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Local modification of thin film metal by laser peening

Research Project

Project/Area Number 24760070
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Materials/Mechanics of materials
Research InstitutionTokyo Institute of Technology

Principal Investigator

AONO Yuko  東京工業大学, 理工学研究科, 助教 (20610033)

Project Period (FY) 2012-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2013: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2012: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Keywordsレーザピーニング / 薄膜金属材料
Research Abstract

Laser peening (LP) is a surface treatment method for improving mechanical properties. Conventionally, LP has been applied to bulk material and the treatment is conducted under water medium to prevent expansion of plasma.
In this research, to apply this treatment to thin film metals is objective. The LP has possibility to be a novel treatment method of thin film metal, however the conventional wet-condition treatment is not suitable for thin films. Therefore, LP under dry condition is proposed.
Dry LP uses transparent solid material instead of water for medium. Glass is chosen for the solid medium of dry LP because it shows higher improvement of hardness than that of conventional wet LP. In addition, air gap between specimen and solid medium is considered. As results, the peening effect is confirmed less than 0.1mm of the gap thickness. Finally, the proposed dry LP is applied to thin copper film deposited by sputtering and hardness of the film is improved.

Report

(3 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • Research Products

    (6 results)

All 2014 2013 Other

All Presentation (5 results) Remarks (1 results)

  • [Presentation] 薄膜金属へのドライ環境レーザピーニングの適用2014

    • Author(s)
      山本祐幸,青野祐子,平田敦,戸倉和
    • Organizer
      2014年度精密工学会春季大会
    • Place of Presentation
      東京大学
    • Related Report
      2013 Final Research Report
  • [Presentation] 薄膜金属へのドライ環境レーザピーニングの適用2014

    • Author(s)
      山本祐幸,青野祐子,平田敦,戸倉和
    • Organizer
      2014年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京大学
    • Related Report
      2013 Annual Research Report
  • [Presentation] 薄膜金属材料適用に向けたドライレーザピーニングの検討2013

    • Author(s)
      青野祐子,山本祐幸,樋野悠人,平田敦,戸倉和
    • Organizer
      日本機械学会第21回機械材料・材料加工技術講演会
    • Place of Presentation
      首都大学東京
    • Related Report
      2013 Annual Research Report 2013 Final Research Report
  • [Presentation] 高分子フィルムによるドライ環境レーザピーニング2013

    • Author(s)
      山本祐幸,青野祐子,平田敦,戸倉和
    • Organizer
      2013年度精密工学会秋季大会
    • Place of Presentation
      関西大学
    • Related Report
      2013 Final Research Report
  • [Presentation] 高分子フィルムによるドライ環境レーザピーニング2013

    • Author(s)
      山本祐幸,青野祐子,平田敦,戸倉和
    • Organizer
      2013年度精密工学会秋季大会学術講演会
    • Place of Presentation
      関西大学
    • Related Report
      2013 Annual Research Report
  • [Remarks]

    • URL

      http://musashi.ctrl.titech.ac.jp/

    • Related Report
      2013 Final Research Report

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Published: 2013-05-31   Modified: 2019-07-29  

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