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LD fabrication on semipolar GaN/Si by induced pressure InGaN growth and strain control

Research Project

Project/Area Number 24686041
Research Category

Grant-in-Aid for Young Scientists (A)

Allocation TypePartial Multi-year Fund
Research Field Electronic materials/Electric materials
Research InstitutionNagoya University

Principal Investigator

HONDA YOSHIO  名古屋大学, 工学(系)研究科(研究院), 准教授 (60362274)

Research Collaborator KUSHIMOTO Maki  
Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥27,170,000 (Direct Cost: ¥20,900,000、Indirect Cost: ¥6,270,000)
Fiscal Year 2014: ¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000)
Fiscal Year 2013: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2012: ¥16,120,000 (Direct Cost: ¥12,400,000、Indirect Cost: ¥3,720,000)
KeywordsSi / InGaN / GaN / レーザ / 半極性面 / Si基板 / レーザー / 加圧MOVPE / MOVPE / レーザー構造
Outline of Final Research Achievements

In this study, we focus on the fabrication of the LD from blue to green region, by using semipolar GaN which could eliminate the internal polarization(piezo polarization). We could get semipolar GaN on patterned Si substrate with stripe shape. GaN and InGaN was taken the large stress due to the difference of the thermal expansion coefficient. In this structure, it was tensile stress along the stripe direction, on the other hand, it was compressive perpendicular direction. We found that InGaN luminous polarization direction was controlled to c axis direction owing to this stress. We made the laser structure on this structure and measured the optical property under high optical excitation condition. As a result, we confirm the stimulate emission from edge of the sample.

Report

(4 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Annual Research Report
  • 2012 Annual Research Report
  • Research Products

    (16 results)

All 2015 2014 2013 2012

All Journal Article (2 results) (of which Peer Reviewed: 2 results,  Open Access: 1 results,  Acknowledgement Compliant: 1 results) Presentation (14 results) (of which Invited: 1 results)

  • [Journal Article] Optically pumped lasing properties of (1-101) InGaN/GaN stripe multiquantum wells2015

    • Author(s)
      Maki Kushimoto
    • Journal Title

      Applied Physics Express

      Volume: 8 Issue: 2 Pages: 022702-022702

    • DOI

      10.7567/apex.8.022702

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Fabrication of InGaN/GaN Multiple Quantum Wells on (1-101) GaN2013

    • Author(s)
      T. Tanikawa, T. Sano, M. Kushimoto, Y. Honda, M. Yamaguchi, H. Amano
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 52 Issue: 8S Pages: 08JC05-08JC05

    • DOI

      10.7567/jjap.52.08jc05

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Presentation] 001)Si基板上半極性面InGaN光共振器の誘導放出特性2015

    • Author(s)
      久志本 真希、本田善央、天野浩
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス(神奈川県平塚市)
    • Year and Date
      2015-03-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] (001)Si 基板上半極性面InGaN 光共振器の誘導放出特性2014

    • Author(s)
      久志本 真希、本田善央、天野浩
    • Organizer
      第75回 応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学
    • Year and Date
      2014-09-16 – 2014-09-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] Optical gain spectra of (1–101) InGaN stripe cavity structures2014

    • Author(s)
      Maki Kushimoto, Yoshio Honda, Hiroshi Amano
    • Organizer
      IWN2014
    • Place of Presentation
      Wroclaw Centennial Hall conference center
    • Year and Date
      2014-08-26
    • Related Report
      2014 Annual Research Report
  • [Presentation] (1-101) InGaNマイクロキャビティの誘導放出2014

    • Author(s)
      久志本 真希、本田善央、天野浩
    • Organizer
      第34回電子材料 シンポジウム
    • Place of Presentation
      ラフォーレ修善寺(静岡県伊豆市)
    • Year and Date
      2014-07-10
    • Related Report
      2014 Annual Research Report
  • [Presentation] Light Emission Polarization Properties of (1-101) InGaN/GaN MQWs with Cavity Structure on Patterned Si Substrate2013

    • Author(s)
      M. Kushimoto, T. Tanikawa, Y. Honda, M. Yamaguchi, and H. Amano
    • Organizer
      10th International Conference on Nitride Semiconductors(ICNS-10)
    • Place of Presentation
      Washington DC, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] Anisotropic Optical Properties of Semipolar (1-101) InGaN/GaN Multiple Quantum Wells on a Patterned Si Substrate2013

    • Author(s)
      M. Kushimoto, T. Tanikawa, Y. Honda, M. Yamaguchi, and H. Amano
    • Organizer
      2013 JSAP-MRS Joint Symposia
    • Place of Presentation
      京都(同志社大学)
    • Related Report
      2013 Annual Research Report
  • [Presentation] High pressure InGaN growth on Sapphire substrate by MOVPE2013

    • Author(s)
      Yoshio Honda, Tomohiro Doi, Masahito Yamaguchi and Hiroshi Amano
    • Organizer
      2013 JSAP-MRS Joint Symposia
    • Place of Presentation
      京都(同志社大学)
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] 加圧MOVPE法を用いたInGaN/GaN多重量子井戸の成長2013

    • Author(s)
      土井友博, 本田善央, 山口雅史, 天野 浩
    • Organizer
      第74回応用物理学会
    • Place of Presentation
      京都(同志社大学)
    • Related Report
      2013 Annual Research Report
  • [Presentation] Polarization properties 1n InGaN/GaN multiple quantum well on semipolar (1-101) GaN/Si2012

    • Author(s)
      M. Kushimoto, T. Tanikawa, Y. Honda, M. Yamaguchi, and H. Amano
    • Organizer
      第31回電子材料シンポジウム31th Electronic Materials Symposium (EMS-31)
    • Place of Presentation
      静岡県伊豆市
    • Year and Date
      2012-07-11
    • Related Report
      2012 Annual Research Report
  • [Presentation] High pressure InGaN growth by MOVPE2012

    • Author(s)
      Y. Honda, S. Sakakura, T. Doi, T. Tanikawa, M. Yamaguchi, and H. Amano
    • Organizer
      第31回電子材料シンポジウム31th Electronic Materials Symposium (EMS-31)
    • Place of Presentation
      静岡県伊豆市
    • Year and Date
      2012-07-11
    • Related Report
      2012 Annual Research Report
  • [Presentation] Si基板上半極性面(1-101)GaNストライプ上InGaN/GaN多重量子井戸構造の偏光特性2012

    • Author(s)
      久志本真希・谷川智之・本田善央・山口雅史・天野 浩
    • Organizer
      信学会電子デバイス(ED)研究会
    • Place of Presentation
      愛知県豊橋市
    • Year and Date
      2012-05-17
    • Related Report
      2012 Annual Research Report
  • [Presentation] 加圧MOVPEによるInGaN結晶成長2012

    • Author(s)
      本田善央, 坂倉誠也, 土井友博, 谷川智之, 山口雅史, 天野
    • Organizer
      日本結晶成長学会ナノ構造・エピタキシャル成長分科会 第4回 窒化物半導体結晶成長講演会
    • Place of Presentation
      東京
    • Year and Date
      2012-04-28
    • Related Report
      2012 Annual Research Report
  • [Presentation] InGaN growth on GaN/Sapphire by high pressure MOVPE2012

    • Author(s)
      Y. Honda, S. Sakakura, T. Doi, T. Tanikawa, M. Yamaguchi, and H. Amano
    • Organizer
      International Workshop on Nitride Semiconductors 2012(IWN2012)
    • Place of Presentation
      北海道札幌市
    • Related Report
      2012 Annual Research Report
  • [Presentation] Optical polarization properties in semipolar (1-101) InGaN/GaN multiple quantum well on a patterned Si Substrate2012

    • Author(s)
      M. Kushimoto, T. Tanikawa, Y. Honda, M. Yamaguchi, and H. Amano
    • Organizer
      International Workshop on Nitride Semiconductors 2012(IWN2012)
    • Place of Presentation
      北海道札幌市
    • Related Report
      2012 Annual Research Report

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Published: 2012-04-24   Modified: 2019-07-29  

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