| Project/Area Number |
24656093
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Single-year Grants |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Tohoku University |
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Principal Investigator |
GAO WEI 東北大学, 工学(系)研究科(研究院), 教授 (70270816)
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| Co-Investigator(Kenkyū-buntansha) |
SHIMIZU Yuki 東北大学, 大学院工学研究科, 准教授 (70606384)
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| Project Period (FY) |
2012-04-01 – 2014-03-31
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| Project Status |
Completed (Fiscal Year 2013)
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| Budget Amount *help |
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2013: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2012: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
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| Keywords | 計測 / 静電気力 / プローブ顕微鏡 / 金型 / バイオオプティクス / 非接触 / 絶対距離 / マイクロ / 形状 / 精度 / 微細形状 / 微空間 / ナノメートル |
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| Research Abstract |
In this research, a new scanning electrostatic force microscope has been developed for noncontact surface profile measurement of micro-specimens of bio-optics. A charged conducting probe tip is oscillated by a tuning fork quartz crystal resonator. The probe tip is scanned over the sample surface by using an XY scanner in such a way that the frequency shift of the tuning fork oscillation, which corresponds to the electrostatic force gradient, is kept constant by controlling the probe Z position with a Z scanner. A dual height method is proposed to accurately obtain the tip to sample distances through removing the influence of the electric field distribution on the sample surface.
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