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Study on fluorinated graphene devices to achieve high-speed and low-power consumption

Research Project

Project/Area Number 24656202
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeSingle-year Grants
Research Field Electronic materials/Electric materials
Research InstitutionTokyo Institute of Technology

Principal Investigator

HATANO Mutsuko  東京工業大学, 理工学研究科, 教授 (00417007)

Co-Investigator(Kenkyū-buntansha) IWASAKI Takayuki  東京工業大学, 大学院理工学研究科, 助教 (80454031)
Project Period (FY) 2012-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2013: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2012: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Keywordsグラフェン / 低消費電力デバイス / 化学修飾グラフェン
Research Abstract

Fluorinated graphene has the possibility to achieve high-speed and low-power consumption devices. We propose a highly controlled fluorination method utilizing fluorine radicals in Ar/F2 plasma. Onset of transition from insulating to metallic conduction is observed in dilute fluorinated graphene. Highly fluorinated graphene shows electron-hole asymmetry in transport properties and local resistivity maximum at the hole conduction region, which are presumably caused by the existence of resonant fluorine impurities. Drastic change of the asymmetric feature occurs after removing fluorine atoms and creating structural defects by thermal annealing. These results suggest that the type of impurities or defects in graphene is detectable by examining asymmetry in transport properties. Moreover, fluorinated graphene FETs with ionic liquid gating were fabricated and lower voltage operation and higher on/off ratio were confirmed.

Report

(3 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • Research Products

    (30 results)

All 2014 2013 2012 Other

All Journal Article (3 results) (of which Peer Reviewed: 3 results) Presentation (27 results) (of which Invited: 3 results)

  • [Journal Article] Asymmetric transport property of fluorinated graphene2013

    • Author(s)
      K. Tahara, T. Iwasaki, S. Furuyama, A. Matsutani, M. Hatano
    • Journal Title

      Appl. Phys. Lett

      Volume: 103 Issue: 14

    • DOI

      10.1063/1.4823798

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fluorination of Graphene by Reactive Ion Etching System Using Ar/F2 Plasma2013

    • Author(s)
      Akihiro Matsutani, Kosuke Tahara, Takayuki Iwasaki, Mutsuko Hatano
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 52 Issue: 6S Pages: 06GD11-06GD11

    • DOI

      10.7567/jjap.52.06gd11

    • NAID

      210000142349

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Effect of radical Mutsuko Hatano fluorination on mono- and bi-layer graphene in Ar/F2 plasma2012

    • Author(s)
      Kosuke Tahara, Takayuki Iwasaki, Akihiro Matsutani
    • Journal Title

      Applied Physics Letters

      Volume: 101 Issue: 16 Pages: 163105-163105

    • DOI

      10.1063/1.4760268

    • Related Report
      2013 Final Research Report 2012 Research-status Report
    • Peer Reviewed
  • [Presentation] 横型フッ化グラフェン‐グラフェンヘテロ構造の作製2014

    • Author(s)
      成木航, 田原康佐, 岩崎孝之, 古山聡子, 松谷晃宏, 波多野睦子
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス(神奈川県)
    • Related Report
      2013 Final Research Report
  • [Presentation] 横型フッ化グラフェン‐グラフェンヘテロ構造の作製2014

    • Author(s)
      成木航, 田原康佐, 岩崎孝之, 古山聡子, 松谷晃宏, 波多野睦子
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス(神奈川県)
    • Related Report
      2013 Annual Research Report
  • [Presentation] Carrier Transport Properties of Fluorinated Graphene2013

    • Author(s)
      Kosuke Tahara, Takayuki Iwasaki, Satoko Furuyama, Akihiro Matsutani, Mutsuko Hatano
    • Organizer
      IEEE EDS WIMNACT-37, Future Trend of Nanodevices and Photonic
    • Place of Presentation
      東京工業大学(東京都)
    • Year and Date
      2013-02-18
    • Related Report
      2013 Final Research Report
  • [Presentation] フッ化グラフェンの磁気抵抗効果2013

    • Author(s)
      田原康佐, 岩崎孝之, 松谷晃宏, 山口智弘, 石橋幸治, 波多野睦子
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス(京都府)
    • Related Report
      2013 Final Research Report
  • [Presentation] Low Temperature Transport Properties of Fluorinated Graphene FET Controlled by Ionic Liquid Gating2013

    • Author(s)
      Satoko Furuyama, Kosuke Tahara, Takayuki Iwasaki, Akihiro Matsutani, Mutsuko Hatano
    • Organizer
      2013 JSAP-MRS Joint Symposia
    • Place of Presentation
      同志社大学京田辺キャンパス(京都府)
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
  • [Presentation] Asymmetric transport properties in fluorinated grapheme2013

    • Author(s)
      Kosuke Tahara, Takayuki Iwasaki, Satoko Furuyama, Akihiro Matsutani, Mutsuko Hatano
    • Organizer
      2013 JSAP-MRS Joint Symposia
    • Place of Presentation
      同志社大学京田辺キャンパス(京都府)
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
  • [Presentation] Magnetotransport properties of fluorinated grapheme2013

    • Author(s)
      Kosuke Tahara, Takayuki Iwasaki, Akihiro Matsutani, Tomohiro Yamaguchi, Koji Ishibashi, Mutsuko Hatano
    • Organizer
      RPGR2013
    • Place of Presentation
      東京工業大学大岡山キャンパス(東京都)
    • Related Report
      2013 Final Research Report
  • [Presentation] Monolayer diamond FETs consist of fluorinated graphene channel2013

    • Author(s)
      Mutsuko Hatano
    • Organizer
      International Conference on Semiconductor technology for ultra large scale integrated circuits and thin film transistors
    • Place of Presentation
      Villard-de-Lans(フランス(グルノーブル)
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Crystal and Twisted Graphene Layers on Metal Films2013

    • Author(s)
      Takayuki Iwasaki
    • Organizer
      Collaborative Conference on Materials Research
    • Place of Presentation
      Ramanda Plaza (韓国)
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Invited
  • [Presentation] Characteristics of Fluorinated Graphene Field Effect Transistors2013

    • Author(s)
      Kosuke Tahara, Takayuki Iwasaki, Satoko Furuyama, Akihiro Matsutani, Mutsuko Hatano
    • Organizer
      Compound Semiconductor Week 2013
    • Place of Presentation
      Kobe Convention Center(兵庫県)
    • Related Report
      2013 Final Research Report
  • [Presentation] フッ化グラフェンFETの温度特性2013

    • Author(s)
      田原康佐, 岩崎孝之, 古山聡子, 松谷晃宏, 波多野睦子
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学(神奈川県)
    • Related Report
      2013 Final Research Report
  • [Presentation] イオン液体ゲートを用いたフッ化グラフェン電界効果トランジスタ2013

    • Author(s)
      古山聡子, 田原康佐, 岩崎孝之, 松谷晃宏, 波多野睦子
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学(神奈川県)
    • Related Report
      2013 Final Research Report
  • [Presentation] Fluorinated Graphene FETs Controlled by Ionic Liquids Gate2013

    • Author(s)
      Satoko Furuyama, Kosuke Tahara, Takayuki Iwasaki, Akihiro Matsutani, Mutsuko Hatano
    • Organizer
      The 9th International Thin-Film Transistor Conference
    • Place of Presentation
      東京大学(東京都)
    • Related Report
      2013 Final Research Report
  • [Presentation] フッ化グラフェンの磁気抵抗効果2013

    • Author(s)
      田原康佐,岩崎孝之,松谷晃宏,山口智弘,石橋幸治,波多野睦子
    • Organizer
      第74回応用物理学会周期学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス(京都府)
    • Related Report
      2013 Annual Research Report
  • [Presentation] Magnetotransport properties of fluorinated graphene2013

    • Author(s)
      K.Tahara, T.Iwasaki, A.Matsutani, T.Yamaguchi, K.Ishibashi, M.Hatano
    • Organizer
      RPGR2013
    • Place of Presentation
      東京工業大学大岡山キャンパス(東京都)
    • Related Report
      2013 Annual Research Report
  • [Presentation] Monolayer diamond FETs consist of fluorinated graphene channel2013

    • Author(s)
      Mutsuko Hatano
    • Organizer
      International Conference on Semiconductor technology for ultra large scale integrated circuits and thin film transistors
    • Place of Presentation
      Villard-de-Lans(フランス(グルノーブル))
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Characteristics of Fluorinated Graphene Field Effect Transistors2013

    • Author(s)
      Kosuke Tahara, Takayuki Iwasaki, Satoko Furuyama, Akihiro matsutani, Mutsuko Hatano.
    • Organizer
      Compound Semiconductor Week 2013
    • Place of Presentation
      Kobe Convention Center(兵庫県
    • Related Report
      2013 Annual Research Report
  • [Presentation] フッ化グラフェンFETの温度特性2013

    • Author(s)
      田原康佐,岩崎孝之,古山聡子,松谷晃宏,波多野睦子
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学(神奈川県)
    • Related Report
      2012 Research-status Report
  • [Presentation] イオン液体ゲートを用いたフッ化グラフェン電界効果トランジスタ2013

    • Author(s)
      古山聡子,田原康佐,岩崎孝之,松谷晃宏,波多野睦子
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学(神奈川県)
    • Related Report
      2012 Research-status Report
  • [Presentation] Fluorinated Graphene FETs Controlled by Ionic Liquids Gate2013

    • Author(s)
      Satoko Furuyama, Kosuke Tahara, Takayuki Iwasaki, Akihiro Matsutani, Mutsuko Hatano
    • Organizer
      The 9th International Thin-Film Transistor Conference
    • Place of Presentation
      東京大学(東京都)
    • Related Report
      2012 Research-status Report
  • [Presentation] Fluorination of Mono- and Bi-layer Graphene by Ar/F2 Plasma2012

    • Author(s)
      Kosuke Tahara, Takayuki Iwasaki, Akihiro Matsutani, Satoko Furuyama, Yasuhide Ohno, Kazuhiko Matsumoto, Mutsuko Hatano
    • Organizer
      2012 MRS Fall Meeting
    • Place of Presentation
      Hynes Convention Center(アメリカ)
    • Related Report
      2013 Final Research Report
  • [Presentation] Fluorination Process of Graphene using Ar/F2 Plasma2012

    • Author(s)
      Akihiro Matsutani, Kosuke Tahara, Takayuki Iwasaki, Mutsuko Hatano
    • Organizer
      MNC 2012, 25th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      神戸メリケンパークオリエンタルホテル(兵庫県)
    • Related Report
      2013 Final Research Report
  • [Presentation] フッ化グラフェンのキャリア輸送特性2012

    • Author(s)
      田原康佐, 岩崎孝之, 松谷晃宏, 古山聡子, 大野恭秀, 松本和彦, 波多野睦子
    • Organizer
      第73回応用物理学会秋季学術講演会
    • Place of Presentation
      松山大学(愛媛県)
    • Related Report
      2013 Final Research Report
  • [Presentation] Fluorination of Mono- and Bi-layer Graphene by Ar/F2 Plasma2012

    • Author(s)
      Kosuke Tahara, Takayuki Iwasaki, Akihiro Matsutani, Satoko Furuyama, Yasuhide Ohno, Kazuhiko Matsumoto, Mutsuko Hatano
    • Organizer
      2012 MRS Fall Meeting,
    • Place of Presentation
      Hynes Convention Center(アメリカ)
    • Related Report
      2012 Research-status Report
  • [Presentation] Fluorination Process of Graphene using Ar/F2 Plasma2012

    • Author(s)
      Akihiro Matsutani, Kosuke Tahara, Takayuki Iwasaki, Mutsuko Hatano
    • Organizer
      MNC 2012, 25th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      神戸メリケンパークオリエンタルホテル(兵庫県)
    • Related Report
      2012 Research-status Report
  • [Presentation] フッ化グラフェンのキャリア輸送特性2012

    • Author(s)
      田原康佐,岩崎孝之,松谷晃宏,古山聡子,大野恭秀,松本和彦,波多野睦子
    • Organizer
      第73回応用物理学会秋季学術講演会
    • Place of Presentation
      松山大学(愛媛県)
    • Related Report
      2012 Research-status Report
  • [Presentation] Carrier Transport Properties of Fluorinated Graphene

    • Author(s)
      Kosuke Tahara, Takayuki Iwasaki, Satoko Furuyama, Akihiro Matsutani, Mutsuko Hatano
    • Organizer
      IEEE EDS WIMNACT-37, Future Trend of Nanodevices and Photonics
    • Place of Presentation
      東京工業大学(東京都)
    • Related Report
      2012 Research-status Report

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Published: 2013-05-31   Modified: 2019-07-29  

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