Development of surface nanoprocessing techniques with femtosecond laser pulses

• Project/Area Number: 24686011
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Partial Multi-year Fund
• Research Field: Applied optics/Quantum optical engineering
• Research Institution: Tokyo University of Agriculture and Technology (2013-2014); Kyoto University (2012)
• Principal Investigator: MIYAJI Godai 東京農工大学, 工学(系)研究科(研究院), 准教授 (30378905)
• Research Collaborator: MIYAZAKI Kenzo 京都大学, 名誉教授 (50293957) ; YASUMARU Naoki 福井工業高等専門学校, 機械工学科, 教授 (90158006) ; KAPLAN Alexander E. ジョンズホプキンス大学, 教授 ; REIF Jürgen ブランデンブルグ工科大学, 教授
• Project Period (FY): 2012-04-01 – 2015-03-31
• Project Status: Completed (Fiscal Year 2014)
• Budget Amount: ¥27,170,000 (Direct Cost: ¥20,900,000、Indirect Cost: ¥6,270,000); Fiscal Year 2014: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000); Fiscal Year 2013: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000); Fiscal Year 2012: ¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000)
• Keywords: 光プロセッシング / フェムト秒レーザー / レーザーアブレーション / 表面プラズモンポラリトン / 光近接場 / レーザー加工 / ナノ構造 / 窒化ガリウム / 近接場

Outline of Final Research Achievements

I have studied the fundamental research on the control of the nanostructure formation on solid surfaces induced with femtosecond laser pulses, resulting in the formation of homogeneous nanograting with the size of 25 nm. The simple two-step ablation process has been developed to control the surface plasmon polaritons and the intense near fields on the target surfaces with the femtosecond laser pulses.

Research Products

• [Journal Article] Periodic nanostructures on titanium dioxide film produced using femtosecond laser with wavelengths of 388 and 775 nm (2014)
  • Author(s): T. Shinonaga, M. Tsukamoto and G. Miyaji
  • Journal Title: Optics Express Volume: Vol. 22, No. 12 Issue: 12 Pages: 14696-14704
  • DOI: 10.1364/oe.22.014696
  • Peer Reviewed / Open Access
• [Journal Article] フェムト秒レーザブレーションによる表面ナノ格子の作製 (2014)
  • Author(s): 宮地悟代, 宮崎健創
  • Journal Title: レーザ加工学会誌 Volume: 21 Pages: 74-79
  • Peer Reviewed
• [Journal Article] フェムト秒レーザブレーションによる表面ナノ格子の作製 (2014)
  • Author(s): 宮地悟代,宮崎健創
  • Journal Title: レーザ加工学会誌 Volume: 印刷中
  • Peer Reviewed
• [Journal Article] Mechanism and control of periodic surface nanostructure formation with femtosecond laser pulses (2014)
  • Author(s): K.Miyazaki and G.Miyaji
  • Journal Title: Appl. Phys. A Volume: Vol.114, No.1 Issue: 1 Pages: 177-185
  • DOI: 10.1007/s00339-013-8130-4
  • NAID: 120005587811
  • Peer Reviewed
• [Journal Article] Role of multiple shots of femtosecond laser pulses in periodic surface nanoablation (2013)
  • Author(s): G.Miyaji and K.Miyazaki
  • Journal Title: Appl. Phys. Lett. Volume: Vol.103, No.7 Issue: 7
  • DOI: 10.1063/1.4818818
  • Peer Reviewed
• [Journal Article] Nanograting formation through surface plasmon fields induced by femtosecond laser pulses (2013)
  • Author(s): K.Miyazaki and G.Miyaji
  • Journal Title: J. Appl. Phys. Volume: Vol.114, No.15 Issue: 15
  • DOI: 10.1063/1.4826078
  • Peer Reviewed
• [Journal Article] Ultrafast Dynamic Processes for Periodic Surface Nanostructure Formation Induced with Femtosecond Laser Pulses (2013)
  • Author(s): G.Miyaji and K.Miyazaki
  • Journal Title: Rev. Laser Eng.(Jpn) Volume: 41 Pages: 816-820
  • NAID: 130007897371
  • Peer Reviewed
• [Journal Article] "Mechanism of femtosecondlaser - induced periodic nanostructure formation on crystalline silicon surface immersed in water (2012)
  • Author(s): G.Miyaji, K.Miyazaki, K.Zhang, T.Yoshifuji, and J.Fujita
  • Journal Title: Opt. Express Volume: Vol.20, No.14 Issue: 14 Pages: 14848-14856
  • DOI: 10.1364/oe.20.014848
  • Peer Reviewed
• [Journal Article] Nanostructuring of Silicon Surfaces with Femtosecond-Laser-Induced Near-field (2012)
  • Author(s): G. Miyaji, K.Zhang, J. Fujita, and K. Miyazaki
  • Journal Title: J. Laser Micro/Nanoengineering Volume: 7 Pages: 198-201
  • Peer Reviewed
• [Journal Article] Periodic nanostructure formation on silicon irradiated with multiple low-fluence femtosecond laser pulses in water (2012)
  • Author(s): K.Miyazaki and G.Miyaji
  • Journal Title: Phys. Proc. Volume: Vol.39 Pages: 674-682
  • DOI: 10.1016/j.phpro.2012.10.088
  • Peer Reviewed
• [Journal Article] Nanograting fabricated with femtosecond laser pulses (2012)
  • Author(s): G. Miyaji and K. Miyazaki
  • Journal Title: SPIE Newsroom Volume: 24 October Pages: 1-3
  • DOI: 10.1117/2.1201210.004516
  • Peer Reviewed
• [Presentation] フェムト秒レーザーの非熱的相互作用によるSi表面でのナノ周期構造形成 (2015)
  • Author(s): 宮地 悟代，宮崎健創
  • Organizer: 第82回レーザ加⼯学会講演会
  • Place of Presentation: 産業技術総合研究所 臨海副都心センター
  • Year and Date: 2015-01-14
  • Invited
• [Presentation] フェムト秒レーザー誘起表面ナノ周期構造生成の超高速ダイナミクス (2015)
  • Author(s): 宮地 悟代，宮崎健創
  • Organizer: レーザー学会学術講演会第35回年次大会
  • Place of Presentation: 東海大学
  • Year and Date: 2015-01-11
  • Invited
• [Presentation] Controlling Periodic Nanostructure Formation on Metal Surfaces with Femtosecond Laser Pulses (2014)
  • Author(s): K.Miyazaki, G.Miyaji, and T.Inoue
  • Organizer: ICPEPA-9
  • Place of Presentation: Matsue, Japan
  • Year and Date: 2014-10-01
• [Presentation] Fabrication of Nanograting with Plasmonic Near-field induced by Ultraviolet Femtosecond Laser Pulses (2014)
  • Author(s): G.Miyaji and K.Miyazaki
  • Organizer: ICPEPA-9
  • Place of Presentation: Matsue, Japan
  • Year and Date: 2014-09-30
• [Presentation] フェムト秒レーザー誘起表面プラズモンポラリトンによる金属表面のナノ格子形成 (2014)
  • Author(s): 宮地 悟代，井上俊茂，宮崎 健創
  • Organizer: 第75回応用物理学会秋季学術講演会
  • Place of Presentation: 北海道大学
  • Year and Date: 2014-09-17
• [Presentation] フェムト秒レーザーアブレーションによるナノ格子創製 (2014)
  • Author(s): 宮崎 健創，宮地 悟代
  • Organizer: LSJ第465回研究会「レーザー応用」＆九州支部学生講演会
  • Place of Presentation: 休暇村 指宿
  • Year and Date: 2014-09-08
• [Presentation] Nanograting Formation with Ultraviolet Femtosecond Laser Ablation (2014)
  • Author(s): G.Miyaji and K.Miyazaki
  • Organizer: LPM2014
  • Place of Presentation: Vilnius, Lithuania
  • Year and Date: 2014-06-20
• [Presentation] Mechanism of Femtosecond-Laser-Induced Periodic Nanostructure Formation on Metal Surface (2014)
  • Author(s): K.Miyazaki, G.Miyaji, and T.Inoue
  • Organizer: LPM2014
  • Place of Presentation: Vilnius, Lithuania
  • Year and Date: 2014-06-19
• [Presentation] フェムト秒レーザー誘起表面プラズモンポラリトンによるナノ格子生成 (2014)
  • Author(s): 宮地悟代，宮崎健創
  • Organizer: レーザー学会学術講演会第34回年次大会
  • Place of Presentation: 北九州国際会議場
  • Invited
• [Presentation] フェムト秒レーザーアブレーションによる金属表面のナノ格子形成過程 (2014)
  • Author(s): 井上俊茂，宮地 悟代，宮崎健創
  • Organizer: レーザー学会学術講演会第34回年次大会
  • Place of Presentation: 北九州国際会議場
• [Presentation] CEP制御サイクルレーザーパルスによる 高次高調波発生特性 (2014)
  • Author(s): 木村 誠，宮地 悟代，宮崎 健創
  • Organizer: レーザー学会学術講演会第34回年次大会
  • Place of Presentation: 北九州国際会議場
• [Presentation] フェムト秒レーザーアプレーションによるGaN表面のナノ格子形成過程 (2013)
  • Author(s): 宮地悟代, 宮崎健創
  • Organizer: 第60回応用物理学関係連合講演会
  • Place of Presentation: 神奈川工科大学
  • Year and Date: 2013-03-29
• [Presentation] Role of Multiple Shots of Femtosecond Laser Pulses in Periodic Nanostructure Formation on Silicon Surface (2013)
  • Author(s): G.Miyaji and K.Miyazaki
  • Organizer: CLEO Europe-EQEC 2013
  • Place of Presentation: Munich, Germany
• [Presentation] Nanograting Imprinted with Femtosecond-Laser-Induced Plasmonic Near-Field (2013)
  • Author(s): K.Miyazaki and G.Miyaji
  • Organizer: CLEO Europe-EQEC 2013
  • Place of Presentation: Munich, Germany
• [Presentation] Patterning of a homogeneous periodic nanostructure with femtosecond laser pulses (2013)
  • Author(s): K.Miyazaki and G.Miyaji
  • Organizer: International Symposium on Nanoscale Pattern Formation at Surfaces
  • Place of Presentation: Copenhagen, Denmark
• [Presentation] Imprinting of a Homogeneous Nanograting with Femtosecond Laser Ablation (2013)
  • Author(s): K.Miyazaki and G.Miyaji
  • Organizer: CLEO-PR 2013
  • Place of Presentation: 京都国際会館
• [Presentation] Effect of Superimposed Multiple Shots of Femtosecond Laser Pulses on Periodic Surface Nanoablation (2013)
  • Author(s): G.Miyaji and K.Miyazaki
  • Organizer: CLEO-PR 2013
  • Place of Presentation: 京都国際会館
• [Presentation] Effect of Multiple Shots of Femtosecond Laser Pulses on Periodic Surface Nanostructuring (2013)
  • Author(s): G.Miyaji and K.Miyazaki
  • Organizer: LAMP2013
  • Place of Presentation: 朱鷺メッセ, 新潟
• [Presentation] Imprinting of Nanogratings with Femtosecond-Laser-Induced Surface Plasmon Polaritons (2013)
  • Author(s): K.Miyazaki and G.Miyaji
  • Organizer: LAMP2013
  • Place of Presentation: 朱鷺メッセ, 新潟
• [Presentation] Role of Multiple Shots of Low-fluence Pulses in Femtosecond-laser-induced Periodic Surface Nanostruture Formation (2013)
  • Author(s): G.Miyaji and K.Miyazaki
  • Organizer: PIERS2013
  • Place of Presentation: Stockholm, Sweden
• [Presentation] Direct Patterning of a Nanograting with Femtosecond Laser Pulses (2013)
  • Author(s): K.Miyazaki and G.Miyaji
  • Organizer: PIERS2013
  • Place of Presentation: Stockholm, Sweden
• [Presentation] 紫外フェムト秒レーザーアブレーションによるナノ格子形成 (2013)
  • Author(s): 宮地悟代，宮崎健創
  • Organizer: 第74回応用物理学会学術講演会
  • Place of Presentation: 同志社大学
• [Presentation] フェムト秒レーザーアブレーションによるステンレス鋼表面の ナノ格子形成過程 (2013)
  • Author(s): 井上俊茂，宮地悟代，宮崎健創
  • Organizer: 第74回応用物理学会学術講演会
  • Place of Presentation: 同志社大学
• [Presentation] CEP安定化5 fsレーザーパルスによる高次高調波発生 (2013)
  • Author(s): 木村誠，宮地悟代，野口恭史，宮崎健創
  • Organizer: 第74回応用物理学会学術講演会
  • Place of Presentation: 同志社大学
• [Presentation] フェムト秒レーザーアブレーションによるGaN表面のナノ格子生成 (2013)
  • Author(s): 宮地悟代，宮崎健創
  • Organizer: 第80回レーザ加⼯学会講演会
  • Place of Presentation: 東京大学生産研
  • Invited
• [Presentation] Periodic nanostructures formed on silicon surface with femtosecond laser pulses (2012)
  • Author(s): K. Miyazaki and G. Miyaji
  • Organizer: LANE 2012
  • Place of Presentation: Stadthalle Filrth (ドイツ)(招待講演)
  • Year and Date: 2012-11-15
• [Presentation] Ultrafast Dynamics of Periodic Nano-pattern Formation with Femtosecond Laser Pulses (2012)
  • Author(s): K. Miyazaki and G. Miyaji
  • Organizer: IUMRS-ICEM 2012
  • Place of Presentation: パシフィコ横浜(神奈川県)(招待講演)
  • Year and Date: 2012-09-13
• [Presentation] フェムト秒レーザーによるGaN表面のナノ格子生成 (2012)
  • Author(s): 宮地悟代, 宮崎健創
  • Organizer: 第73回応用物理学会学術講演会
  • Place of Presentation: 愛媛大学
  • Year and Date: 2012-09-12
• [Presentation] Fabrication of Nanograting on GaN Surface with Femtosecond Laser Ablation (2012)
  • Author(s): G. Miyaji and K. Miyazaki
  • Organizer: The 13th International Symposium on Laser Precision Microfabrication
  • Place of Presentation: The Catholic University of America (Washirlgton, D.C., USA)
  • Year and Date: 2012-06-15
• [Presentation] Periodic Nanopattern Formation on Si with Femtosecond- Laser-Induced Surface Plasmon Polaritons (2012)
  • Author(s): K. Miyazaki and G. Miyaji
  • Organizer: The 13th International Symposium on Laser Precision Microfabrication
  • Place of Presentation: The Catholic University of America (Washirlgton, D.C., USA)
  • Year and Date: 2012-06-15
• [Presentation] Femtosecond-laser-induced Nanostructure Formed on Stainless Steel (2012)
  • Author(s): N.Yasumaru, E.Sentoku, K.Miyazaki, G.Miyaji, and J. Kiuchi
  • Organizer: The 13th International Symposium on Laser Precision Microfabrication
  • Place of Presentation: The Catholic University of America (Washirlgton, D.C., USA)
  • Year and Date: 2012-06-14