Piezoelectric thin film MEMS with giant shear electromechanical coupling
| Project/Area Number |
24760075
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Materials/Mechanics of materials
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| Research Institution | Nagoya Institute of Technology |
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Principal Investigator |
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| Project Period (FY) |
2012-04-01 – 2015-03-31
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| Project Status |
Completed (Fiscal Year 2014)
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| Budget Amount *help |
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2014: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2013: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Fiscal Year 2012: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
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| Keywords | 圧電薄膜 / 横波圧電薄膜 / 高感度ＭＥＭＳ / 巨大横波圧電性 / 窒化アルミニウム薄膜 / 横波応用センサ / 圧電性評価 / 配向制御 / イオンビーム支援成膜 |
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| Outline of Final Research Achievements |
Shear piezoelectric films are attractive for sensors detecting viscosity and conductivity in liquid. High k15 is required for these sensors. We investigated the k15 of the c-axis tilted Sc doped AlN films. k15 of the films showed 16.8 % which is 3.2 times larger than that of AlN single crystal.
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Report
(4 results)
Research Products
(54 results)
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[Presentation] “Micro liquid viscometer by thickness-shear mode resonator with c-axis parallel oriented ZnO film,”2012
Author(s)
Y. Kato, T. Yanagitani, M. Matsukawa, M. Sawasaki, T. Kawamoto, Y. Mori, S. Takayanagi, S. Sasaki, M. Oba, Y. Watanabe,
Organizer
2012 IEEE International Ultrason. Symp.
Place of Presentation
ドレスデン
Related Report
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