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Research on Si based thermoelectric material by nanostructuring

Research Project

Project/Area Number 24656576
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeSingle-year Grants
Research Field Energy engineering
Research InstitutionThe University of Tokyo

Principal Investigator

NOMURA Masahiro  東京大学, 生産技術研究所, 准教授 (10466857)

Project Period (FY) 2012-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2013: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2012: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
Keywordsナノ伝熱 / フォノニクス / フォノニック結晶 / 廃熱利用 / 熱工学 / マイクロ・ナノデバイス / 半導体超微細化 / 熱電変換
Research Abstract

The objective of this research is investigation of the possibility of enhancement of the thermoelectric conversion efficiency of nanostructured Si, which has low environmental load. The key is control of phonon transport, which results in higher performance by reducing the thermal conductivity.
We challenged the artificial control of thermal conductivity on the basis of phononics. Formation technology of as small as 100-nm-period air-suspended Si nanostructure has been developed. A high through put and reliable time-domain micro thermoreflectance system for thermal conductivity measurements for micro/nano structures has been developed. We have succeeded in observing a characteristic ballistic phonon transport at room temperature in nanostructures and clear reduction in thermal conductivity in phononic crystal nanostructures compared with those in nanowires. This result shows that this structure is useful for thermal conduction engineering.

Report

(3 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • Research Products

    (43 results)

All 2014 2013 2012 Other

All Journal Article (2 results) (of which Peer Reviewed: 1 results) Presentation (39 results) (of which Invited: 12 results) Remarks (2 results)

  • [Journal Article] Reduced Thermal Conductivities of Si 1D periodic structure and Nanowires2014

    • Author(s)
      J. Maire and M. Nomura
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 未定

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Reduced Thermal Conductivities of Si 1D periodic structure and Nanowires2013

    • Author(s)
      J. Maire and M. Nomura
    • Journal Title

      Jpn. J. of Appl. Phys.

      Volume: 52

    • Related Report
      2013 Final Research Report
  • [Presentation] Thermal conduc tion engineering by 1D phononic crys tal nanostructures2014

    • Author(s)
      M. Nomura
    • Organizer
      International C onference on Thermoelectrics
    • Place of Presentation
      USA
    • Year and Date
      2014-07-28
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Thermal conduct ion control by phonon-band engineeri ng and application to thermoelectric s2014

    • Author(s)
      M. Nomura
    • Organizer
      Photonic North
    • Place of Presentation
      Canada (25.30)
    • Year and Date
      2014-05-29
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] 焼結シリコン界面の熱コンダクタンス2014

    • Author(s)
      坂田昌則, 小宅教文, Jeremie Maire, 堀琢磨, 野村政宏, 塩見淳一郎
    • Organizer
      第51回日本伝熱シンポジウム
    • Place of Presentation
      浜松(D334)
    • Year and Date
      2014-05-23
    • Related Report
      2013 Final Research Report
  • [Presentation] フォノニックナノ構造による伝熱制御にむけて2014

    • Author(s)
      野村政宏, Jeremie Maire
    • Organizer
      第51回日本伝熱シンポジウム
    • Place of Presentation
      浜松( F233)
    • Year and Date
      2014-05-22
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Reduced the rmal conduction in Si nanowires and phononic crystal nanostructures fabr icated using EB lithography2014

    • Author(s)
      M. Nomura and J. Maire
    • Organizer
      The 9t h IEEE International Conference on N ano/Micro Engineered and Molecular S ystems
    • Place of Presentation
      Hawaii, USA(T1G-1)
    • Year and Date
      2014-04-15
    • Related Report
      2013 Final Research Report
  • [Presentation] From p hotonic to phononic - toward heat tr ansfer control by MEMS nanostructure s2014

    • Author(s)
      M. Nomura
    • Organizer
      Symposium on Design, Test, Integ ration and Packaging of MEMS/MOEMS
    • Place of Presentation
      France
    • Year and Date
      2014-04-02
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] シリコン一次元周期ナノ構造における熱伝導率低減の起源に関する考察2014

    • Author(s)
      Jeremie Maire, 堀琢磨, 塩見淳一郎, 野村政宏
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学, 神奈川(19p-F11-10)
    • Year and Date
      2014-03-19
    • Related Report
      2013 Final Research Report
  • [Presentation] シリコン一次元周期ナノ構造における熱伝導率低減の起源に関する考察2014

    • Author(s)
      Jeremie Maire,堀琢磨,塩見淳一郎,野村政宏
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川
    • Related Report
      2013 Annual Research Report
  • [Presentation] Thermal Con ductivity in 1D and 2D Phononic Crys tal Nanostructures2013

    • Author(s)
      J. Maire and M. Nomura
    • Organizer
      2013 Material R esearch Society Fall meeting
    • Place of Presentation
      Boston, USA(BB10.0 9)
    • Year and Date
      2013-12-04
    • Related Report
      2013 Final Research Report
  • [Presentation] Siナノ構造における熱伝導率の低減2013

    • Author(s)
      野村政宏, Jeremie Maire
    • Organizer
      第5回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      宮城(7PM1-C-3)
    • Year and Date
      2013-11-07
    • Related Report
      2013 Final Research Report
  • [Presentation] Reduced The rmal Conductivities of Si 1D Phononi c Crystal and Nanowire2013

    • Author(s)
      J. Maire and M. Nomura
    • Organizer
      26th Intern ational Microprocesses and Nanotechn ology Conference
    • Place of Presentation
      Sapporo, Japan(6B-2-3)
    • Year and Date
      2013-11-06
    • Related Report
      2013 Final Research Report
  • [Presentation] フォノニックナノ構造を用いた熱伝導制御の検討2013

    • Author(s)
      野村政宏
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学,京都(20p-C13-3)
    • Year and Date
      2013-09-20
    • Related Report
      2013 Final Research Report
  • [Presentation] 一次元Siフォノニック結晶ナノ構造の熱伝導率測定2013

    • Author(s)
      Jeremie Maire、野村政宏
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学, 京都(20p-C13-4)
    • Year and Date
      2013-09-20
    • Related Report
      2013 Final Research Report
  • [Presentation] シリコンフォノニックナノ構造の熱伝導率測定2013

    • Author(s)
      野村政宏, Jeremie Maire
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学, 京都(19 a-D6-7)
    • Year and Date
      2013-09-19
    • Related Report
      2013 Final Research Report
  • [Presentation] Thermal con ductivity measurements in phononic c rystal nanostructures2013

    • Author(s)
      J. Maire and M. Nomura
    • Organizer
      Internationa l NAMIS Autumn School
    • Place of Presentation
      Korea(7)
    • Year and Date
      2013-09-04
    • Related Report
      2013 Final Research Report
  • [Presentation] Reduced the rmal conductivity in a 1D Si phononi c crystal nanostructure2013

    • Author(s)
      J. Maire and M. Nomura
    • Organizer
      The 18th I nternational Conference on Electron Dynamics in Semiconductors, Optoelec tronics and nanostructures
    • Place of Presentation
      Japan(TuP-30)
    • Year and Date
      2013-07-24
    • Related Report
      2013 Final Research Report
  • [Presentation] Theoretical analyses of coherent effect of phononic crystal nanostructures on heat transfer in Si2013

    • Author(s)
      M. Nomura
    • Organizer
      The 18th International Conferenc e on Electron Dynamics in Semiconductors, Optoelectronics and nanostruct ures
    • Place of Presentation
      Matsue, Japan(Tu2-3)
    • Year and Date
      2013-07-23
    • Related Report
      2013 Final Research Report
  • [Presentation] Si phononics f or thermoelectrics2013

    • Author(s)
      M. Nomura
    • Organizer
      11th Nano and M icrosystems (NAMIS) workshop
    • Place of Presentation
      USA (W-2)
    • Year and Date
      2013-07-09
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] フォノニクスによる熱伝導制御と熱電変換応用2013

    • Author(s)
      野村政宏
    • Organizer
      革新的熱技術に関するワークショップ
    • Place of Presentation
      科学技術振興機構
    • Year and Date
      2013-06-29
    • Related Report
      2013 Final Research Report
  • [Presentation] Toward Si ther moelectric devices based on phononics2013

    • Author(s)
      M. Nomura
    • Organizer
      LIMMS Workshop–Beyond the Front iers of Nanoscience and Biosystems-
    • Place of Presentation
      CNRS Paris(4-4)
    • Year and Date
      2013-05-17
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] 光・格子系のバンドエンジニアリングとその応用2013

    • Author(s)
      野村政宏
    • Organizer
      日本物理学会第68回年次大会
    • Place of Presentation
      広島大学(27pXG-5)
    • Year and Date
      2013-03-27
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] Thermal Conductivity in 1D and 2D Phononic Crystal Nanostructures2013

    • Author(s)
      J. Maire and M. Nomura
    • Organizer
      2013 Material Research Society Fall meeting
    • Place of Presentation
      Boston, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] Reduced Thermal Conductivities of Si 1D Phononic Crystal and Nanowire2013

    • Author(s)
      J. Maire and M. Nomura
    • Organizer
      26th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Sapporo, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Thermal conductivity measurements in phononic crystal nanostructures2013

    • Author(s)
      J. Maire and M. Nomura
    • Organizer
      International NAMIS Autumn School
    • Place of Presentation
      Seoul, Korea
    • Related Report
      2013 Annual Research Report
  • [Presentation] Theoretical analyses of coherent effect of phononic crystal nanostructures on heat transfer in Si2013

    • Author(s)
      M. Nomura
    • Organizer
      The 18th International Conference on Electron Dynamics in Semiconductors, Optoelectronics and nanostructures
    • Place of Presentation
      Matsue, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Reduced thermal conductivity in a 1D Si phononic crystal nanostructure2013

    • Author(s)
      J. Maire and M. Nomura
    • Organizer
      The 18th International Conference on Electron Dynamics in Semiconductors, Optoelectronics and nanostructures
    • Place of Presentation
      Matsue, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Si phononics for thermoelectrics2013

    • Author(s)
      M. Nomura
    • Organizer
      11th Nano and Microsystems (NAMIS) workshop
    • Place of Presentation
      Seattle, USA
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Toward Si thermoelectric devices based on phononics2013

    • Author(s)
      M. Nomura
    • Organizer
      LIMMS Workshop –Beyond the Frontiers of Nanoscience and Biosystems-
    • Place of Presentation
      Paris, France
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Siナノ構造における熱伝導率の低減2013

    • Author(s)
      野村政宏, Jeremie Maire
    • Organizer
      第5回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      宮城
    • Related Report
      2013 Annual Research Report
  • [Presentation] シリコンフォノニックナノ構造の熱伝導率測定2013

    • Author(s)
      野村政宏, Jeremie Maire
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      京都
    • Related Report
      2013 Annual Research Report
  • [Presentation] フォノニックナノ構造を用いた熱伝導制御の検討2013

    • Author(s)
      野村政宏
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      京都
    • Related Report
      2013 Annual Research Report
  • [Presentation] 一次元Siフォノニック結晶ナノ構造の熱伝導率測定2013

    • Author(s)
      Jeremie Maire, 野村政宏
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      京都
    • Related Report
      2013 Annual Research Report
  • [Presentation] Si phononic crystal nano structures for controlling thermal conduction2012

    • Author(s)
      M. Nomura
    • Organizer
      25th International Micro processes and Nanotechnology Confere nce
    • Place of Presentation
      Kobe, Japan(1C-6-2)
    • Year and Date
      2012-11-01
    • Related Report
      2013 Final Research Report
  • [Presentation] Manipulation o f thermal conduction by semiconductor nanostructures2012

    • Author(s)
      M. Nomura
    • Organizer
      NAMIS Internation al Autumn School 2012
    • Place of Presentation
      Japan
    • Year and Date
      2012-09-14
    • Related Report
      2013 Final Research Report
    • Invited
  • [Presentation] フォノニック結晶ナノ構造による熱伝導制御の検討2012

    • Author(s)
      野村政宏, Jeremie Maire, 田邊遼平
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      松山大学, 愛媛(13a-PA5-16)
    • Year and Date
      2012-09-13
    • Related Report
      2013 Final Research Report
  • [Presentation] Si phononic crystal nanostructures for controlling thermal conduction

    • Author(s)
      M. Nomura
    • Organizer
      25th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Kobe, Japan
    • Related Report
      2012 Research-status Report
  • [Presentation] Manipulation of thermal conduction by semiconductor nanostructures

    • Author(s)
      M. Nomura
    • Organizer
      NAMIS International Autumn School 2012
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2012 Research-status Report
    • Invited
  • [Presentation] 光・格子系のバンドエンジニアリングとその応用

    • Author(s)
      野村政宏
    • Organizer
      日本物理学会第68回年次大会
    • Place of Presentation
      広島大学
    • Related Report
      2012 Research-status Report
    • Invited
  • [Presentation] フォノニック結晶ナノ構造による熱伝導制御の検討

    • Author(s)
      野村政宏, Jeremie Maire, 田邊遼平
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学
    • Related Report
      2012 Research-status Report
  • [Remarks]

    • URL

      http://www.nlab.iis.u-tokyo.ac.jp/

    • Related Report
      2013 Final Research Report
  • [Remarks] 東京大学生産技術研究所 野村研究室ホームページ

    • URL

      http://www.nlab.iis.u-tokyo.ac.jp/

    • Related Report
      2013 Annual Research Report

URL: 

Published: 2013-05-31   Modified: 2019-07-29  

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