Budget Amount *help |
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2012: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
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Research Abstract |
In this study, fabrication of supercritical fluid ion (ion beam), spectroscopic diagnostics of supercritical fluid plasma as ion source, and its application to materials surface treatment/fabrication process were performed. Then, totally, the nature of high-performance process nature, such as its low-temperature process and environmental friendly process, were confirmed. As a result, the possibility of innovative high-performance materials surface treatment/fabrication process was demonstrated.
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