Basic study for development of ultra-low loss diamond power devices
Project/Area Number |
24686074
|
Research Category |
Grant-in-Aid for Young Scientists (A)
|
Allocation Type | Partial Multi-year Fund |
Research Field |
Inorganic materials/Physical properties
|
Research Institution | Kanazawa University |
Principal Investigator |
TOKUDA Norio 金沢大学, 電子情報学系, 准教授 (80462860)
|
Project Period (FY) |
2012-04-01 – 2015-03-31
|
Project Status |
Completed (Fiscal Year 2014)
|
Budget Amount *help |
¥26,520,000 (Direct Cost: ¥20,400,000、Indirect Cost: ¥6,120,000)
Fiscal Year 2014: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2013: ¥11,180,000 (Direct Cost: ¥8,600,000、Indirect Cost: ¥2,580,000)
Fiscal Year 2012: ¥12,610,000 (Direct Cost: ¥9,700,000、Indirect Cost: ¥2,910,000)
|
Keywords | カーボン材料 / ダイヤモンド / パワーデバイス / 半導体 |
Outline of Final Research Achievements |
Diamond is a semiconductor material for the next-generation power devices. The purpose of this study was to create the novel device performances for the realization of ultra-energy saving by elevating its material and process techniques. In this study, we succeeded in the development of the growth techniques of high-quality p-type diamond films, the realization of delta-doped diamond with ultralow resistivity, and the fabrication of diamond MOS structures with high-quality Al2O3/diamond interfaces.
|
Report
(4 results)
Research Products
(54 results)
-
-
-
-
-
-
-
-
-
-
-
-
-
-
[Presentation] CVD単結晶ダイヤモンド(100)自立基板の開発2014
Author(s)
渡邊 俊介, 森本 隆介, 金田 大輝,徳田 規夫,加藤 宙光, 梅沢 仁 ,山崎 聡, 有屋田 修,猪熊 孝夫
Organizer
平成26年度 応用物理学会 北陸・信越支部 学術講演会
Place of Presentation
富山大学
Year and Date
2014-11-07 – 2014-11-08
Related Report
-
-
-
-
-
-
-
-
-
-
-
[Presentation] Atomically controlled diamond surfaces and interfaces2014
Author(s)
N. Tokuda, D. Miyata, A. Ueda, T. Chonan, T. Minamiyama, T. Inokuma, M. Imura, Y. Koide, M. Ogura, T. Makino, D. Takeuchi, S. Yamasaki
Organizer
2014 International Conference on Diamond and Carbon Materials
Place of Presentation
Madrid, Spain
Year and Date
2014-09-07 – 2014-09-11
Related Report
Invited
-
-
-
-
-
-
-
-
-
-
-
-
-
-
[Presentation] Hydrogen termination of diamond surfaces
Author(s)
T. Chonan, N. Tokuda, M. Ogura, S. Yamasaki and T. Inokuma
Organizer
12th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-12)
Place of Presentation
Tsukuba, Japan
Related Report
-
-
[Presentation] Boron Delta-doped Diamond Structures
Author(s)
Takuma Minamiyama, Norio Tokuda, Masahiko Ogura, Satoshi Yamasaki, and Takao Inokuma
Organizer
The 4th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO 2013)
Place of Presentation
Kanazawa, Japan
Related Report
-
-
-
-
-
-
-
-
-
-
-
-
-