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Rapid thermal replication of glass and polymer nanostructures by laser irradiation

Research Project

Project/Area Number 24656099
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Production engineering/Processing studies
Research InstitutionThe University of Tokyo

Principal Investigator

NAGATO Keisuke  東京大学, 大学院・工学系研究科, 講師 (50546231)

Project Period (FY) 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2012: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Keywordsレーザ / 転写 / マイクロ・ナノデバイス / 省エネルギー / ガラス
Research Abstract

A laser-assisted replication method for rapidly replicating nanostructures on glass or polymer surface was developed. A laser was irradiated on a mold surface and the surface is directly heated, and after replication, the surfaces of mold and substrate are cooled by inside of them. In this study, laser-assisted spot/scan replication was quantitatively demonstrated. Furthermore, a roller replication system involving Ni electroplated mold and glass roller was actually set up and continuous replication of nanostructured PMMA was demonstrated. And, by preliminary heating under glass transition temperature of polymer, it was demonstrated that the replication speed could be increased.

Report

(2 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • Research Products

    (7 results)

All 2013 2012

All Presentation (7 results)

  • [Presentation] ロール熱ナノインプリントにおける成形状態のリアルタイム測定2013

    • Author(s)
      高橋賢,長藤圭介,末弘大介,濱口哲也,中尾政之
    • Organizer
      精密工学会2013年度春季大会
    • Place of Presentation
      東京工業大学,東京
    • Year and Date
      2013-03-13
    • Related Report
      2012 Final Research Report
  • [Presentation] ロール熱ナノインプリントにおける成形状態のリアルタイム測定2013

    • Author(s)
      高橋賢,長藤圭介,末弘大介,濱口哲也,中尾政之
    • Organizer
      精密工学会2013年度春季大会
    • Place of Presentation
      東京工業大学,東京
    • Related Report
      2012 Annual Research Report
  • [Presentation] Roller Replication of Nano/Microstructures of Polymers, Glasses, Metals, and Ceramics2012

    • Author(s)
      Keisuke Nagato, Daisuke Suehiro, Toshimi Sato, Shota Ikeshima, Yasuaki Watanabe, Masayuki Nakao
    • Organizer
      The 3rd International Conference on Nanomanufacturing (nanoMan2012)
    • Place of Presentation
      Saitama, Japan
    • Year and Date
      2012-07-26
    • Related Report
      2012 Annual Research Report 2012 Final Research Report
  • [Presentation] レーザアシスト成形によるナノ・マイクロ構造の高速転写2012

    • Author(s)
      長藤圭介,佐藤淑美,濱口哲也,中尾政之
    • Organizer
      第23回プラスチック成形加工学会年次大会
    • Place of Presentation
      タワーホール船堀 東京
    • Year and Date
      2012-06-13
    • Related Report
      2012 Final Research Report
  • [Presentation] Effect of offset temperature on replication of laser-assisted imprinting2012

    • Author(s)
      K. Nagato, T. Sato, T. Hamaguchi, M. Nakao
    • Organizer
      Digest of the 56th international conference on electron, ion, and photon beam technology and nanofabrication (EIPBN)
    • Place of Presentation
      Waikoloa, Hawaii, USA
    • Year and Date
      2012-05-30
    • Related Report
      2012 Final Research Report
  • [Presentation] Laser-scanning imprinting for large-area nanostructures2012

    • Author(s)
      T. Sato, K. Nagato, J. Choi, T. Hamaguchi, M. Nakao
    • Organizer
      Digest of the 56th international conference on electron, ion, and photon beam technology and nanofabrication (EIPBN)
    • Place of Presentation
      Waikoloa, Hawaii, USA
    • Year and Date
      2012-05-30
    • Related Report
      2012 Final Research Report
  • [Presentation] レーザアシスト成形によるナノ・マイクロ構造の高速転写2012

    • Author(s)
      長藤圭介,佐藤淑美,濱口哲也,中尾政之
    • Organizer
      第23回プラスチック成形加工学会年次大会
    • Place of Presentation
      タワーホール船堀,東京
    • Related Report
      2012 Annual Research Report

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Published: 2013-05-31   Modified: 2019-07-29  

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