Sensitive polar gas sensor using active surface of piezoelectric crystals and ultra-long propagation of surface acoustic wave
Project/Area Number |
24686013
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Research Category |
Grant-in-Aid for Young Scientists (A)
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Allocation Type | Partial Multi-year Fund |
Research Field |
Applied physics, general
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Research Institution | Tohoku University |
Principal Investigator |
TSUJI Toshihiro 東北大学, 工学(系)研究科(研究院), 助教 (70374965)
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Project Period (FY) |
2012-04-01 – 2015-03-31
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Project Status |
Completed (Fiscal Year 2014)
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Budget Amount *help |
¥24,960,000 (Direct Cost: ¥19,200,000、Indirect Cost: ¥5,760,000)
Fiscal Year 2014: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2013: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
Fiscal Year 2012: ¥13,910,000 (Direct Cost: ¥10,700,000、Indirect Cost: ¥3,210,000)
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Keywords | 圧電結晶 / 弾性表面波 / ボールSAWセンサ / 加工変質層 / 非晶質シリカ / 紫外線照射 / 微量水分 / 温度補償 |
Outline of Final Research Achievements |
Active surface of piezoelectric crystals is useful for the detection of polar gas molecules when it is used as a sensitive film of a surface acoustic wave (SAW) sensor because of its low attenuation nature. In this work, the target polar gas is the trace moisture that is industrially important and the concentration is less than 1 ppm. During investigation, it was found that one of origins of quartz active surface was a damaged layer of amorphous silica and was imitated by the silica film synthesized by sol-gel reaction. In the case of application to the ball SAW sensor where significant long propagation of SAW is available, it was shown that the sensor could be used for the trace moisture sensor with high sensitivity and significant fast response.
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Report
(4 results)
Research Products
(43 results)
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[Journal Article] Highly Sensitive Trace Moisture Ball Surface Acoustic Wave Sensor Using SiOx Film2014
Author(s)
S. Hagihara, T. Tsuji, T. Oizumi, N. Takeda, S. Akao, T. Ohgi, K. Takayanagi, T. Yanagisawa, N. Nakaso, Y. Tsukahara, K. Yamanaka
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Journal Title
Jpn. J. Appl. Phys.
Volume: 53(7)
NAID
Related Report
Peer Reviewed / Open Access / Acknowledgement Compliant
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[Journal Article] Detection of Trace Water Vapor Using SiO<i><sub>x</sub></i>-Coated Ball SAW Sensor2014
Author(s)
K. Takayanagi, S. Akao, T. Yanagisaewa, N. Nakaso, Y. Tsukahara, S. Hagihara, T. Oizumi, N. Takeda, T. Tsuji, K. Yamanaka
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Journal Title
MATERIALS TRANSACTIONS
Volume: 55
Issue: 7
Pages: 988-993
DOI
NAID
ISSN
1345-9678, 1347-5320
Related Report
Peer Reviewed / Open Access / Acknowledgement Compliant
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[Journal Article] Highly Sensitive Ball Surface Acoustic Wave Hydrogen Sensor with Porous Pd-Alloy Film2014
Author(s)
T. Tsuji, R. Mihara, T. Saito, S. Hagihara, T. Oizumi, N. Takeda, T. Ohgi, T. Yanagisawa, S. Akao, N. Nakaso, K. Yamanaka
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Journal Title
MATERIALS TRANSACTIONS
Volume: 55
Issue: 7
Pages: 1040-1044
DOI
NAID
ISSN
1345-9678, 1347-5320
Related Report
Peer Reviewed / Open Access / Acknowledgement Compliant
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[Journal Article] Highly Sensitive Trace Moisture Ball SAW Sensor Using SiOx film2013
Author(s)
Satoshi Hagihara, Toshihiro Tsuji, Toru Oizumi, Nobuo Takeda, Shingo Akao, Tsuneo Ohgi, Kosuke Takayanagi, Takayuki Yanagisawa, Noritaka Nakaso, Yusuke Tsukahara, Kazushi Yamanaka
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Journal Title
Proceedings of Symposium on Ultrasonic Electronics
Volume: 34
Pages: 381-382
Related Report
Peer Reviewed
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[Presentation] Trace moisture measurement of 10 nmol/mol using a 3mm diameter silica coated ball SAW sensor2014
Author(s)
K. Yamanaka, S. Hagihara, T. Tsuji, T. Oizumi, N. Takeda, S. Akao, T. Ohgi, K. Takayanagi, T. Yanagisawa, N. Nakaso, Y. Tsukahara
Organizer
IEEE IUS
Place of Presentation
米国シカゴ
Year and Date
2014-09-03 – 2014-09-06
Related Report
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[Presentation] Highly Sensitive Trace Moisture Ball SAW Sensor Using SiOx film2013
Author(s)
Satoshi Hagihara, Toshihiro Tsuji, Toru Oizumi, Nobuo Takeda, Shingo Akao, Tsuneo Ohgi, Kosuke Takayanagi, Takayuki Yanagisawa, Noritaka Nakaso, Yusuke Tsukahara, Kazushi Yamanaka
Organizer
The 34th Symposium on Ultrasonic Electronics USE2013
Place of Presentation
京都
Related Report
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[Presentation] Response of quartz ball surface acoustic wave (SAW) sensor2013
Author(s)
Kazushi Yamanaka, Satoshi Hagihara, Tomohiro Saito, Toru Oizumi, Nobuo Takeda, Shingo Akao, Kosuke Takayanagi, Takayuki Yanagisawa, Noritaka Nakaso, Yusuke Tsukahara, Toshihiro Tsuji
Organizer
2013 Joint UFFC, EFTF, and PFM Symposium
Place of Presentation
チェコ共和国, プラハ
Related Report
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[Presentation] Fast and Sensitive H2 detection by ball surface acoustic wave (SAW) sensor with porous Pd-Pt alloy film2013
Author(s)
Toshihiro Tsuji, Ryosuke Mihara, Tomohiro Saito, Satoshi Hagihara, Toru Oizumi, Nobuo Takeda, Tsuneo Ohgi, Takayuki Yanagisawa, Shingo Akao, Noritaka Nakaso, Kazushi Yamanaka
Organizer
2013 Joint UFFC, EFTF, and PFM Symposium
Place of Presentation
チェコ共和国, プラハ
Related Report
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[Presentation] Measurement of trace water vapor using ball surface acoustic wave (SAW) sensor2013
Author(s)
Satoshi Hagihara, Tomohiro Saito, Rosuke Mihara, Toru Oizumi, Nobuo Takada, Shingo Akao, Tsuneo Ohgi, Kosuke Takayanagi, Takayuki Yanagisawa, Noritaka Nakaso, Toshihiro Tsuji, Kazushi Yamanaka
Organizer
3rd International Symposium on Laser Ultrasonics and Advanced Sensing
Place of Presentation
神奈川県
Related Report
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[Presentation] Highly Sensitive Ball SAW Hydrogen Sensor with Porous Pd Alloy film2013
Author(s)
Toshihiro Tsuji, Rosuke Mihara, Tomohiro Saito, Satoshi Hagihara, Toru Oizumi, Nobuo Takeda, Tsuneo Ohgi, Takayuki Yanagisawa, Shingo Akao, Noritaka Nakaso, Kazushi Yamanaka
Organizer
3rd International Symposium on Laser Ultrasonics and Advanced Sensing
Place of Presentation
神奈川県
Related Report
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[Patent(Industrial Property Rights)] 水分濃度センサ2013
Inventor(s)
高柳浩介、塚原祐輔、山中一司、辻俊宏
Industrial Property Rights Holder
凸版印刷株式会社、国立大学法人東北大学
Industrial Property Rights Type
特許
Industrial Property Number
2013-130728
Filing Date
2013-06-21
Related Report
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