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New etching phenomena occurring at catalytic metal/Si interface in gas phase

Research Project

Project/Area Number 24656232
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeSingle-year Grants
Research Field Electron device/Electronic equipment
Research InstitutionOsaka University

Principal Investigator

MATSUMURA Michio  大阪大学, 太陽エネルギー化学研究センター, 教授 (20107080)

Project Period (FY) 2012-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2013: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2012: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Keywords気相エッチング / 微細加工 / シリコン / 触媒 / エッチング / 金属触媒
Research Abstract

We discovered new gas-phase etching processes of Si using metallic catalyst and proposed the mechanisms based on the experimental results. In each experiment, etching was carried out with a Si substrate, on which a metal film was loaded, in air containing hydrofluoric acid gas at 100 C. When a Au layer was used as the catalyst, Si atoms, which passed through the Au layer, were oxidatively etched on the Au surface. When a Pd layer was used as the catalyst, etching proceeded via a Pd-Si alloy. Since the alloy was produced isotropically, the pore formed in Si was much larger than the size of the Pd layer, especially when the size was small. In addition, we found that arc-shaped pores can be formed by combining two different metal catalysts.

Report

(3 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • Research Products

    (11 results)

All 2014 2013 2012

All Journal Article (2 results) (of which Peer Reviewed: 2 results) Presentation (7 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Formation of Si Nano Hole Arrays Using a Self-assembled Nanolithography Mask and Cu Fill of the Array2013

    • Author(s)
      近藤英一、玉井 架、松村道雄
    • Journal Title

      Journal of The Surface Finishing Society of Japan

      Volume: 64 Issue: 12 Pages: 659-661

    • DOI

      10.4139/sfj.64.659

    • NAID

      130004704927

    • ISSN
      0915-1869, 1884-3409
    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Pore Formation in a Silicon Wafer Using a Platinum Needle Electrode with Application of Square-Wave Potential Pulses in HF Solution2013

    • Author(s)
      Tomohiko Sugita, Kazuki Hiramatsu, Shigeru Ikeda, Michio Matsumura
    • Journal Title

      ACS Appl. Mater. Interfaces

      Volume: 5 Issue: 7 Pages: 2580-2584

    • DOI

      10.1021/am303167c

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Presentation] TSV Formation by Metal-Assisted Chemical Etching2014

    • Author(s)
      松村道雄
    • Organizer
      第一回日仏三次元集積回路ワークショップ
    • Place of Presentation
      日仏会館
    • Year and Date
      2014-06-09
    • Related Report
      2013 Final Research Report
  • [Presentation] 「Making Through Holes in Si for 3D IC Packaging by Metal-Catalyzed Wet Etching : Progress and Challenges2014

    • Author(s)
      R. Kawaguchi, K. Tatsumi, T. Harada, S. Ikeda and M. Matsumura
    • Organizer
      2014 MRS Spring Meeting
    • Place of Presentation
      San Francisco
    • Related Report
      2013 Final Research Report
  • [Presentation] Making Through Holes in Si for 3D IC Packaging by Metal-Catalyzed Wet Etching: Progress and Challenges2014

    • Author(s)
      川口遼馬、巽 康司、原田隆史、池田 茂、松村道雄
    • Organizer
      MRS Spring Meeting
    • Place of Presentation
      San Francisico
    • Related Report
      2013 Annual Research Report
  • [Presentation] Making Fine Cu Wires in a Si Wafer Using Catalytic Reactions2013

    • Author(s)
      K. Tatsumi, S. Ikeda and M. Matsumura
    • Organizer
      2013 MRS Spring Meeting
    • Place of Presentation
      San Francisco
    • Related Report
      2013 Final Research Report
  • [Presentation] Pd触媒を用いたSiの気相エッチングと貫通孔形成2013

    • Author(s)
      川口遼馬, 原田隆史, 池田茂, 松村道雄
    • Organizer
      第74回応用物理学会秋期学術講演会
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Final Research Report
  • [Presentation] Pd触媒を用いたSiの気相エッチングと貫通孔形成2013

    • Author(s)
      川口遼馬,原田隆史,池田 茂,松村 道雄
    • Organizer
      第74回 応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学田辺キャンパス
    • Related Report
      2013 Annual Research Report
  • [Presentation] 金属触媒を用いたシリコンの新規気相エッチング法2012

    • Author(s)
      永田大地, 杉田智彦, 池田茂, 松村道雄
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学・松山大学
    • Related Report
      2013 Final Research Report 2012 Research-status Report
  • [Patent(Industrial Property Rights)] 結晶基板に孔を形成する方法、並びに結晶基板に配線や配管を有する機能デバイス2012

    • Inventor(s)
      松村道雄, 永田大地, 釘宮公一
    • Industrial Property Rights Holder
      大阪大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2012-08-24
    • Related Report
      2013 Final Research Report
  • [Patent(Industrial Property Rights)] 結晶基板に孔を形成する方法、並びに結晶基板内に配線や配管を有する機能性デバイス2012

    • Inventor(s)
      松村道雄、永田大地、釘宮公一
    • Industrial Property Rights Holder
      松村道雄、永田大地、釘宮公一
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-185715
    • Filing Date
      2012-08-14
    • Related Report
      2012 Research-status Report

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Published: 2013-05-31   Modified: 2019-07-29  

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