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Development of novel materials surface modification/fabricationTechnology with a use of supercritical fluid ion beam

Research Project

Project/Area Number 24656436
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Material processing/treatments
Research InstitutionThe University of Tokyo

Principal Investigator

TERASHIMA Kazuo  東京大学, 大学院・新領域創成科学研究科, 教授 (30176911)

Project Period (FY) 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2012: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Keywordsプラズマ処理 / レーザー加工 / イオンビーム / 超臨界イオンビーム / 超臨界流体プラズマ / 材料表面加工 / 表界面プロセス工学
Research Abstract

In this study, fabrication of supercritical fluid ion (ion beam), spectroscopic diagnostics of supercritical fluid plasma as ion source, and its application to materials surface treatment/fabrication process were performed. Then, totally, the nature of high-performance process nature, such as its low-temperature process and environmental friendly process, were confirmed. As a result, the possibility of innovative high-performance materials surface treatment/fabrication process was demonstrated.

Report

(2 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • Research Products

    (5 results)

All 2013 Other

All Presentation (4 results) (of which Invited: 2 results) Remarks (1 results)

  • [Presentation] 超臨界クラスター流体の材料科学-プラズマプロセスのナノスケール揺らぎ応用物理学会2013

    • Author(s)
      寺嶋和夫
    • Organizer
      第60回春季学術講演
    • Place of Presentation
      神奈川工科大学・厚木市・神奈川県・日本
    • Year and Date
      2013-03-28
    • Related Report
      2012 Final Research Report
  • [Presentation] ナノ界面プラズマの創成2013

    • Author(s)
      寺嶋和夫
    • Organizer
      プラズマナノ界面に関す学理の創成に関するシンポジウム
    • Place of Presentation
      東京大学本郷キャンパス・東京都・日本
    • Year and Date
      2013-02-22
    • Related Report
      2012 Final Research Report
  • [Presentation] まとめ:超臨界クラスター流体の材料科学 -プラズマプロセスのナノスケール揺らぎ-

    • Author(s)
      寺嶋和夫
    • Organizer
      応用物理学会第60回春季学術講演会
    • Place of Presentation
      神奈川工科大学・厚木市・神奈川県・日本
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] ナノ界面プラズマの創成

    • Author(s)
      寺嶋和夫
    • Organizer
      ”プラズマナノ界面に関す学理の創成”に関するシンポジウム
    • Place of Presentation
      東京大学本郷キャンパス・東京都・日本
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Remarks]

    • URL

      http://www.plasma.k.u-tokyo.ac.jp/

    • Related Report
      2012 Final Research Report

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Published: 2013-05-31   Modified: 2019-07-29  

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