Creation and Control of Metal Nano-structure Using Combination of Top-down and Bottom up Nanofabrication

• Project/Area Number: 24656447
• Research Category: Grant-in-Aid for Challenging Exploratory Research
• Allocation Type: Multi-year Fund
• Research Field: Material processing/treatments
• Research Institution: Osaka University
• Principal Investigator: YAMAMOTO HIROKI 大阪大学, 産業科学研究所, 助教 (00516958)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Project Status: Completed (Fiscal Year 2014)
• Budget Amount: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000); Fiscal Year 2014: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2013: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000); Fiscal Year 2012: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
• Keywords: 材料加工・処理 / ナノ材料 / 半導体微細化 / 表面・界面物性 / 材料・加工処理 / リソグラフィ / 量子ビーム / 半導体超微細化 / 材料・加工 / 電子・電気材料

Outline of Final Research Achievements

Nanoparticles of silver and gold have been produced in THF and PGMEA in one step by using the gamma-irradiation of Ag＋ and KAuCl4 solutions, and stabilization with the polymer PMMA.The radiolytic yields of silver or gold nanoparticles are somewhat lower than in water or alcohols, because of the very low dielectric constant and the stronger competition of the metal ion reduction with the geminate recombination between the solvated electron and the parent cation.These results showed it is possible to construst metal nano-structure by using the combination of top-down and bottom-up nanofabrication.

Research Products

• [Journal Article] High-aspect-ratio patterning by ClF3-Ar neutral cluster etching (2015)
  • Author(s): Hiroki Yamamoto, Toshio Sekib, Jiro Matsuoc, Kunihiko Koiked, Takahiro Kozawa
  • Journal Title: Microelectronic Engineering Volume: 141 Pages: 145-149
  • DOI: 10.1016/j.mee.2015.03.006
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Controlled arrangement of nanoparticles capped with protecting ligand on Au nanopatterns (2014)
  • Author(s): Hiroki Yamamotoa,Akira Ohnumab,Bunsho Ohtanib,Takahiro Kozawa
  • Journal Title: Microelectronic Engineering Volume: 121 Pages: 108-112
  • DOI: 10.1016/j.mee.2014.02.028
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Position Control of Metal Nanoparticles by Self-Assembly (2014)
  • Author(s): Hiroki Yamamoto, Akira Ohnuma, Bunsho Ohtani, Takahiro Kozawa
  • Journal Title: Journal of Photopolymer Science and Technology Volume: 27 Issue: 2 Pages: 243-247
  • DOI: 10.2494/photopolymer.27.243
  • NAID: 130004678348
  • ISSN: 0914-9244, 1349-6336
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Radiation-induced synthesis of metal nanoparticles in ethers THF and PGMEA (2013)
  • Author(s): H. Yamamoto, T. Kozawa, S. Tagawa, M. NaitoJ.-L. Marignier, M. Mostafavi, and J. Belloni
  • Journal Title: Radiat. Phys. Chem. Volume: 91 Pages: 148-155
  • DOI: 10.1016/j.radphyschem.2013.05.019
  • Peer Reviewed
• [Journal Article] Formation of nanoscale reaction field using combination of top-down and bottom-up nanofabricaiton (2013)
  • Author(s): H. Yamamoto, A. Ohnuma, B. Ohtani, T. Kozawa
  • Journal Title: Microelectron. Eng. Volume: 110 Pages: 369-373
  • DOI: 10.1016/j.mee.2013.02.066
  • Peer Reviewed
• [Journal Article] Controlled Array of Silver Nanoparticles on Nanopatterns (2013)
  • Author(s): H. Yamamoto, A. Ohnuma, B. Ohtani, T. Kozawa
  • Journal Title: J. Photopolym. Sci. Technol. Volume: 26 Pages: 495-499
  • NAID: 130004833524
  • Peer Reviewed
• [Journal Article] Location Control of Nanoparticles Using Combination of Top-down and Bottom-up Nano-fabrication (2012)
  • Author(s): H. Yamamoto、A. Ohnuma、T. Kozawa, and B. Ohtani
  • Journal Title: J. Photopolym. Sci. Technol. Volume: 25 Pages: 449-453
  • NAID: 40019347341
  • Peer Reviewed
• [Presentation] High-aspect-ratio patterning by ClF3-Ar neutral cluster etching (2014)
  • Author(s): 山本 洋揮
  • Organizer: 40th Micro nad Nano Engineering 2014
  • Place of Presentation: ローザンヌ スイス
  • Year and Date: 2014-09-22 – 2014-09-26
• [Presentation] Radiation-induced Synthesis of Metal Nanoparticles in Ethers THF and PGMEA (2014)
  • Author(s): 山本 洋揮
  • Organizer: The 5th Asia Pacific Symposium on Radiation Chemistry
  • Place of Presentation: 東京大学
  • Year and Date: 2014-09-08 – 2014-09-11
• [Presentation] Position Control of Metal Nano Particle by Self Assembly (2014)
  • Author(s): 山本 洋揮
  • Organizer: 31st International Conference of Photopolymer Science and Technology (ICPST-31) 
  • Place of Presentation: 千葉大学
  • Year and Date: 2014-07-08 – 2014-07-11
• [Presentation] Controlled arrangement of nanoparticles capped with protecting ligand (2013)
  • Author(s): H. Yamamoto, A. Ohnuma, B. Ohtani, T. Kozawa
  • Organizer: The 39th International Conference on Micro and Nano Engineering
  • Place of Presentation: London, England
• [Presentation] Controlled Array of Silver Nanoparticles on Nanopatterns (2013)
  • Author(s): H. Yamamoto, A. Ohnuma, B. Ohtani, T. Kozawa
  • Organizer: 30th International Conference of Photopolymer Science and Tecnology Conference
  • Place of Presentation: Chiba, Japan
• [Presentation] Acid Generation Mechanism in Solid Poly(4-hydroxystyrene) upon Exposure to Electron Beam (2013)
  • Author(s): H. Yamamoto, K. Okamoto, T. Kozawa
  • Organizer: 26th International Microprocesses and Nanotechnology Conference
  • Place of Presentation: Hokkaido, Japan,
• [Presentation] Position Control of Gold Nano-particles by Fine Fabrication Technology of Topdown-Bottom-up (2012)
  • Author(s): H. Yamamoto、A. Ohnuma、T. Kozawa, and B. Ohtani
  • Organizer: 29th International Conference of Photopolymer Science and Technology
  • Place of Presentation: Chiba, Japan
• [Presentation] Formation of Nano Reaction Field Using Combination of Top-down and Bottom-up Nanofabricaiton (2012)
  • Author(s): H. Yamamoto、A. Ohnuma、B. Ohtani and T. Kozawa
  • Organizer: 38th International Micro & Nano Engineering Conference (MNE 2012)
  • Place of Presentation: Toulouse、France