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Sputter deposition of sulfide solar-cell absorber thin films by using a hot-wall reflector toward low-temperature low-cost fabrication process

Research Project

Project/Area Number 24656450
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Material processing/treatments
Research InstitutionKanazawa Institute of Technology

Principal Investigator

KUSANO Eiji  金沢工業大学, バイオ・化学部, 教授 (00278095)

Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2014: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2013: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2012: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Keywordsスパッタリング / CZTS / 熱反射壁 / スパタリング / ホットウォール / CZTS太陽電池光吸収層
Outline of Final Research Achievements

The feasibility of composition and property controls by the use of the hot reflector wall, which is intended to enhance the probability that Zn and S atoms re-evaporated from the growing thin film surface re-impinge on the film surface, has been investigated in one-step rf-sputter deposition of Cu2ZnSnS4. It is shown that the use of the reflector wall suppresses the composition deviation of Zn and S from the stoichiometry and improves the crystallinity evaluated by X-ray diffraction, showing a larger crystalline diameter of 16-26 nm, especially in thin films deposited at a high substrate temperature of 400 °C and by using the reflector wall with a temperature of 400 °C. In addition, optical band gap decreases to 1.6 -1.7 eV for all substrate temperatures. It is concluded that the use of the reflector wall suppresses the composition deviation from the stoichiometry in the quaternary compound thin films, resulting in the improvement of optical and electrical properties.

Report

(4 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • 2012 Research-status Report
  • Research Products

    (13 results)

All 2015 2014 2013 Other

All Journal Article (3 results) (of which Peer Reviewed: 1 results) Presentation (8 results) (of which Invited: 1 results) Book (2 results)

  • [Journal Article] One-step deposition of Cu2ZnSnS4 thin films by hot-wall sputtering2013

    • Author(s)
      Mune-aki Sakamoto, Eiji Kusano
    • Journal Title

      The proceedings of the 12nd International Symposium on Sputtering and Plasma Processes, Kyoto, Japan, July 10-12, 2013

      Volume: 12 Pages: 288-290

    • Related Report
      2013 Research-status Report
  • [Journal Article] Model calculation of dynamic mass-balance changes in reactive sputtering2013

    • Author(s)
      Eiji Kusano
    • Journal Title

      The proceedings of the 12nd International Symposium on Sputtering and Plasma Processes, Kyoto, Japan, July 10-12, 2013

      Volume: 12 Pages: 10-13

    • Related Report
      2013 Research-status Report
  • [Journal Article] Structure modification of titanium oxide thin films by rf-plasma assistance in TiO2 reactive dc and pulsed dc sputtering2013

    • Author(s)
      Mune-aki Sakamoto, Eiji Kusano, Hiroaki Matsuda
    • Journal Title

      Thin Solid Films

      Volume: 531 Pages: 49-55

    • DOI

      10.1016/j.tsf.2012.12.034

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Presentation] Model calculation of time-dependent changes in getter-pump pumping speed in reactive sputtering2015

    • Author(s)
      Eiji Kusano
    • Organizer
      13th Intl.Symp.Sputtering and Plasma Processes
    • Place of Presentation
      京都リサーチパーク,京都市
    • Year and Date
      2015-07-09
    • Related Report
      2014 Annual Research Report
  • [Presentation] Revisit to zone structure model by observing the relationship between normalized deposition temperature and film structure and properties in sputter deposition of the group 4 metals2015

    • Author(s)
      Yuta Bohya, Keisuke Akinaga, Eiji Kusano
    • Organizer
      13th Intl.Symp.Sputtering and Plasma Processes
    • Place of Presentation
      京都リサーチパーク,京都市
    • Year and Date
      2015-07-09
    • Related Report
      2014 Annual Research Report
  • [Presentation] ホットウォールスパッタリング法により堆積したCZTS薄膜太陽電池光吸収層の組成および物性制御2014

    • Author(s)
      草野 英二,坂本 宗明
    • Organizer
      一般社団法人表面技術協会第129回講演大会
    • Place of Presentation
      東京理科大学
    • Related Report
      2013 Research-status Report
  • [Presentation] Evaluation of time-dependent compound layer formation and removal at target surface by model calculation of mass balance change in reactive sputtering2013

    • Author(s)
      Eiji Kusano., Mune-aki Sakamoto
    • Organizer
      19th International Vacuum Congress IVC-19
    • Place of Presentation
      Palais des Congress, Paris
    • Related Report
      2013 Research-status Report
  • [Presentation] ホットウォール高周波スパッタリング法によるCu2ZnSnS4薄膜堆積におけるホットウォール温度および放電圧力の薄膜組成、構造および物性への影響

    • Author(s)
      坂上拓哉,坂本宗明,草野英二
    • Organizer
      日本真空協会 第53回真空に関する連合講演会
    • Place of Presentation
      甲南大学, 神戸
    • Related Report
      2012 Research-status Report
  • [Presentation] One-step deposition of Cu2ZnSnS4 thin films by hot-wall sputtering,

    • Author(s)
      M. Sakamoto, E. Kusano
    • Organizer
      12th International Symposium on Sputtering and Plasma Processes (ISSP)
    • Place of Presentation
      Kyoto Research Park, Kyoto
    • Related Report
      2012 Research-status Report
  • [Presentation] 高周波スパッタリング法によるCu2ZnSnS4薄膜堆積におけるホットウォール温度および放電圧力の薄膜組成,構造および物性への影響

    • Author(s)
      坂上拓哉,中村一貴,稲葉駿介,坂本宗明,草野英二
    • Organizer
      日本化学会 第93春季年会
    • Place of Presentation
      立命館大学,草津
    • Related Report
      2012 Research-status Report
  • [Presentation] Refractive index enhancement by rf-plasma assistance in reactive dc and pulsed dc sputter deposition of Ta2O5 and TiO2 films

    • Author(s)
      Eiji Kusano
    • Organizer
      Reactive Sputter Deposition 2012
    • Place of Presentation
      Ghent University, Belgium
    • Related Report
      2012 Research-status Report
    • Invited
  • [Book] スパッタリング法により堆積した薄膜におけるボイドあるいはピンホール発生要因とその対策,「気泡・ボイドの発生メカニズムと未然防止・除去技術」,6章6節[5}2014

    • Author(s)
      草野 英二
    • Total Pages
      4
    • Publisher
      技術情報協会
    • Related Report
      2014 Annual Research Report
  • [Book] ドライプロセスによる表面処理・薄膜形成の基礎  表面技術協会編2013

    • Author(s)
      草野 英二(共著)
    • Total Pages
      17
    • Publisher
      コロナ社
    • Related Report
      2013 Research-status Report

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Published: 2013-05-31   Modified: 2019-07-29  

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