Production of thin film consisting of metal nano-helices and hierarchical elucidation of the novel mechanical properties
Project/Area Number |
24686018
|
Research Category |
Grant-in-Aid for Young Scientists (A)
|
Allocation Type | Partial Multi-year Fund |
Research Field |
Materials/Mechanics of materials
|
Research Institution | Kyoto University |
Principal Investigator |
TAKASHI Sumigawa 京都大学, 工学(系)研究科(研究院), 准教授 (80403989)
|
Project Period (FY) |
2012-04-01 – 2015-03-31
|
Project Status |
Completed (Fiscal Year 2014)
|
Budget Amount *help |
¥27,300,000 (Direct Cost: ¥21,000,000、Indirect Cost: ¥6,300,000)
Fiscal Year 2014: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Fiscal Year 2013: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
Fiscal Year 2012: ¥18,980,000 (Direct Cost: ¥14,600,000、Indirect Cost: ¥4,380,000)
|
Keywords | 斜め蒸着法 / 銅 / 低温制御動的斜め蒸着装置 / ナノらせん / 薄膜 / 変形 / 破壊 / 疲労 / ナノ / 金属 / 動的斜め蒸着法 / 形態制御薄膜 / 疲労き裂進展 / 変形剛性 / 引張試験 / ナノ要素 / 力学特性 / ナノ構造 |
Outline of Final Research Achievements |
In order to produce nano-helices from copper (Cu) by glancing angle deposition (GLAD), a vacuum evaporation system capable of both cooling a substrate and measuring its temperature was developed. Using this system, a thin film consisting of arrays of Cu nano-helices was successfully formed on silicon substrates by maintaining the substrate temperature at Ts/Tm < 0.22 (Ts: substrate temperature, Tm: melting temperature of target material). Additionally, the mechanical properties of nano-helices were examined. Although the nano-helix produced by GLAD possessed high yield stress, its elastic deformation property was governed only by the shape. The thin film consisting of Cu nano-helices exhibited large allowable fracture strain, and did not show fatigue fracture at N = 1×10^6 cycles.
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Report
(4 results)
Research Products
(27 results)