Topology optimization for electrostatic Micro Electro Mechanical Systems (MEMS) which are driven by very low-voltage

• Project/Area Number: 24760065
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Engineering fundamentals
• Research Institution: Osaka University
• Principal Investigator: YAMASAKI SHINTARO 大阪大学, 工学(系)研究科(研究院), 准教授 (70581601)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Project Status: Completed (Fiscal Year 2014)
• Budget Amount: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000); Fiscal Year 2014: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2013: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2012: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
• Keywords: 構造最適化 / トポロジー最適化 / 静電駆動MEMS / 低消費電力 / 静電駆動型MEMS

Outline of Final Research Achievements

The objective of this research is to realize creative design for electrostatic Micro Electro Mechanical Systems (MEMS) structures which are driven by very low-voltage. To achieve this objective, I developed a structural optimization method for electrostatic MEMS. In the proposed method, electrostatic force is evaluated on the basis of electrostatic analysis, and large displacement caused by the electrostatic force is also evaluated by the coupled analysis. In this manner, physical phenomena on electrostatic MEMS are accurately evaluated, and structural optimization is appropriately performed.

Research Products

• [Journal Article] Driving force profile design in comb drive electrostatic actuators using a level set-based shape optimization method (2015)
  • Author(s): T. Kotani, T. Yamada, S. Yamasaki, M. Ohkado, K. Izui, and S. Nishiwaki
  • Journal Title: Structural Multidisciplinary Optimization Volume: 51 Issue: 2 Pages: 369-383
  • DOI: 10.1007/s00158-014-1130-y
  • NAID: 120005623237
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] A consistent grayscale-free topology optimization method using the level-set method and zero-level boundary tracking mesh (2015)
  • Author(s): S. Yamasaki, A. Kawamoto, T. Nomura, and K. Fujita
  • Journal Title: International Journal for Numerical Methods in Engineering Volume: 101 Issue: 10 Pages: 744-773
  • DOI: 10.1002/nme.4826
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] レベルセット法に基づく静電アクチュエータの構造最適化 (2013)
  • Author(s): 小谷高代，山崎慎太郎，山田崇恭，大門真，泉井一浩，西脇眞二
  • Journal Title: 日本機械学会論文集(C編) Volume: 79 Pages: 3234-3247
  • NAID: 130004555292
  • Peer Reviewed
• [Presentation] レベルセット法とゼロレベル境界追跡型メッシュによる3次元問題を対象としたグレースケールフリートポロジー最適化 (2014)
  • Author(s): 山中誠一郎，山﨑慎太郎，藤田喜久雄
  • Organizer: 日本機械学会 第24回設計工学・システム部門講演会
  • Place of Presentation: 徳島
  • Year and Date: 2014-09-17 – 2014-09-19
• [Presentation] Level-set and ALE based topology optimization using nonlinear programming (2013)
  • Author(s): S. Yamasaki, A. Kawamoto, and T. Nomura
  • Organizer: 10th World Congress on Structural and Multidisciplinary Optimization
  • Place of Presentation: Orlando, USA
• [Presentation] Level-set and ALE based topology optimization using nonlinear programming (2013)
  • Author(s): Shintaro Yamasaki, Atsushi Kawamoto and Tsuyoshi Nomura
  • Organizer: 10th World Congress on Structural and Multidisciplinary Optimization
  • Place of Presentation: Orlando, Florida, USA