Making micro-/nano-device structures by self-assembly using environmental-friendly in-solution process

• Project/Area Number: 24681020
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Partial Multi-year Fund
• Research Field: Nanostructural science
• Research Institution: Toyota Technological Institute
• Principal Investigator: KUMAGAI Shinya 豊田工業大学, 工学部, 准教授 (70333888)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Project Status: Completed (Fiscal Year 2014)
• Budget Amount: ¥11,180,000 (Direct Cost: ¥8,600,000、Indirect Cost: ¥2,580,000); Fiscal Year 2014: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000); Fiscal Year 2013: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000); Fiscal Year 2012: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
• Keywords: ナノ・バイオ材料 / MEMS/NEMS / ナノ材料 / マイクロ・ナノデバイス / セルフアセンブリ

Outline of Final Research Achievements

We developed novel micro-/nano-fabrication processes that used nanobio-materials as building blocks for constructing device structures. The nanobio-materials were patterned on a substrate using electrostatic interaction in solution. On the substrate, positively/negatively charged groups were displayed using surface modification. Controlling the charge screening length, the nanobio-materials were selectively adsorbed on the charged patterns which had attractive interaction. Using the selectively patterned nanobio-materials, the performances of MEMS devices were improved.

Research Products

• [Presentation] Bio-Nano Crystallization of Amorphous Si Thin-Film for MEMS Devices (2015)
  • Author(s): S. Kumagai, I. Yamashita, Y. Uraoka, M. Sasaki
  • Organizer: The 2015 International Meeting on Information Display
  • Place of Presentation: Daegu, Korea
  • Year and Date: 2015-08-18 – 2015-08-21
  • Invited
• [Presentation] DESINGING POSITIONS OF GRAIN BOUNDARIES IN SI THIN-FILM FOR LOW-ENERGY-LOSS OPTICAL MEMS/NEMS DEVICES (2014)
  • Author(s): T. Tomikawa, J.-H. Jeong, S. Kumagai, I. Yamashita, Y. Uraoka, M. Sasaki
  • Organizer: IEEE Optical MEMS and Nanophotonics 2014
  • Place of Presentation: Glasgow, Scotland
• [Presentation] Self-Assembly Patterning of Nanomaterials using Electrostatic Interaction in Solution (2012)
  • Author(s): Shinya Kumagai, Shigeo Yoshii, Naofumi Okamoto, Kazuaki Nishio, Ichiro Yamashita
  • Organizer: 2012 IEEE Nanotechnology Materials and Devices Conference
  • Place of Presentation: Hawaii, USA
  • Year and Date: 2012-10-19
• [Presentation] Self-Assembly Patterning of Nanomaterialsusing Electrostatic Interaction (2012)
  • Author(s): Shinya Kumagai, Shigeo Yoshii, Naofiimi Okamoto, Kazuaki Nishio, Ichiro Yamashita
  • Organizer: International Union of Materials Research Societies - International Conference on Electronic Materials 2012 (IUMRS-ICEM 2012)
  • Place of Presentation: Pacifico Yohokama
  • Year and Date: 2012-09-24
• [Remarks] 豊田工業大学 マイクロメカトロニクス研究室 ホームページ
  • URL: http://www.toyota-ti.ac.jp/mems/index.htm
• [Remarks] 豊田工業大学 研究者情報システム
  • URL: http://ttiweb.toyota-ti.ac.jp/public/user.php
• [Remarks] 豊田工業大学 研究者一覧
  • URL: http://ttiweb.toyota-ti.ac.jp/public/user.php
• [Remarks] 豊田工業大学 マイクロメカトロニクス研究室 ホームページ
  • URL: http://www.toyota-ti.ac.jp/mems/index.htm
• [Remarks]
  • URL: http://www.toyota-ti.ac.jp/mems/index.htm