Study on surface potential contrast of secondary electron images in scanning electron microscopy
| Project/Area Number |
24710130
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Nanomaterials/Nanobioscience
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| Research Institution | National Institute of Advanced Industrial Science and Technology (2013)
National Institute for Materials Science (2012) |
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Principal Investigator |
KUMAGAI KAZUHIRO 独立行政法人産業技術総合研究所, 計測標準研究部門, 研究員 (20582042)
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| Project Period (FY) |
2012-04-01 – 2014-03-31
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| Project Status |
Completed (Fiscal Year 2013)
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| Budget Amount *help |
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2013: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2012: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
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| Keywords | 走査電子顕微鏡法 / 二次電子 / コントラスト / 薄膜 / 電子分光 / 検出器特性 / 走査電子顕微鏡 / 二次電子像 / 表面ポテンシャル |
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| Research Abstract |
Recent studies on scanning electron microscopy report that secondary electron imaging of nano films on a substrate shows the contrast originated in surface potential, especially in images given by low energy secondary electrons. Although, for this contrast, a model considering semiconductor-metal junction is proposed, there is not sufficient discussions for the details yet. In this study, we have (1) propose an improved evaluation method on the secondary electron detectors, and (2) studied of surface potential contrast by using nanofilms, which have compositional gradient, deposited on Si substrate.
The secondary electron images of this specimen show the contrast,which reflects bulk property of the film rather than surface potential. This result suggests us to carefully elucidate this contrast model as further study.
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Report
(3 results)
Research Products
(12 results)
