| Budget Amount *help |
¥24,960,000 (Direct Cost: ¥19,200,000、Indirect Cost: ¥5,760,000)
Fiscal Year 2014: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2013: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
Fiscal Year 2012: ¥13,910,000 (Direct Cost: ¥10,700,000、Indirect Cost: ¥3,210,000)
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| Outline of Final Research Achievements |
Active surface of piezoelectric crystals is useful for the detection of polar gas molecules when it is used as a sensitive film of a surface acoustic wave (SAW) sensor because of its low attenuation nature. In this work, the target polar gas is the trace moisture that is industrially important and the concentration is less than 1 ppm. During investigation, it was found that one of origins of quartz active surface was a damaged layer of amorphous silica and was imitated by the silica film synthesized by sol-gel reaction. In the case of application to the ball SAW sensor where significant long propagation of SAW is available, it was shown that the sensor could be used for the trace moisture sensor with high sensitivity and significant fast response.
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