Transportation of dust particles by solitary-wave electric field in plasma
| Project/Area Number |
24740371
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Plasma science
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| Research Institution | Osaka University (2013)
Kyushu University (2012) |
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Principal Investigator |
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| Project Period (FY) |
2012-04-01 – 2014-03-31
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| Project Status |
Completed (Fiscal Year 2013)
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| Budget Amount *help |
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2013: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2012: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
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| Keywords | 微粒子プラズマ / 帯電微粒子輸送 / ナノ粒子含有薄膜 / ナノ粒子量子ドットデバイス / 孤立波揺動電界 |
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| Research Abstract |
We have developed new bottom-up process for the fabrication of nanoparticle composite thin films in dusty plasma. We have obtained three main results. (i) We produced dust particles in reactive discharge plasma. The appearance of dust particles leaded to an increase in number density of Ar metastable atoms, and this is due to the drastic change of plasma parameters such as electron temperature. We also observed the void structure in dust-particle cloud, which is well explained by the effect of ion drag force acting on the dust particles. (ii) We succeeded in the transportation of dust particles by applying the external electric field. The dust particles dynamically moved from the bottom ion-sheath region to the upper substrate which is located more than 1 cm away from the bottom ion-sheath region. (iii) We deposited nanoparticle composite thin films, where crystalline Si nanoparticles of 6-11 nm diameter were produced in plasma, and they were successfully transported to the substrate.
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Report
(3 results)
Research Products
(30 results)
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[Presentation] Plasma CVD of Hard Carbon Films on PMMA2012
Author(s)
M. Shiratani, G. Uchida, K. Koga, R. Torigoe, T. Urakawa
Organizer
The 2012 International Conference on Flexible and Printed Electronics
Place of Presentation
The University of Tokyo, Tokyo, Japan
Year and Date
2012-09-07
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[Presentation] Plasma CVD of hard carbon films on PMMA
Author(s)
M. Shiratani, G. Uchida, K. Koga, R. Torigoe, T. Urakawa
Organizer
The 2012 International Conference on Flexible and Printed Electronics
Place of Presentation
The University of Tokyo, Tokyo, Japan
Related Report
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[Presentation] Dust and Dust Manipulation in Capacitively Coupled Plasmas
Author(s)
U. Czarnetzki, S. Iwashita, E. Schumngel, S. Mohr, J. Schulze, P. Hartman, Z. Donko, G. Uchida, K. Koga, M. Shiratani
Organizer
The 6th International Conference on Plasma Nanotechnology and Science
Place of Presentation
Gero Synergy Center, Gero, Japan
Related Report
