折シミュレーション2013

    • Author(s)
      北村優太, 宮崎則幸, 永倉直人, 橋本健宏, 正田勲
    • Journal Title

      日本シミュレーション学会論文誌

      Volume: 第4巻, 第3号 Pages: 71-80

    • NAID

      130004544048

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] フッ化カルシウム単結晶の真性複屈折を考慮した複屈折シミュレーション2012

    • Author(s)
      北村優太, 宮崎則幸, 永倉直人, 橋本健宏, 正田 勲
    • Journal Title

      日本シミュレーション学会論文誌

      Volume: 第4巻,第3号 Pages: 71-80

    • NAID

      130004544048

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Presentation] Computational Solid Mechanics Studies on Material Strengths of Single Crystals for Electronic/Optical Use2013

    • Author(s)
      N. MIYAZAKI
    • Organizer
      APCOM & ISCM 2013
    • Place of Presentation
      Singapore
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Invited
  • [Presentation] Birefringence Simulations of Calcium Fluoride Single Crystal Window with Consideration of Intrinsic Birefringence2012

    • Author(s)
      Y. KITAMURA, N. MIYAZAKI, N. NAGAKURA, Y. HASHIMOTO and I. MASADA
    • Organizer
      4th International Conference on Computational Methods, (ICCM 2012)
    • Place of Presentation
      Gold Coast, Australia.
    • Related Report
      2013 Final Research Report
  • [Presentation] フッ化カルシウム単結晶の真性複屈折を考慮した光学特性解析2012

    • Author(s)
      北村優太, 宮崎則幸, 永倉直人, 縄田輝彦
    • Organizer
      日本機械学会第25回計算力学講演会
    • Place of Presentation
      神戸市
    • Related Report
      2013 Final Research Report 2012 Research-status Report
  • [Presentation] Birefringence Simulations of Calcium Fluoride Single Crystal Window with Consideration of Intrinsic Birefringence2012

    • Author(s)
      Y. KITAMURA, N. MIYAZAKI, N. NAGAKURA, Y. HASHIMOTO and I. MASADA
    • Organizer
      4th International Conference on Computational Methods (ICCM 2012)
    • Place of Presentation
      Gold Coast, Australia
    • Related Report
      2012 Research-status Report

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Published: 2013-05-31   Modified: 2019-07-29  

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