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Surface treatment process using photoemission-assisted plasma for achievement of atomic scale flattened surface

Research Project

Project/Area Number 24656092
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeSingle-year Grants
Research Field Production engineering/Processing studies
Research InstitutionTohoku University

Principal Investigator

YUJI Takakuwa  東北大学, 多元物質科学研究所, 教授 (20154768)

Co-Investigator(Renkei-kenkyūsha) OGAWA Shuichi  東北大学, 多元物質科学研究所, 助教 (00579203)
Project Period (FY) 2012-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2013: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2012: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Keywords光電子制御プラズマ / ラングミュアプローブ / 表面平坦化 / ドライ研磨 / 低エネルギーイオン生成 / タウンゼント放電 / 平坦化
Research Abstract

Photoemission-assisted plasma (PAP) ion source has been developed for flattening surface morphology of metal substrates down to an atomic-scale roughness. In this study, ion kinetic energy (Ek) of impinging on surface was estimated by Langmuir probe measurement, resulting in Ek of PAP with 0.1-30 eV. PAP irradiations to Cu-deposited Si substrates with Ra(0) of ~13 nm were conducted in low energy (< 30 eV) and changing ion fluence (< 1018 cm-2) regime. From the surface analysis by atomic force microscopy, surface roughness were reduced down to 15~70% compared of Ra(0). However, protrusions formed on the surfaces due to high ion fluence irradiation, which caused increase of surface roughness. The experiment conditions that control the surface morphology changes are revealed from the aspect from ion energy and ion fluence. Based on the observations, it is considered that surface migration enhancement of surface atoms induced by low Ek of PAP plays a vital role for the morphology changes.

Report

(3 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • Research Products

    (11 results)

All 2013 Other

All Presentation (11 results)

  • [Presentation] Protrusion Formations on Cu and Si Surfaces by Irradiation of Photoemission- Assisted Ar Plasma2013

    • Author(s)
      S. Ajia, Y. Ohtomo, S. Ogawa, and Y. Takakuwa
    • Organizer
      12th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures
    • Place of Presentation
      つくば市、つくば国際会議場
    • Year and Date
      2013-11-08
    • Related Report
      2013 Final Research Report
  • [Presentation] Langmuir-probe analysis of photoemission-assisted Ar plasma for planarization process2013

    • Author(s)
      S. Ajia, Y. Ohtomo, S. Ogawa and Y. Takakuwa
    • Place of Presentation
      パリ、フランス
    • Year and Date
      2013-09-12
    • Related Report
      2013 Final Research Report
  • [Presentation] Development of a Photoemission-Assisted Plasma Ion Source for Atomic-Scale Surface Planarization2013

    • Author(s)
      X. AJIASAIJIAN, Y. Ohtomo, S. Ogawa, Y. Takakuwa
    • Organizer
      Particle - surface interactions: from surface analysis to materials processing
    • Place of Presentation
      Luxembourg, Luxembourg
    • Related Report
      2013 Annual Research Report
  • [Presentation] Surface morphology improvement of Cu substrate by photoemission-assisted Ar+ ion beam and fast Ar0 atom beam2013

    • Author(s)
      S. Ajia, Y. Ohtomo, S. Ogawa, Y. Takakuwa
    • Organizer
      The 12th International Symposium on Sputtering & Plasma Processes
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Langmuir-probe analysis of photoemission-assisted Ar plasma for planarization process2013

    • Author(s)
      A. Saijian, Y. Ohtomo, S. Ogawa, Y. Takakuwa
    • Organizer
      19th International Vacuum Congress
    • Place of Presentation
      Paris, France
    • Related Report
      2013 Annual Research Report
  • [Presentation] Nanometer-Scale Modification of Si and Cu Surfaces by Photoemission-Assisted Ar-Plasma: Enhancement of Surface Adatom Diffusion2013

    • Author(s)
      S. J. Ajia, Y. Ohtomo, S. Ogawa, Y. Takakuwa
    • Organizer
      2013 JSAP-MRS Joint Symposia
    • Place of Presentation
      Kyotanabe, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Protrusion Formations on Cu and Si Surfaces by Irradiation of Photoemission- Assisted Ar Plasma2013

    • Author(s)
      S. Ajia, Y. Ohtomo, S. Ogawa, Y. Takakuwa
    • Organizer
      12th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures
    • Place of Presentation
      Tsukuba, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] プローブ法による光電子制御プラズマの空間電位解析

    • Author(s)
      阿加賽見,大友悠大,小川修一,高桑雄二
    • Organizer
      第53回真空に関する連合講演会
    • Place of Presentation
      神戸
    • Related Report
      2012 Research-status Report
  • [Presentation] 光電子制御イオンビームと高速中性原子ビームによる基板表面処理の比較

    • Author(s)
      阿加賽見,大友悠大,小川修一,高桑雄二
    • Organizer
      第32回表面科学学術講演会
    • Place of Presentation
      仙台
    • Related Report
      2012 Research-status Report
  • [Presentation] Characteristics analysis of Photoemission-Assisted plasma for planarization process

    • Author(s)
      Ajia Saijian, Yudai Ohtomo, S. Ogawa, Y. Takakuwa
    • Organizer
      第10回多元物質科学研究所研究発表会
    • Place of Presentation
      仙台
    • Related Report
      2012 Research-status Report
  • [Presentation] Analysis of Plasma Potential in Photoemission-Assisted Plasma Used for Dry Planarization Process

    • Author(s)
      Saijian Ajia, Yudai Ohtomo, Shuichi Ogawa, Yuji Takakuwa
    • Organizer
      2013年 第60回応用物理学会春季学術講演会
    • Place of Presentation
      厚木
    • Related Report
      2012 Research-status Report

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Published: 2013-05-31   Modified: 2019-07-29  

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