Making micro-/nano-device structures by self-assembly using environmental-friendly in-solution process
| Project/Area Number |
24681020
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| Research Category |
Grant-in-Aid for Young Scientists (A)
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| Allocation Type | Partial Multi-year Fund |
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| Research Field |
Nanostructural science
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| Research Institution | Toyota Technological Institute |
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Principal Investigator |
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| Project Period (FY) |
2012-04-01 – 2015-03-31
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| Project Status |
Completed (Fiscal Year 2014)
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| Budget Amount *help |
¥11,180,000 (Direct Cost: ¥8,600,000、Indirect Cost: ¥2,580,000)
Fiscal Year 2014: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2013: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2012: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
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| Keywords | ナノ・バイオ材料 / MEMS/NEMS / ナノ材料 / マイクロ・ナノデバイス / セルフアセンブリ |
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| Outline of Final Research Achievements |
We developed novel micro-/nano-fabrication processes that used nanobio-materials as building blocks for constructing device structures. The nanobio-materials were patterned on a substrate using electrostatic interaction in solution. On the substrate, positively/negatively charged groups were displayed using surface modification. Controlling the charge screening length, the nanobio-materials were selectively adsorbed on the charged patterns which had attractive interaction. Using the selectively patterned nanobio-materials, the performances of MEMS devices were improved.
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Report
(4 results)
Research Products
(9 results)
