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Development of group-III nitride double polar selective area growth process and fabrication of nanostructure device

Research Project

Project/Area Number 24686014
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypePartial Multi-year Fund
Research Field Applied physics, general
Research InstitutionShizuoka University

Principal Investigator

Takayuki Nakano  静岡大学, 工学部, 准教授 (00435827)

Project Period (FY) 2012-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥26,650,000 (Direct Cost: ¥20,500,000、Indirect Cost: ¥6,150,000)
Fiscal Year 2015: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2014: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2013: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2012: ¥10,660,000 (Direct Cost: ¥8,200,000、Indirect Cost: ¥2,460,000)
Keywords中性子検出 / 半導体検出器 / III族窒化物半導体 / エピタキシャル成長 / 放射線検出特性 / 結晶成長 / 放射線検出 / 化合物半導体 / Ⅲ族窒化物半導体 / III族窒化物 / MOVPE
Outline of Final Research Achievements

In this research, the development of novel neutron detector using group-III nitride semiconductor is carried out. At first, we proposed GdGaN and BGaN as neutron detector material, because Ga atom and B atom have large neutron capture cross sectional area. In the case of GdGaN, fabrication of high quality GdGaN crystal was not achieved, because Gd source gases supply is difficult by low saturated vapor pressure of that. In the case of BGaN crystal growth, the fabrication of BGaN epitaxial layer is achieved, and BN mole fraction of BGaN was about 1%. When the radiation detection measurement using the BGaN Schottky diode was carried out, detection signal by capturing neutron was observed. This result indicate that our proposal is correctly. Moreover, we evaluated the characteristics of radiation detection by group-III nitride semiconductor, and we derived mobility lifetime products of GaN in radiation detection.

Report

(5 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • 2012 Annual Research Report
  • Research Products

    (48 results)

All 2016 2015 2014 2013 2012 Other

All Journal Article (4 results) (of which Peer Reviewed: 4 results,  Acknowledgement Compliant: 2 results) Presentation (41 results) (of which Int'l Joint Research: 5 results,  Invited: 7 results) Remarks (3 results)

  • [Journal Article] Effect of substrate offcut angle on BGaN epitaxial growth2016

    • Author(s)
      Kohei Ueyama, Hidenori Mimura, Yoku Inoue, Toru Aoki, and Takayuki Nakano
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 5S Pages: 05FD05-05FD05

    • DOI

      10.7567/jjap.55.05fd05

    • NAID

      210000146507

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Study of radiation detection properties of GaN pn diode2016

    • Author(s)
      Mutsuhito Sugiura, Maki Kushimoto, Tadashi Mitsunari, Kohei Yamashita, Yoshio Honda, Hiroshi Amano, Yoku Inoue, Hidenori Mimura, Toru Aoki and Takayuki Nakano
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 5S Pages: 05FJ02-05FJ02

    • DOI

      10.7567/jjap.55.05fj02

    • NAID

      210000146544

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Neutron detection using boron gallium nitride semiconductor material2014

    • Author(s)
      Katsuhiro Atsumi, Yoku Inoue, Hidenori Mimura, Toru Aoki, and Takayuki Nakano
    • Journal Title

      APL Material

      Volume: 2 Issue: 3

    • DOI

      10.1063/1.4868176

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Double polar selective area growth of GaN MOVPE by using carbon mask layers2013

    • Author(s)
      Yohei Fujita, Yasushi Takano, Yoku Inoue, Masatomo Sumiya, Shunro Fuke and Takayuki Nakano
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 52 Issue: 8S Pages: 08JB26-08JB26

    • DOI

      10.7567/jjap.52.08jb26

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Presentation] MOVPE法を用いたBGaN成長における成長雰囲気の検討2016

    • Author(s)
      中村匠, 矢野雄大, 上山浩平,青木徹,井上翼,小島一信,秩父重英,中野貴之
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学、目黒区、東京都
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] pin-GaN ダイオードを用いたα線検出特性評価2016

    • Author(s)
      有川卓弥、杉浦睦仁、宇佐美茂佳、久志本真希、本田善央、天野浩、三村秀典、井上翼、青木徹、中野貴之
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学、目黒区、東京都
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] III族窒化物半導体を用いた放射線検出器の開発2016

    • Author(s)
      中野貴之
    • Organizer
      2015年静岡大学テニュアトラックシンポジウム
    • Place of Presentation
      静岡大学、浜松市、静岡県
    • Year and Date
      2016-03-01
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] Evaluation of radiation detection characteristics for GaN diode2015

    • Author(s)
      Mutsuhito Sugiura, Maki Kushimoto, Tadashi Mitsunari, Kohei Yamashita, Yoshio Honda, Hiroshi Amano, Yoku Inoue, Hidenori Mimura, Toru Aoki, and Takayuki Nakano
    • Organizer
      The 6th International Symposium on Growth of III-Nitrides (ISGN-6)
    • Place of Presentation
      Act City Hamamatsu, Hamamatsu, Japan
    • Year and Date
      2015-11-08
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Characterization of fabricated BGaN films at each growth conditions2015

    • Author(s)
      Kohei Ueyama, Hidenori Mimura, Yoku Inoue, Toru Aoki, and Takayuki Nakano
    • Organizer
      The 6th International Symposium on Growth of III-Nitrides (ISGN-6)
    • Place of Presentation
      Act City Hamamatsu, Hamamatsu, Japan
    • Year and Date
      2015-11-08
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of high B composition BGaN by Mg surfactant2015

    • Author(s)
      T. Nakamura, K. Ueyama, Y. Inoue, H. Mimura, T. Aoki, and T. Nakano
    • Organizer
      The 14th International Conference on Global Research and Education
    • Place of Presentation
      Act City Hamamatsu, Hamamatsu, Japan
    • Year and Date
      2015-09-28
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Efficiency of Al source supply to B composition in BAlGaN epitaxial growth2015

    • Author(s)
      T. Arikawa, Y. Inoue, H. Mimura, T. Aoki, and T. Nakano
    • Organizer
      The 14th International Conference on Global Research and Education
    • Place of Presentation
      Act City Hamamatsu, Hamamatsu, Japan
    • Year and Date
      2015-09-28
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] MOVPE法にて作製したBGaN結晶の諸特性の評価2015

    • Author(s)
      上山 浩平、中村 匠、三村 秀典、井上 翼、青木 徹、中野 貴之
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場、名古屋市、愛知県
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] GaNにおける放射線検出特性の実験的評価(2)2015

    • Author(s)
      杉浦 睦仁、久志本 真希、光成 正、山下 康平、本田 善央、天野 浩、三村 秀典、井上 翼、青木 徹、中野 貴之
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場、名古屋市、愛知県
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] Dependencies of growth temperature and carrier gases in BGaN growth2015

    • Author(s)
      K. Ueyama, H. Mimura, Y. Inoue, T. Aoki and T. Nakano
    • Organizer
      34th Electronic Materials Symposium (EMS34)
    • Place of Presentation
      Laforret Biwako, Moriyama, Shiga
    • Year and Date
      2015-07-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] Characterization of radiation detection for GaN semiconductor material2015

    • Author(s)
      M. Sugiura, M. Kushimoto, T. Mitsunari, K. Yamashita, Y. Honda, H. Amano, Y. Inoue, H. Mimura, T. Aoki and T. Nakano
    • Organizer
      34th Electronic Materials Symposium (EMS34)
    • Place of Presentation
      Laforret Biwako, Mosiyama, Shiga
    • Year and Date
      2015-07-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] GaN 半導体材料における放射線検出特性評価2015

    • Author(s)
      杉浦睦仁,久志本真希,光成正,山下康平,本田善央,天野 浩,三村秀典,井上翼,青木徹,中野貴之
    • Organizer
      第7回 窒化物半導体結晶成長講演会
    • Place of Presentation
      東北大学片平キャンパス片平さくらホール、仙台市、宮城県
    • Year and Date
      2015-05-07
    • Related Report
      2015 Annual Research Report
  • [Presentation] Characterization of Radiation Detection for GaN2015

    • Author(s)
      M. Sugiura, M. Kushimoto, T. Mitsunari, K Yamashita, Y. Honda, H. Amano, Y. Inoue, H. Mimura, T. Aoki, and T. Nakano
    • Organizer
      The 3rd International Conference on Light-Emitting Devices and Their Industrial Applications (LEDIA'15)
    • Place of Presentation
      Pacifico Yokohama, Kanagawa, Japan
    • Year and Date
      2015-04-22
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] GaNダイオードの放射線検出特性評価2015

    • Author(s)
      杉浦睦仁、久志本真希、光成 正、山下康平、本田善央、天野浩、三村秀典、井上翼、青木徹、中野貴之
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス、神奈川県平塚市
    • Year and Date
      2015-03-11 – 2015-03-15
    • Related Report
      2014 Annual Research Report
  • [Presentation] BGaN成長における基板off角度依存性2014

    • Author(s)
      上山浩平,渥美勝浩,三村秀典,井上翼,青木徹,中野貴之
    • Organizer
      第3回結晶工学未来塾
    • Place of Presentation
      学習院創立百周年記念会館、東京都豊島区
    • Year and Date
      2014-11-13
    • Related Report
      2014 Annual Research Report
  • [Presentation] Evaluation of Radiation Detection Characteristic for GaN Semiconductor Material2014

    • Author(s)
      M. Sugiura, K. Atsumi, Y. Inoue, H. Mimura, T. Aoki, T. Nakano
    • Organizer
      IEEE Nuclear Science symposium &Medical Imaging Conference; 21st Symposium on Room-Temperature Semiconductor X-ray and Gamma-ray Detectors
    • Place of Presentation
      Washington State Convention Center, Seattle, WA USA
    • Year and Date
      2014-11-08 – 2014-11-15
    • Related Report
      2014 Annual Research Report
  • [Presentation] Fabrication and Development of BGaN Device for the Novel Neutron Semiconductor Detector2014

    • Author(s)
      Takayuki Nakano, Yoku Inoue, Hidenori Mimura, Toru Aoki
    • Organizer
      IEEE Nuclear Science symposium &Medical Imaging Conference; 21st Symposium on Room-Temperature Semiconductor X-ray and Gamma-ray Detectors
    • Place of Presentation
      Washington State Convention Center, Seattle, WA USA
    • Year and Date
      2014-11-08 – 2014-11-15
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] abrication of BGaN semiconductor device for neutron detection2014

    • Author(s)
      Takayuki Nakano, Yoku Inoue, Hidenori Mimura, Toru Aoki
    • Organizer
      The 21st International of The Society of Pure and Applied Coordination Chemistry (SPACC) Symposium
    • Place of Presentation
      Kogakuin University, Shinjuku Campus、Shinjuku, Tokyo, Japan
    • Year and Date
      2014-10-31 – 2014-11-03
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] BGaN成長における基板依存性の検討2014

    • Author(s)
      上山浩平,渥美勝浩,三村秀典,井上翼,青木徹,中野貴之
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学、北海道札幌市
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] GaNにおける放射線検出特性の実験的評価2014

    • Author(s)
      杉浦睦仁,久志本真希,光成正,山下康平,本田善央,天野浩,三村秀典,井上翼,青木徹,中野貴之
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学、北海道札幌市
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] Improved BGaN epitaxial growth for the neutron detection device2014

    • Author(s)
      K. Ueyama, K. Atsumi, H. Mimura, Y. Inoue, T. Aoki and T. Nakano
    • Organizer
      The 8th International Workshop on Nitride Semiconductors (IWN2014)
    • Place of Presentation
      Wroclaw Congress Center, Wroclaw, Poland
    • Year and Date
      2014-08-24 – 2014-08-29
    • Related Report
      2014 Annual Research Report
  • [Presentation] BGaN 成長における基板および原料供給量の依存性評価2014

    • Author(s)
      上山浩平, 渥美勝浩, 三村秀典, 井上翼, 青木徹, 中野貴之
    • Organizer
      第6 回窒化物半導体結晶成長講演会
    • Place of Presentation
      名城大学天白キャンパス、愛知県名古屋市
    • Year and Date
      2014-07-25 – 2014-07-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] Improvement of BGaN epitaxial growth with controlled GaN substrate orientation2014

    • Author(s)
      K. Ueyama , K. Atsumi , H. Mimura , Y. Inoue , T. Aoki and T. Nakano
    • Organizer
      33th Electronic Materials Symposium (EMS33)
    • Place of Presentation
      Laforret Suzenji, Izu, Shizuoka, Japan
    • Year and Date
      2014-07-09 – 2014-07-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] Investigation of novel neutron detector by using BGaN semiconductor material2014

    • Author(s)
      Takayuki Nakano, Hidenori Mimura, Yoku Inoue, Toru Aoki
    • Organizer
      The Third International Conference on Materials, Science and Environments (ICMEE’14)
    • Place of Presentation
      Aqua Queen Kapiolani Hotel, Honolulu, Hawaii, USA
    • Year and Date
      2014-07-01 – 2014-07-03
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Ⅲ族窒化物半導体を用いた中性子半導体検出器の作製と結晶成長技術の開発2014

    • Author(s)
      中野貴之
    • Organizer
      第7回超領域研究会
    • Place of Presentation
      静岡大学浜松キャンパス、静岡県浜松市
    • Year and Date
      2014-06-20
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Examination of on the Influence of Boron Flow Rate and Substrate in BGaN Epitaxial Growth2014

    • Author(s)
      K.Ueyama, K. Atsumi, H. Mimura, Y. Inoue, T. Aoki, and T. Nakano
    • Organizer
      the Second Conference on LED and Its Industrial Application (LEDIA '14)
    • Place of Presentation
      Pacifico Yokohama, Yokohama, Kanagawa, Japan
    • Year and Date
      2014-04-22 – 2014-04-24
    • Related Report
      2014 Annual Research Report
  • [Presentation] Examination of on the Influence of Boron Flow Rate and Substrate in BGaN Epitaxial Growth2014

    • Author(s)
      K. Ueyama, K. Atsumi, H. Mimura, Y. Inoue, T. Aoki, and T. Nakano
    • Organizer
      the Second Conference on LED and Its Industrial Application (LEDIA '14)
    • Place of Presentation
      Pacifico Yokohama, Yokohama, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Novel neutron detection system by using group-III nitride semiconductor2014

    • Author(s)
      Takayuki Nakano
    • Organizer
      2014 International Workshop on Advanced Nanovision Science
    • Place of Presentation
      Shizuoka University, Japan
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] 中性子検出半導体に向けたBGaN結晶の作製と検出特性の評価2013

    • Author(s)
      渥美勝浩
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学(厚木市)
    • Year and Date
      2013-03-29
    • Related Report
      2012 Annual Research Report
  • [Presentation] The Characteristic of Radiation Detection Property for GaN and BGaN2013

    • Author(s)
      Katsuhiro Atsumi, Hidenori Mimura, Yoku Inoue, Toru Aoki, Takayuki Nakano
    • Organizer
      2013 IEEE Nuclear Science Symposium and Medical Imaging Conference, and Workshop on Room-Temperature Semiconductor X-Ray and Gamma-Ray Detectors (NSS/MIC/RTSD)
    • Place of Presentation
      COEX Convention Center, Seoul, Korea
    • Related Report
      2013 Annual Research Report
  • [Presentation] The proposal of the new material at the neutron detection semiconductor2013

    • Author(s)
      Takayuki Nakano, Katsuhiro Atsumi, Hidenori Mimura, Yoku Inoue, Toru Aoki
    • Organizer
      14th International Young Scientists Conference “Optics & High Technology Material Science –SPO 2013”
    • Place of Presentation
      Kyiv, Ukraine
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] The Characteristic of Radiation Detection Property for Group-III Nitride semiconductor2013

    • Author(s)
      Takayuki Nakano, Katsuhiro Atsumi, Hidenori Mimura, Yoku Inoue, Toru Aoki
    • Organizer
      12th International Conference on Global Research and Education (inter Academia 2013)
    • Place of Presentation
      University of Sofia St. Kliment Ohridski, Sofia, Bulgaria
    • Related Report
      2013 Annual Research Report
  • [Presentation] Design and development of semiconductor neutron detector2013

    • Author(s)
      Toru Aoki, Akifumi Koike, Hisashi Morii, Volodymyr A Gnatyuk, Takayuki Nakano and Hidenori Mimura
    • Organizer
      2013 JSAP-MRS Joint Symposia
    • Place of Presentation
      Doshisha University, Kyoto, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] New neutron detector by using semiconductor BGaN2013

    • Author(s)
      Katsuhiro Atsumi, Kosugi Naohumi, Aki Miyake, Hidenori Mimura, Yoku Inoue, Toru Aoki, Takayuki Nakano
    • Organizer
      2013 SPIE Optics + Photonics
    • Place of Presentation
      San Diego Convention Center, San Diego, California, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] Investigation of neutron semiconductor detector by using BGaN2013

    • Author(s)
      [14] Takayuki Nakano, Katsuhiro Atsumi, Hisashi Kaneko, Hidenori Mimura, Yoku Inoue, Toru Aoki
    • Organizer
      2013 MRS Spring Meeting
    • Place of Presentation
      San Francisco, California, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] The evaluation of radiation detection for GaN and BGaN2013

    • Author(s)
      [29] K. Atsumi, A. Miyake, Y. Inoue, H. Mimura, T. Aoki and T. Nakano
    • Organizer
      32th Electronic Materials Symposium (EMS32)
    • Place of Presentation
      Laforret Biwako, Shiga
    • Related Report
      2013 Annual Research Report
  • [Presentation] ”中性子半導体検出器の実現に向けたBGaN薄膜の作製と評価”2013

    • Author(s)
      [32] 渥美勝浩、三宅亜紀、三村秀典、井上翼、青木徹、中野貴之
    • Organizer
      2013年度電子情報通信学会ED/CPM/SDM合同5月研究会
    • Place of Presentation
      静岡大学浜松キャンパス
    • Related Report
      2013 Annual Research Report
  • [Presentation] Investigation of radiation detection which used BGaN2012

    • Author(s)
      Katsuhiro Atsumi
    • Organizer
      International Workshop on Nitride Semiconductors 2012 (IWN2012)
    • Place of Presentation
      Sapporo Convention Center, (Sapporo, Japan)
    • Year and Date
      2012-10-15
    • Related Report
      2012 Annual Research Report
  • [Presentation] 中性子検出半導体に向けたBGaNの結晶成長と評価2012

    • Author(s)
      渥美勝浩
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学(松山市)
    • Year and Date
      2012-09-12
    • Related Report
      2012 Annual Research Report
  • [Presentation] GaN based semiconductor neutron detector2012

    • Author(s)
      Toru Aoki
    • Organizer
      2012 SPIE Optics + Photonics
    • Place of Presentation
      San Diego Convention Center, San Diego, (California, USA)
    • Year and Date
      2012-08-14
    • Related Report
      2012 Annual Research Report
  • [Presentation] The research on the possibility of the novel neutron detector using BGaN2012

    • Author(s)
      Katsuhiro Atsumi
    • Organizer
      31th Electronic Materials Symposium (EMS31)
    • Place of Presentation
      Laforret Suzenji, (Izu, Japan)
    • Year and Date
      2012-07-11
    • Related Report
      2012 Annual Research Report
  • [Remarks] 研究室HP

    • URL

      http://nakanolab.eng.shizuoka.ac.jp/index.html

    • Related Report
      2015 Annual Research Report
  • [Remarks] 静岡大学中野研

    • URL

      http://nakanolab.eng.shizuoka.ac.jp/index.html

    • Related Report
      2014 Annual Research Report
  • [Remarks] 静岡大学大学院工学研究科電子物質科学専攻中野研究室

    • URL

      http://nakanolab.eng.shizuoka.ac.jp/index.html

    • Related Report
      2013 Annual Research Report

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Published: 2012-04-24   Modified: 2019-07-29  

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