Study of dimensional measurement of micro-hole by using a high-sensitivity probing system with a nanopipette ball probe

• Project/Area Number: 24760097
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Production engineering/Processing studies
• Research Institution: Tohoku University
• Principal Investigator: ITO So 東北大学, 工学(系)研究科(研究院), 助教 (00624818)
• Project Period (FY): 2012-04-01 – 2014-03-31
• Project Status: Completed (Fiscal Year 2013)
• Budget Amount: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000); Fiscal Year 2013: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2012: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
• Keywords: 計測工学 / ナノメトロロジー / 寸法計測 / シェアフォース / プロービング / スタイラス / ナノピペット / 微小球 / 形状計測 / 接触検出 / マイクロノズル / マイクロスリット / 全方位検出

Research Abstract

A new type probing system has been developed for the dimansional measurement of micro-holes. The stylus used in this study is consisted of a glass nanopipette and micro glass sphere. By attaching the micro-sphere at the edge of the glass nanopipette, the stylus tip with the diameter of less than 10 micrometer can maintain the uniform shape from all directions.The contact detection between the stylus tip and the measuring surface can be realized by utilizing the method of shear-force detection which employ the interaction force owing to the meniscus layer. It has been verified that the developed probing system has the ability to measure the dimensional measurement with nanometric resolution and sub-micrometric measurement accuracy by using the nanopipette ball stylus.

Research Products

• [Journal Article] Development of a probing system for micro-CMM by utilizing shear-force detection (2014)
  • Author(s): So Ito, Issei Kodama, Wei Gao
  • Journal Title: Measurement Science and Technology Volume: Vol.25 Issue: 6 Pages: 064011-064011
  • DOI: 10.1088/0957-0233/25/6/064011
  • Peer Reviewed
• [Journal Article] Measurement of Cutting Edge Width of a Rotary Cutting Tool by Using a Laser Displacement Sensor (2014)
  • Author(s): So Ito, Sho Sekine, Yuki Shimizu, Wei Gao, Tsutomu Fukuda, Akira Kato, Kouji Kubota
  • Journal Title: International Journal of Automation Technology Volume: Vol.8, No. 1 Pages: 28-33
  • NAID: 130007673916
  • Peer Reviewed
• [Journal Article] Measurement of Cutting Edge Width of a Rotary Cutting Tool by Using a Laser Displacement Sensor (2014)
  • Author(s): So Ito, Sho Sekine, Yuki Shimizu, Wei Gao, Tsutomu Fukuda, Akira Kato and Kouji Kubota
  • Journal Title: International Journal of Automation Technology Volume: 8 Pages: 28-33
  • NAID: 130007673916
  • Peer Reviewed
• [Journal Article] An Electrostatic Force Probe for Surface Profile Measurement in Noncontact Condition (2013)
  • Author(s): So Ito, Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, Yuki Shimizu, Gaofa He and Wei Gao
  • Journal Title: International Journal of Automation Technology Volume: 7 Pages: 714-419
  • Peer Reviewed
• [Journal Article] Construction and verification of a linear-rotary micro-stage with a millimeter-scale range (2013)
  • Author(s): Yuxin Peng, So Ito, Yasumasa Sakurai, Yuki Shimizu, and Wei Gao
  • Journal Title: International Journal of Precision Engineering and Manufacturing Volume: 14 Issue: 9 Pages: 1623-1628
  • DOI: 10.1007/s12541-013-0219-3
  • Peer Reviewed
• [Journal Article] Characterization of Electrostatic Force for Scanning Electrostatic Force Microscopy of Micro-structured Surface (2013)
  • Author(s): Zhigang Jia, So Ito, Keiichiro Hosobuchi, Shigeaki Goto, Yuki Shimizu, Gaofa He, Wei Gao
  • Journal Title: International Journal of Precision Engineering and Manufacturing Volume: Vol. 14 Issue: 9 Pages: 1543-1549
  • DOI: 10.1007/s12541-013-0208-6
  • Peer Reviewed
• [Journal Article] Improvement of an air-bearing displacement sensor with nanometric resolution (2012)
  • Author(s): So Ito, Kang-Won Lee, Yuki Shimizu, Wei Gao
  • Journal Title: Key Engineering Materials Volume: 523-524 Pages: 945-950
  • DOI: 10.4028/www.scientific.net/kem.523-524.945
  • Peer Reviewed
• [Journal Article] Development of a Self-Sensing probe for Local Depositions in Liquid Condition
  • Author(s): So Ito and Futoshi Iwata
  • Journal Title: International Journal of Nanomanufacturing Volume: (in press)
  • Peer Reviewed
• [Presentation] 微小球付きナノピペットプローブを用いたマイクロ構造物の寸法測定に関する研究 (2014)
  • Author(s): 伊東聡,小玉一成,高偉
  • Organizer: 2014年度精密工学会学術講演会
  • Place of Presentation: 東京大学,東京 A74
  • Year and Date: 2014-03-20
• [Presentation] Development of a nanopipette ball probe for Micro-CMM (2014)
  • Author(s): So Ito, Issei Kodama, Hirotaka Kikuchi Wei Gao
  • Organizer: International Symposium on Micro/Nano Mechanical Machining and Manufacturing (ISMNM2014)
  • Place of Presentation: Xi'an, China
• [Presentation] 微小球付きナノピペットプローブを用いたマイクロ構造物の寸法測定に関する研究 (2014)
  • Author(s): 伊東聡，小玉一成，高偉
  • Organizer: 2014年度精密工学会学術講演会
  • Place of Presentation: 東京大学，東京
• [Presentation] 微小球付きナノピペットプローブを用いた形状計測に関する研究―第3報周波数変調検出による接触検出の高感度化― (2013)
  • Author(s): 伊東聡,小玉一成,高偉
  • Organizer: 2013年精密工学会秋季大会学術講演会
  • Place of Presentation: 関西大学,大阪府吹田市,(2013,G31)
  • Year and Date: 2013-09-13
• [Presentation] Dimensional measurement of micrometer-scale structures with a nanopipette ball probe by using shear-force detection (2013)
  • Author(s): So Ito, Issei Kodama, Wei Gao
  • Organizer: 6th International Symposium of Precision Mechanical Measurement (ISPMM2013)
  • Place of Presentation: Guizhou, China
  • Year and Date: 2013-08-12
• [Presentation] Construction of a surface profile measurement system by using a nanopipette ball probe with shear-force detection (2013)
  • Author(s): Issei KODAMA, So ITO, Wei GAO
  • Organizer: The 7th International Conference on Leading Edge Manufacturing in 21st Century (LEM21), Proc. of 7th LEM21
  • Place of Presentation: Matsushima, Japan
• [Presentation] Development of a Nanopipette Ball Probe for Form Measurement of Micrometer-Scale Structures (2013)
  • Author(s): So Ito, Issei Kodama, Wei Gao
  • Organizer: The 11th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII)
  • Place of Presentation: Aachen, Germany
• [Presentation] 微小球付きナノピペットプローブを用いた形状計測に関する研究―第2報形状計測システムの開発と評価― (2013)
  • Author(s): 伊東聡,小玉一成,高偉
  • Organizer: 2013年精密工学会春季大会学術講演会
  • Place of Presentation: 東京工業大学,東京,2013,N08
• [Presentation] Surface Profile Measurement of Micro-optics by using a Scanning Electrostatic Force Microscope (2013)
  • Author(s): So Ito, Zhigang Jia, Shigeaki Goto, Gaofa He, Keiichiro Hosobuchi, Yuki Shimizu and Wei Gao
  • Organizer: 5th International Conference of Asian Society for Precision Engineering and Nanotechnology
  • Place of Presentation: Taipei, Taiwan
  • Invited
• [Presentation] Dimensional measurement of micrometer-scale structures with a nanopipette ball probe by using shear-force detection (2013)
  • Author(s): So Ito, Issei Kodama and Wei Gao
  • Organizer: 6th International Symposium of Precision Mechanical Measurement
  • Place of Presentation: Guizhou, China
  • Invited
• [Presentation] Development of a Nanopipette Ball Probe for Form Measurement of Micrometer-Scale Structures (2013)
  • Author(s): So Ito, Issei Kodama and Wei Gao
  • Organizer: The 11th International Symposium on Measurement Technology and Intelligent Instruments
  • Place of Presentation: Aachen, Germany
• [Presentation] 微小球付きナノピペットプローブを用いた形状計測に関する研究 ―第3報 周波数変調検出による接触検出の高感度化― (2013)
  • Author(s): 伊東聡，小玉一成，高偉
  • Organizer: 2013年精密工学会秋季大会学術講演会
  • Place of Presentation: 関西大学，大阪府
• [Presentation] Construction of a surface measurement system by using a nanopipette ball probe with shear-force detection (2013)
  • Author(s): Issei Kodama, So Ito and Wei Gao
  • Organizer: The 7th International Conference on Leading Edge Manufacturing in 21st Century
  • Place of Presentation: 松島，宮城県
• [Presentation] Dimensional Measurement of Micrometer-scale Structures with a Nanopipette Ball Probe by Using Shear-froce Detection (2013)
  • Author(s): So Ito, Issei Kodama, Wei Gao
  • Organizer: 6th International Symposium on Precision Mechanical Measurement
  • Place of Presentation: Guizhou, China
  • Invited
• [Presentation] Development of a Nanopipette Ball Probe for Form Measurement of Micrometer-Scale Structures (2013)
  • Author(s): So Ito, Issei Kodama, Wei Gao
  • Organizer: 11th International Symposium on Measurement Technology and Intelligent Instruments
  • Place of Presentation: Aachen, Germany
• [Presentation] 微小球付きナノピペットプローブを用いた形状計測に関する研究 －第2報 形状計測システムの開発と評価－ (2013)
  • Author(s): 伊東聡、小玉一成、高偉
  • Organizer: 2013年度精密工学会春季大会学術講演会
  • Place of Presentation: 東京工業大学(東京)
• [Presentation] 微小球付きナノピペットプローブに関する研究 (2012)
  • Author(s): 小玉一成,伊東聡,高偉
  • Organizer: 2012年度精密工学会東北支部学術講演会
  • Place of Presentation: 山形大学,米沢市
  • Year and Date: 2012-12-01
• [Presentation] A nanopipette ball probe for dimensional measurement of micro-structures (2012)
  • Author(s): So Ito, Issei Kodama, Wei Gao
  • Organizer: International Conference of Manufacturing Technology Engineers 2012 (ICMTE)
  • Place of Presentation: Seoul, Korea, Proceedings of the ICMTE
• [Presentation] 微小球付きナノピペットプローブを用いた形状計測に関する研究―装置の設計と基本特性の評価― (2012)
  • Author(s): 伊東聡,小玉一成,高偉
  • Organizer: 2012年度精密工学会秋季大会学術講演会
  • Place of Presentation: 九州工業大学,北九州市,(2012,N44)
• [Presentation] Development of self-sensing probe with a high aspect ratio shape for AFM observation in a liquid condition (2012)
  • Author(s): So Ito and Futoshi Iwata
  • Organizer: European Society for Precision Engineering and Nanotechnology (euspen) 2012
  • Place of Presentation: Stockholm, Sweden
• [Presentation] 微小球付きナノピペットプローブに関する研究 (2012)
  • Author(s): 小玉一成、伊東聡、高偉
  • Organizer: 2012年度精密工学会東北支部学術講演会
  • Place of Presentation: 山形大学(米沢市)
• [Presentation] A nanopipette ball probe for dimensional measurement of micro-structure (2012)
  • Author(s): So Ito, Issei Kodama, Wei Gao
  • Organizer: International Conference of Manufacturing Technology Engineers
  • Place of Presentation: Seoul, Korea
  • Invited
• [Presentation] 微小球付きナノピペットプローブを用いた形状計測に関する研究 －装置の設計と基本特製の評価－ (2012)
  • Author(s): 伊東聡、小玉一成、高偉
  • Organizer: 2012年度精密工学会秋季大会学術講演会
  • Place of Presentation: 九州工業大学(北九州市)
• [Remarks]
  • URL: http://www.nano.mech.tohoku.ac.jp/
• [Remarks] 東北大学研究者紹介
  • URL: http://db.tohoku.ac.jp/whois/detail/a04c0e710713ba9da79d32fa0173902c.html
• [Remarks] 東北大学工学研究科ナノメカニクス専攻 高・清水・伊東研究室
  • URL: http://www.nano.mech.tohoku.ac.jp/
• [Remarks] 東北大学，大学院工学研究科，ナノメカニクス専攻 高・清水・伊東研究室／精密ナノシステム研究センター
  • URL: http://www.nano.mech.tohoku.ac.jp/index.html
• [Remarks] 東北大学研究者紹介
  • URL: http://db.tohoku.ac.jp/whois/detail/a04c0e710713ba9da79d32fa0173902c.html