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NEMS-LSI-based tunable color filter with high optical efficiency and low power consumption

Research Project

Project/Area Number 24710143
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Microdevices/Nanodevices
Research InstitutionToyohashi University of Technology

Principal Investigator

TAKAHASHI Kazuhiro  豊橋技術科学大学, 工学(系)研究科(研究院), 講師 (90549346)

Project Period (FY) 2012-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2013: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2012: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
KeywordsMEMS/NEMS / サブ波長格子 / 表面プラズモン / カラーフィルタ / CMOS-MEMS / LSI-MEMS集積化 / 構造色 / 導波モード共鳴 / 集積化CMOS-MEMS / 可変フィルタ
Research Abstract

We have developed transmission color filters based on a subwavelength aluminum (Al) grating for NEMS variable color filter with high optical efficiency and low power consumption. An array of Al nanowires was deployed over a through hole. The subwavelength Al grating was patterned by EB direct writing and formed by liftoff technique. The peak wavelength of the transmitted light was red-shifted by increasing the gap of the subwavelength grating, and RGB color was expressed. The maximum measured transmitted light intensity of the peak wavelength was 56% which is equivalent value of conventional color filters fixed on a bulk substrate. The experimentally obtained peak wavelengths of the transmitted light agreed with the theoretical values. The proposed RGB color filters have potential application as tunable full color filters based on surface plasmon.

Report

(3 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • Research Products

    (22 results)

All 2014 2013 2012 Other

All Journal Article (2 results) (of which Peer Reviewed: 1 results) Presentation (17 results) Book (1 results) Remarks (1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] A low-voltage and high uniformity NEMS tunable color filter based on subwavelength grating2012

    • Author(s)
      H. Honma, K. Takahashi, M. Ishida, K. Sawada
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: vol. 51, no. 11

    • Related Report
      2013 Final Research Report
  • [Journal Article] A low-voltage and high uniformity NEMS tunable color filter based on subwavelength grating2012

    • Author(s)
      H. Honma, K. Takahashi, M. Ishida, and K. Sawada
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Issue: 11S Pages: 11PA01-11PA01

    • DOI

      10.1143/jjap.51.11pa01

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Presentation] Investigation of filter size and duty ratio on transmission color filter based on surface plasmons2014

    • Author(s)
      H. Honma, K. Takahashi, M. Fukuhara, M. Ishida, K. Sawada
    • Organizer
      Int. Conf. on Optical MEMS & Nanophotonics 2014
    • Place of Presentation
      Glasgow, Scotland, to be poster presented
    • Related Report
      2013 Final Research Report
  • [Presentation] Surface-plasmon-based flexible color filter using Al nanostructure array on parylene-N thin film2014

    • Author(s)
      H. Kumagai, H. Honma, K. Takahashi, M. Ishida, K. Sawada
    • Organizer
      Int. Conf. on Optical MEMS & Nanophotonics 2014
    • Place of Presentation
      Glasgow, Scotland, to be poster presented
    • Related Report
      2013 Final Research Report
  • [Presentation] Transmission color filter based on surface plasmon using Al nanowire array2014

    • Author(s)
      H. Honma, K. Takahashi, M. Ishida, K. Sawada
    • Organizer
      7^<th> Asia-Pacific Conference on Transducers and Micro/Nano Technologies
    • Place of Presentation
      Daegu, Korea, to be oral presented
    • Related Report
      2013 Final Research Report
  • [Presentation] アルミナノワイヤを用いた透過型表面プラズモンカラーフィルタの製作2014

    • Author(s)
      本間浩章, 高橋一浩, 石田誠, 澤田和明
    • Organizer
      平成26年度電気学会センサ・マイクロマシン部門総合研究会マイクロマシン・センサシステム研究会
    • Place of Presentation
      東京大学生産技術研究所
    • Related Report
      2013 Final Research Report
  • [Presentation] Transmission color filter based on surface plasmon using Al nanowire array2014

    • Author(s)
      H. Honma, K. Takahashi, M. Ishida, and K. Sawada
    • Organizer
      7th Asia-Pacific Conference on Transducers and Micro-Nano Technology
    • Place of Presentation
      Daegu, Korea
    • Related Report
      2013 Annual Research Report
  • [Presentation] アルミナノワイヤを用いた透過型表面プラズモンカラーフィルタの製作2014

    • Author(s)
      本間浩章,高橋一浩,石田誠,澤田和明
    • Organizer
      平成26年度電気学会E部門総合研究会
    • Place of Presentation
      東京大学生産技術研究所
    • Related Report
      2013 Annual Research Report
  • [Presentation] サブ波長格子を用いた3.3 V駆動透過型可変減衰器2013

    • Author(s)
      本間浩章, 高橋一浩, 石井仁, 石田誠, 澤田和明
    • Organizer
      第5回「集積化MEMSシンポジウム」論文集
    • Place of Presentation
      仙台国際センター
    • Related Report
      2013 Final Research Report
  • [Presentation] サブ波長格子を用いた透過型可変減衰器の製作2013

    • Author(s)
      本間浩章,高橋一浩,石井仁,石田誠,澤田和明
    • Organizer
      第74回応用物理学会秋季学術講演会講演予稿集
    • Place of Presentation
      同志社大学
    • Related Report
      2013 Final Research Report
  • [Presentation] A 3.3 V operated variable transmission attenuator based on subwavelength grating2013

    • Author(s)
      H. Honma, K. Takahashi, H. Ishii, M. Ishida, K. Sawada
    • Organizer
      Int. Conf. on Optical MEMS & Nanophotonics 2013
    • Place of Presentation
      Kanazawa
    • Related Report
      2013 Final Research Report
  • [Presentation] A 3.3 V operated variable transmission attenuator based on subwavelength grating2013

    • Author(s)
      H. Honma, K. Takahashi, H. Ishii, M. Ishida, and K. Sawada
    • Organizer
      IEEE Optical MEMS and Nanophotonics 2013
    • Place of Presentation
      Kanazawa, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] サブ波長格子を用いた透過型可変減衰器の製作2013

    • Author(s)
      本間浩章,高橋一浩,石井仁,石田誠,澤田和明
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      京都,同志社大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] サブ波長格子を用いた3.3 V駆動透過型可変減衰器2013

    • Author(s)
      本間浩章,高橋一浩,石井仁,石田誠,澤田和明
    • Organizer
      第30回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      宮城,仙台国際センター
    • Related Report
      2013 Annual Research Report
  • [Presentation] NEMS静電アクチュエータを用いた近赤外可変フィルタの設計2012

    • Author(s)
      平尾直也, 本間浩章, 高橋一浩, 石田誠, 澤田和明
    • Organizer
      平成24年度電気関連学会東海支部連合大会
    • Place of Presentation
      豊橋技術科学大学
    • Related Report
      2013 Final Research Report
  • [Presentation] 静電マイクロアクチュエータを用いたサブ波長格子可変カラーフィルタ2012

    • Author(s)
      本間浩章, 宮尾肇, 髙橋一浩, 石田誠, 澤田和明
    • Organizer
      電子情報通信学会ED研究会
    • Place of Presentation
      豊橋技術科学大学
    • Related Report
      2013 Final Research Report
  • [Presentation] A low-voltage and high uniformity NEMS tunable color filter based on subwavelength grating2012

    • Author(s)
      H. Honma, K. Takahashi, M. Ishida, K. Sawada
    • Organizer
      Materials Research Society (MRS) 2012 Spring Meeting
    • Place of Presentation
      San Francisco, CA
    • Related Report
      2013 Final Research Report 2012 Research-status Report
  • [Presentation] 静電マイクロアクチュエータを用いたサブ波長格子可変カラーフィルタ2012

    • Author(s)
      本間浩章,宮尾肇,髙橋一浩,石田誠,澤田和明
    • Organizer
      電子情報通信学会ED研究会
    • Place of Presentation
      豊橋技術科学大学
    • Related Report
      2012 Research-status Report
  • [Presentation] NEMS静電アクチュエータを用いた近赤外可変フィルタの設計2012

    • Author(s)
      平尾直也,本間浩章,高橋一浩,石田誠,澤田和明
    • Organizer
      平成24年度電気関連学会東海支部連合大会
    • Place of Presentation
      豊橋技術科学大学
    • Related Report
      2012 Research-status Report
  • [Book] 異種機能デバイス集積化技術の基礎と応用2012

    • Author(s)
      益 一哉,年吉 洋,町田克之他30名共著
    • Total Pages
      279
    • Publisher
      シーエムシー出版
    • Related Report
      2012 Research-status Report
  • [Remarks]

    • URL

      http://int.ee.tut.ac.jp/icg/wp/

    • Related Report
      2013 Final Research Report
  • [Patent(Industrial Property Rights)] カラーフィルタならびにこれを使用する発光装置および表示装置2014

    • Inventor(s)
      高橋一浩, 本間浩章
    • Industrial Property Rights Holder
      国立大学法人 豊橋技術科学大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2014-05-22
    • Related Report
      2013 Final Research Report

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Published: 2013-05-31   Modified: 2019-07-29  

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