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Atomic-scale flattening of Ge surfaces free from metallic contamination by a flat catalyst to enhance oxygen reduction reactions in water

Research Project

Project/Area Number 24686020
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypePartial Multi-year Fund
Research Field Production engineering/Processing studies
Research InstitutionOsaka University

Principal Investigator

ARIMA KENTA  大阪大学, 工学(系)研究科(研究院), 准教授 (10324807)

Project Period (FY) 2012-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥26,260,000 (Direct Cost: ¥20,200,000、Indirect Cost: ¥6,060,000)
Fiscal Year 2014: ¥8,580,000 (Direct Cost: ¥6,600,000、Indirect Cost: ¥1,980,000)
Fiscal Year 2013: ¥8,840,000 (Direct Cost: ¥6,800,000、Indirect Cost: ¥2,040,000)
Fiscal Year 2012: ¥8,840,000 (Direct Cost: ¥6,800,000、Indirect Cost: ¥2,040,000)
Keywordsエッチング / 半導体プロセス / 触媒反応 / グラフェン / 表面工学 / 超精密加工 / 生産工学 / ナノ材料 / 表面科学 / 酸素還元 / ゲルマニウム表面 / 酸素還元触媒 / 半導体表面 / 平坦化
Outline of Final Research Achievements

I am aiming at developing a surface creation process in water to flatten a Ge surface free from metallic contamination. In this research period, I have obtained the results shown below.
(1) I confirmed that nitrogen (N) atoms can be doped in graphene by a thermal treatment in a mixed NH3/Ar gas. (2) I performed electrochemical measurements. It was demonstrated that the catalytic activity of N-doped graphene to enhance O2 reduction reactions is in between those of Pt and a carbon bulk. (3) Graphene particles were deposited on a Ge surface, and this sample was immersed in water with dissolved O2 molecules. I found that a Ge surface around the deposited graphene particles was selectively etched. This is owing to the catalytic activity of graphene.
These results are important and essential to continue further experiments.

Report

(5 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • 2012 Annual Research Report
  • Research Products

    (50 results)

All 2016 2015 2014 2013 2012 Other

All Int'l Joint Research (1 results) Journal Article (17 results) (of which Peer Reviewed: 11 results,  Acknowledgement Compliant: 4 results) Presentation (29 results) (of which Int'l Joint Research: 3 results,  Invited: 4 results) Book (2 results) Remarks (1 results)

  • [Int'l Joint Research] ローレンスバークレー国立研究所(米国)

    • Related Report
      2015 Annual Research Report
  • [Journal Article] Catalyst-assisted Electroless Flattening of Ge Surfaces in Dissolved-O2-containing Water2015

    • Author(s)
      Tatsuya Kawase, Yusuke Saito, Atsushi Mura, Takeshi Okamoto, Kentaro Kawai, Yasuhisa Sano, Mizuho Morita, Kazuto Yamauchi, Kenta Arima
    • Journal Title

      ChemElectroChem

      Volume: 2 Issue: 11 Pages: 1656-1659

    • DOI

      10.1002/celc.201500245

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Microfluidic valve array control system integrating a fluid demultiplexer circuit2015

    • Author(s)
      Kentaro Kawai, Kenta Arima, Mizuho Morita and Shuichi Shoji
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 25 Issue: 6 Pages: 0650161-7

    • DOI

      10.1088/0960-1317/25/6/065016

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fundamental Properties of Metal-Assisted Chemical Etching of Ge Surfaces Mediated by Dissolved O<sub>2</sub> Molecules in Water2015

    • Author(s)
      有馬健太、川合健太郎、森田瑞穂
    • Journal Title

      Hyomen Kagaku

      Volume: 36 Issue: 7 Pages: 369-374

    • DOI

      10.1380/jsssj.36.369

    • NAID

      130005088879

    • ISSN
      0388-5321, 1881-4743
    • Related Report
      2015 Annual Research Report
    • Acknowledgement Compliant
  • [Journal Article] 洗浄技術のコツ ―Si表面のウェット洗浄―2015

    • Author(s)
      有馬健太
    • Journal Title

      応用物理

      Volume: 84 Pages: 1009-1012

    • NAID

      130007718673

    • Related Report
      2015 Annual Research Report
  • [Journal Article] Observation of Adsorbed Water on Ultrathin GeO<sub>2</sub>/Ge(100) by Ambient-Pressure X-ray Photoelectron Spectroscopy (AP-XPS)2015

    • Author(s)
      有馬健太
    • Journal Title

      Journal of the Vacuum Society of Japan

      Volume: 58 Issue: 1 Pages: 20-26

    • DOI

      10.3131/jvsj2.58.20

    • NAID

      130004952533

    • ISSN
      1882-2398, 1882-4749
    • Related Report
      2014 Annual Research Report
  • [Journal Article] Aggregation of Carbon Atoms at SiO2/SiC(0001) Interface by Plasma Oxidation toward Formation of Pit-free Graphene2014

    • Author(s)
      Naoki Saito, Daichi Mori, Akito Imafuku, Keisuke Nishitani, Hiroki Sakane, Kentaro Kawai, Yasuhisa Sano, Mizuho Morita and Kenta Arima
    • Journal Title

      Carbon

      Volume: 80 Pages: 440-446

    • DOI

      10.1016/j.carbon.2014.08.083

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Atomic-scale Observations of Semiconductor Surfaces after Ultra-Precision Machining2014

    • Author(s)
      有馬健太
    • Journal Title

      Journal of the Japan Society for Precision Engineering

      Volume: 80 Issue: 5 Pages: 452-456

    • DOI

      10.2493/jjspe.80.452

    • NAID

      130004513557

    • ISSN
      0912-0289, 1882-675X
    • Related Report
      2014 Annual Research Report
  • [Journal Article] Behaviors of Carbon Atoms during Plasma Oxidation of 4H-SiC(0001) Surfaces near Room Temperature2014

    • Author(s)
      Naoki Saito, Daichi Mori, Akito Imafuku, Kentaro Kawai, Yasuhisa Sano, Mizuho Morita, and Kenta Arima
    • Journal Title

      ECS Transactions

      Volume: 64 Issue: 17 Pages: 23-28

    • DOI

      10.1149/06417.0023ecst

    • Related Report
      2014 Annual Research Report
    • Acknowledgement Compliant
  • [Journal Article] Ambient-Pressure XPS Study of GeO2/Ge(100) and SiO2/Si(100) at Controlled Relative Humidity2014

    • Author(s)
      Kenta Arima, Yoshie Kawai, Yuya Minoura, Yusuke Saito, Daichi Mori, Hiroshi Oka, Kentaro Kawai, Takuji Hosoi, Zhi Liu, Heiji Watanabe, and Mizuho Morita
    • Journal Title

      ECS Transactions

      Volume: 64 Issue: 8 Pages: 77-82

    • DOI

      10.1149/06408.0077ecst

    • Related Report
      2014 Annual Research Report
  • [Journal Article] Enhancement of photoluminescence efficiency from GaN(0001) by surface treatments2014

    • Author(s)
      Azusa N. Hattori et al.
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 53 Issue: 2 Pages: 0210011-5

    • DOI

      10.7567/jjap.53.021001

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Metal-assisted chemical etching of Ge(100) surfaces in water toward nanoscale patterning2013

    • Author(s)
      Tatsuya Kawase et al.
    • Journal Title

      Nanoscale Research Letters

      Volume: 8 Issue: 1 Pages: 1511-7

    • DOI

      10.1186/1556-276x-8-151

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Absolute flatness measurements of silicon mirrors by a three-intersection method by near-infrared interferometry2013

    • Author(s)
      Junichi Uchikoshi, Yoshinori Hayashi, Noritaka Ajari, Kentaro Kawai, Kenta Arima and Mizuho Morita
    • Journal Title

      Nanoscale Research Letters

      Volume: 8 Issue: 1 Pages: 2751-7

    • DOI

      10.1186/1556-276x-8-275

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Planarization of SiC and GaN Wafers Using Polishing Technique Utilizing Catalyst Surface Reaction2013

    • Author(s)
      Yasuhisa Sano et al.
    • Journal Title

      ECS Journal of Solid State Science and Technology

      Volume: 2 Issue: 8 Pages: N3028-N3035

    • DOI

      10.1149/2.007308jss

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Water Growth on GeO_2/Ge(100) Stack and Its Effect on the Electronic Properties of GeO_22013

    • Author(s)
      Atsushi Mura, et al.
    • Journal Title

      The Journal of Physical Chemistry C

      Volume: 117 Pages: 165-171

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Catalytic Behavior of Metallic Particles in Anisotropic Etching of Ge(100) Surfaces in Water Mediated by Dissolved Oxygen2012

    • Author(s)
      Tatsuya Kawase et al.
    • Journal Title

      Journal of Applied Physics

      Volume: 111 Issue: 12 Pages: 1261021-3

    • DOI

      10.1063/1.4730768

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of Si etching with N-fluoropyridinium salt2012

    • Author(s)
      Kentaro Tsukamoto et al.
    • Journal Title

      Current Applied Physics

      Volume: 12 Pages: S29-S32

    • DOI

      10.1016/j.cap.2012.05.005

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Continuous Generation of Femtolitre Droplets Using Multistage Dividing Microfluidic Channel2012

    • Author(s)
      K. Kawai, M. Fujii, J. Uchikoshi, K. Arima, S. Shoji, M. Morita
    • Journal Title

      Current Applied Physics

      Volume: 12 Pages: 533-537

    • DOI

      10.1016/j.cap.2012.06.022

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Presentation] Segregation of ions in deliquesced droplets of alkali-halide nano-crystals on SiO22016

    • Author(s)
      Kenta Arima
    • Organizer
      International Conference and Exhibition on Materials Chemistry
    • Place of Presentation
      スペイン・バレンシア
    • Year and Date
      2016-04-01
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] グラフェン触媒を援用した水中でのGe表面エッチングの基礎検討2016

    • Author(s)
      森大地、中出和希、佐藤慎祐、川合健太郎、森田瑞穂、有馬健太
    • Organizer
      2016年応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学・東京都・目黒区
    • Year and Date
      2016-03-21
    • Related Report
      2015 Annual Research Report
  • [Presentation] 半導体表面加工に用いるグラフェン系触媒の合成と電気化学的評価2016

    • Author(s)
      佐藤慎祐、森大地、中出和樹、齋藤雄介、川合健太郎、森田瑞穂、有馬健太
    • Organizer
      2016年度精密工学会春季大会
    • Place of Presentation
      東京理科大学・千葉県・野田市
    • Year and Date
      2016-03-16
    • Related Report
      2015 Annual Research Report
  • [Presentation] 水中で酸素還元触媒と接触したGe表面のエッチング特性と平坦化への応用2016

    • Author(s)
      中出和希、森大地、川瀬達也、川合健太郎、佐野泰久、山内和人、森田瑞穂、有馬健太
    • Organizer
      電子デバイス界面テクノロジー研究会 -材料・プロセス・デバイス特性の物理-
    • Place of Presentation
      東レ研修センター・静岡県・三島市
    • Year and Date
      2016-01-22
    • Related Report
      2015 Annual Research Report
  • [Presentation] 触媒金属の酸素還元活性を利用した水中でのGe表面の平坦化2015

    • Author(s)
      有馬健太、川瀬達也、齋藤雄介、川合健太郎、佐野泰久、森田瑞穂、山内和人
    • Organizer
      2015年真空・表面科学合同講演会
    • Place of Presentation
      つくば国際会議場・茨城県・つくば市
    • Year and Date
      2015-12-01
    • Related Report
      2015 Annual Research Report
  • [Presentation] Origin of Anomalous Positive Charging of Water-adsorbed Thin GeO2 Films Studied by Ambient-pressure XPS2015

    • Author(s)
      K. Arima, D. Mori, Y. Saito, H. Oka, K. Kawai, T. Hosoi, M. Morita, H. Watanabe and Z. Liu
    • Organizer
      16th European Conference on Application of Surface and Interface Analysis
    • Place of Presentation
      スペイン・グラナダ
    • Year and Date
      2015-10-01
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 酸素還元活性を持つ触媒金属による水中でのGe表面平坦化の試み2015

    • Author(s)
      有馬 健太、川瀬 達也、齋藤 雄介、川合 健太郎、佐野 泰久、山内 和人、森田 瑞穂
    • Organizer
      2015年応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場・愛知県・名古屋市
    • Year and Date
      2015-09-16
    • Related Report
      2015 Annual Research Report
  • [Presentation] 水分子が吸着したGeO2/Ge構造の特異な帯電状態のAP-XPS観測2015

    • Author(s)
      有馬 健太、森 大地、岡 博史、細井 卓治、川合 健太郎、Liu Zhi、渡部 平司、森田 瑞穂
    • Organizer
      2015年応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場・愛知県・名古屋市
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] 酸素還元触媒を用いた水中でのGe表面の平坦化に関する研究 ~触媒材料の検討~2015

    • Author(s)
      中出和希、森大地、齋藤雄介、川合健太郎、佐野泰久、山内和人、森田瑞穂、有馬健太
    • Organizer
      2015年度精密工学会秋季大会
    • Place of Presentation
      東北大学・宮城県・仙台市
    • Year and Date
      2015-09-05
    • Related Report
      2015 Annual Research Report
  • [Presentation] O2還元活性を持つグラフェン触媒の合成と性能評価2015

    • Author(s)
      森 大地、中出和希、齋藤雄介、川合健太郎、森田瑞穂、有馬健太
    • Organizer
      精密工学会2015年度関西地方定期学術講演会
    • Place of Presentation
      京都工芸繊維大学・京都府・京都市
    • Year and Date
      2015-06-23
    • Related Report
      2015 Annual Research Report
  • [Presentation] 単一グラフェンフレークによる水中での Ge 表面のエッチング特性2015

    • Author(s)
      中出和希、森 大地、齋藤雄介、川合健太郎、森田瑞穂、有馬健太
    • Organizer
      精密工学会2015年度関西地方定期学術講演会
    • Place of Presentation
      京都工芸繊維大学・京都府・京都市
    • Year and Date
      2015-06-23
    • Related Report
      2015 Annual Research Report
  • [Presentation] Metal-Assisted Etching of Ge Surfaces in Water: From Pit Formation to Flattening2015

    • Author(s)
      Kenta Arima, Tatsuya Kawase, Atsushi Mura, Kentaro Kawai, Yasuhisa Sano, Kazuto Yamauchi and Mizuho Morita
    • Organizer
      2015 MRS Spring Meeting & Exhibit
    • Place of Presentation
      米国・サンフランシスコ
    • Year and Date
      2015-04-06
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Formation of Graphene with Reduced Pits on SiC(0001) Assisted by Plasma Oxidation and Wet Etching2014

    • Author(s)
      Daichi Mori, Naoki Saito, Akito Imafuku, Kentaro Kawai, Yasuhisa Sano, Mizuho Morita and Kenta Arima
    • Organizer
      The 7th International Symposium on Surface Science (ISSS-7)
    • Place of Presentation
      Shimane Prefectural Convention Center (Shimane, Matsue)
    • Year and Date
      2014-11-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] Behaviors of Carbon Atoms during Plasma Oxidation of 4H-SiC(0001) Surfaces near Room Temperature2014

    • Author(s)
      Naoki Saito, Daichi Mori, Akito Imafuku, Kentaro Kawai, Yasuhisa Sano, Mizuho Morita, and Kenta Arima
    • Organizer
      226th Meeting of The Electrochemical Society
    • Place of Presentation
      Cancun, Mexico
    • Year and Date
      2014-10-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] Ambient-Pressure XPS Study of GeO2/Ge(100) and SiO2/Si(100) at Controlled Relative Humidity2014

    • Author(s)
      Kenta Arima, Yoshie Kawai, Yuya Minoura, Yusuke Saito, Daichi Mori, Hiroshi Oka, Kentaro Kawai, Takuji Hosoi, Zhi Liu, Heiji Watanabe, and Mizuho Morita
    • Organizer
      226th Meeting of The Electrochemical Society
    • Place of Presentation
      Cancun, Mexico
    • Year and Date
      2014-10-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] Combination of Plasma Oxidation and Wet Etching to Create Monolayer-scale C Source for Pit-free Graphene on SiC Surfaces2014

    • Author(s)
      Kenta Arima, Naoki Saito, Daichi Mori, Kentaro Kawai, Mizuho Morita and Yasuhisa Sano
    • Organizer
      Collaborative Conference on 3D&Materials Research 2014
    • Place of Presentation
      Incheon/Seoul, South Korea
    • Year and Date
      2014-06-24
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Understanding Water Interaction with Ge Surfaces: From Wetting to Machining2014

    • Author(s)
      Kenta Arima, Kentaro Kawai and Mizuho Morita
    • Organizer
      BIT's 3rd Annual World Congress of Advanced Materials 2014
    • Place of Presentation
      Chongqing, China
    • Year and Date
      2014-06-08
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Accumulation of C Atoms at SiO2/SiC Interface by Plasma Oxidation of 4H-SiC(0001) at Room Temperature: Toward Formation of PIt-Free Graphene2014

    • Author(s)
      Kenta Arima, Naoki Saito, Kentaro Kawai, Yasuhisa Sano and Mizuho Morita
    • Organizer
      2014 MRS Spring Meeting & Exhibit
    • Place of Presentation
      San Francisco, USA
    • Year and Date
      2014-04-24
    • Related Report
      2014 Annual Research Report
  • [Presentation] Comparison of Wetting Properties between GeO2/Ge and SiO2/Si Revealed by in-situ XPS2014

    • Author(s)
      Kenta Arima
    • Organizer
      ゲートスタック研究会
    • Place of Presentation
      熱海
    • Related Report
      2013 Annual Research Report
  • [Presentation] Pit-free Graphene Growth on SiC Surface Assisted by Plasma Oxidation at Near Room Temperature2014

    • Author(s)
      Naoki Saito, Kenta Arima et al.
    • Organizer
      ゲートスタック研究会
    • Place of Presentation
      熱海
    • Related Report
      2013 Annual Research Report
  • [Presentation] その場X線光電子分光法を用いた極薄酸化物表面上の吸着水の観察 ―GeO2とSiO2の比較―2014

    • Author(s)
      有馬健太
    • Organizer
      2014年度 精密工学会 春季大会
    • Place of Presentation
      東京
    • Related Report
      2013 Annual Research Report
  • [Presentation] Effect of Water Growth on Quality of GeO_2/Ge Revealed by in-situ XPS2013

    • Author(s)
      Kenta Arima
    • Organizer
      Symposium on Surface and Nano Science 2013
    • Place of Presentation
      蔵王(招待講演)
    • Year and Date
      2013-01-16
    • Related Report
      2012 Annual Research Report
  • [Presentation] Nanoscale Interaction of Water with Germanium Surfaces: Wetting, Etching and Machining properties2013

    • Author(s)
      Kenta Arima
    • Organizer
      Collaborative Conference on 3D & Materials Research
    • Place of Presentation
      済州島(韓国)
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Interaction of Water Vapor with GeO2/Ge(100) Revealed by In Situ XPS under Controlled Relative Humidity2013

    • Author(s)
      K. Arima
    • Organizer
      15th European Conference on Applications of Surface and Interface Analysis
    • Place of Presentation
      サルデーニャ島(イタリア)
    • Related Report
      2013 Annual Research Report
  • [Presentation] Epitaxial Grafene Growth on Atomically Flattened SiC Assisted by Plasma Oxidation at 1000 ℃2012

    • Author(s)
      Naoki Saito
    • Organizer
      8th Handai Nanoscience and Nanotechnology International Symposium
    • Place of Presentation
      大阪
    • Year and Date
      2012-12-10
    • Related Report
      2012 Annual Research Report
  • [Presentation] Analysis of Enhanced Oxygen Reduction Reaction on Ge(100) Surface in Water Toward Metal-free Machining Process2012

    • Author(s)
      Atsushi Mura
    • Organizer
      Fifth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      大阪
    • Year and Date
      2012-10-23
    • Related Report
      2012 Annual Research Report
  • [Presentation] Low Temperature Growth of Graphene on Atomically Flat SiC Assisted by Plasma Oxidation2012

    • Author(s)
      Kenta Arima
    • Organizer
      Fifth International Symposium on Atomically Controlled Fabrication Technology
    • Place of Presentation
      大阪
    • Year and Date
      2012-10-22
    • Related Report
      2012 Annual Research Report
  • [Presentation] Metal-induced anisotropic etching of Ge (100) surfaces in water with dissolved oxygen2012

    • Author(s)
      K. Arima
    • Organizer
      24th General Conference of the Condensed Matter Division of the European Physical Society held jointly with 29th European Conference on Surface Science
    • Place of Presentation
      エジンバラ(英国)
    • Year and Date
      2012-09-05
    • Related Report
      2012 Annual Research Report
  • [Presentation] Low temperature growth of graphene on 4H-SiC(0001) flattened by catalyst-assisted etching in HF solution2012

    • Author(s)
      K. Arima
    • Organizer
      24th General Conference of tbe Condensed Matter Division of the European Physical Society held jointly with 29th European Conference on Surface Science
    • Place of Presentation
      エジンバラ(英国)
    • Year and Date
      2012-09-04
    • Related Report
      2012 Annual Research Report
  • [Book] 超精密加工と表面科学 ~原子レベルの生産技術~2014

    • Author(s)
      大阪大学グローバルCOEプログラム 他 編
    • Total Pages
      379
    • Publisher
      大阪大学出版会
    • Related Report
      2013 Annual Research Report
  • [Book] 現代表面科学シリーズ 「6.問題と解説で学ぶ表面科学」2013

    • Author(s)
      日本表面科学会 編
    • Total Pages
      208
    • Publisher
      共立出版
    • Related Report
      2013 Annual Research Report
  • [Remarks] Kenta Arima's Homepage

    • URL

      http://www-pm.prec.eng.osaka-u.ac.jp/kenta_arima/index.html

    • Related Report
      2014 Annual Research Report

URL: 

Published: 2012-04-24   Modified: 2022-01-27  

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