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Direct bonding of semiconductor material and glass by ultra-short pulsed laser

Research Project

Project/Area Number 24760107
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Production engineering/Processing studies
Research InstitutionOkayama University

Principal Investigator

OKAMOTO YASUHIRO  岡山大学, 自然科学研究科, 准教授 (40304331)

Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2014: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2013: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2012: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywords超短パルスレーザ / シリコン / ガラス / 微細溶接 / 機械強度 / 接合 / せん断強度 / 半導体材料
Outline of Final Research Achievements

Locally selective welding method of monocrystalline silicon and glass was experimentally investigated. Laser beam was mainly absorbed at monocrystalline silicon through glass plate. It was considered that the absorption of laser energy to glass was occurred, and the convection of silicon and glass was caused by the pressure of high temperature. Strong weld joints could be created by mixture of silicon and glass at the interface, and higher shearing strength of weld joint could be performed at proper number of laser shot in the laser spot.

Report

(4 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • 2012 Research-status Report
  • Research Products

    (9 results)

All 2015 2014 2013 Other

All Journal Article (3 results) (of which Peer Reviewed: 3 results,  Acknowledgement Compliant: 1 results,  Open Access: 1 results) Presentation (6 results) (of which Invited: 1 results)

  • [Journal Article] High Speed, High Strength Microwelding of Si/Glass using ps-Laser Pulses,2015

    • Author(s)
      Isamu Miyamoto, Yasuhiro Okamoto, Assi Hansen, Joma Vihinen, Tiina Amberla and Jarno Kangastupa
    • Journal Title

      Optics Express

      Volume: 23(3) Issue: 3 Pages: 3427-3427

    • DOI

      10.1364/oe.23.003427

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Novel Micro-welding of Silicon and Glass by Ultrashort Pulsed Laser2014

    • Author(s)
      Yasuhiro Okamoto, Isamu Miyamoto, Jorma Vihinen, Akira Okada
    • Journal Title

      Materials Science Forum

      Volume: 783-786 Pages: 2792-2797

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Evaluation of Molten Zone in Micro-welding of Glass by Picosecond Pulsed Laser2013

    • Author(s)
      Yasuhiro Okamoto, Isamu Miyamoto, Kristian Cvecek, Akira Okada, Kenta Takahashi and Michael Schmidt
    • Journal Title

      Journal of Laser Micro/Nanoengineering

      Volume: Vol.8, No.1 Issue: 1 Pages: 65-69

    • DOI

      10.2961/jlmn.2013.01.0013

    • Related Report
      2012 Research-status Report
    • Peer Reviewed
  • [Presentation] Effect of Wavelength and Pulse Duration in Laser Micro-welding of Glass and Monocrystalline Silicon2014

    • Author(s)
      Yasuhiro Okamoto, Imaduddin Helmin bin Wan Nordin, Isamu Miyamoto and Akira Okada
    • Organizer
      15th International Symposium on Laser Precision Microfabrication
    • Place of Presentation
      Vilnius, Lithuania
    • Year and Date
      2014-06-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] Investigation of Micro-welding Characteristics of Si and Glass by Picosecond Pulsed Laser,2014

    • Author(s)
      Imaduddin Helmin bin Wan Nordin, Yasuhiro Okamoto, Isamu Miyamoto, Akira Okada
    • Organizer
      First Smart Laser Processing Conference 2014
    • Place of Presentation
      Yokohama, Japan.
    • Year and Date
      2014-04-23
    • Related Report
      2014 Annual Research Report
  • [Presentation] Novel Micro-welding of Silicon and Glass by Ultrashort Pulsed Laser2013

    • Author(s)
      Yasuhiro Okamoto, Isamu Miyamoto, Jorma Vihinen and Akira Okada
    • Organizer
      8th International Conference on Processing and Manufacturing of Advanced Materials
    • Place of Presentation
      Las Vegas
    • Related Report
      2013 Research-status Report
    • Invited
  • [Presentation] ピコ秒レーザーによるシリコンとガラスの微細溶接法の試み2013

    • Author(s)
      岡本康寛,岡田 晃,宮本 勇
    • Organizer
      レーザー学会第454回研究会
    • Place of Presentation
      岡山国際交流センター
    • Related Report
      2013 Research-status Report
  • [Presentation] Novel Fusion Welding Technology of Si/Glass Using Ultrashort Laser

    • Author(s)
      Isamu Miyamoto, Yashuhiro Okamoto, Jarno Kangastupa, Tiina Amberla, Assi Hansen and Jorma Vihinen
    • Organizer
      31st International Congress on Applications of Lasers & Electro-Optics 2012
    • Place of Presentation
      Anaheim, USA
    • Related Report
      2012 Research-status Report
  • [Presentation] Local Laser Joining of Glass and Silicon

    • Author(s)
      Assi Hansen, Jorma Vihinen, Yasuhiro Okamoto, Isamu Miyamoto and Tiina Amberla
    • Organizer
      31st International Congress on Applications of Lasers & Electro-Optics 2012
    • Place of Presentation
      Anaheim, USA
    • Related Report
      2012 Research-status Report

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Published: 2013-05-31   Modified: 2019-07-29  

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