| Project/Area Number |
24656102
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| Research Category |
Grant-in-Aid for Challenging Exploratory Research
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| Allocation Type | Single-year Grants |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Osaka University |
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Principal Investigator |
MICHIHATA Masaki 大阪大学, 工学(系)研究科(研究院), 助教 (70588855)
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| Co-Investigator(Kenkyū-buntansha) |
TAKAYA Yasuhiro 大阪大学, 大学院工学研究科, 教授 (70243178)
HAYASHI Terutake 大阪大学, 大学院工学研究科, 準教授 (00334011)
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| Project Period (FY) |
2012-04-01 – 2014-03-31
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| Project Status |
Completed (Fiscal Year 2013)
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| Budget Amount *help |
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2013: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2012: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
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| Keywords | マイクロCMM / 直径計測 / Whispering gallery mode / テーパファイバ / WGM / マイクロ球 / マイクロプローブ / 真球度 |
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| Research Abstract |
Probe calibration contributes measurement uncertainty of micro- coordinate measuring machine (micro-CMM). This study proposes a new method of measuring the diameter of a stylus sphere for micro-CMM based on analysis of the whispering gallery modes (WGMs). Depending on incident wavelength, different WGMs will be excited in the probe-stylus. This wavelength spectral fingerprint is also sensitive to the diameter of a sphere. The diameter of the micro-probe stylus sphere was determined by means of least square method between theoretical and measured spectra of WGMs. Measurement results showed that precision of the proposed method was 1 nm.
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