Development of laser-beam shaping method for retro-reflector fabrication on surface of metal substrate

• Project/Area Number: 24656095
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Single-year Grants
• Research Field: Production engineering/Processing studies
• Research Institution: Ibaraki University
• Principal Investigator: YAMASAKI Kazuhiko 茨城大学, 工学部, 准教授 (30436240)
• Project Period (FY): 2012-04-01 – 2014-03-31
• Project Status: Completed (Fiscal Year 2013)
• Budget Amount: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000); Fiscal Year 2013: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000); Fiscal Year 2012: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
• Keywords: ナノ・マイクロ加工 / ビーム整形 / 短パルスレーザ / レーザ加工

Research Abstract

We proposed new laser micro-fabrication process for stainless steel substrate using beam-shaping method to make triangle-shaped beam. Then we confirmed the profiles of the beam. After pulse irradiation to metal surface, formation of two-dimensional micro structures with 2.5 micrometer in pitch were observed. On the other hand micro grooves with 4 micrometer in width and with 0.7 micrometer in depth were fabricated by focused beam irradiation. Although fabrication of retro-reflector on stainless steel substrate could not be achieved, this indicates possibility of the micro-fabrication technology of metal surface using interference pattern of short pulse.