| Project/Area Number |
24760113
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | 防衛大学校(総合教育学群、人文社会科学群、応用科学群、電気情報学群及びシステム工学群) |
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Principal Investigator |
YOSHITOMI Kenichiro 防衛大学校(総合教育学群、人文社会科学群、応用科学群、電気情報学群及びシステム工, その他部局等, 准教授 (40546149)
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| Project Period (FY) |
2012-04-01 – 2015-03-31
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| Project Status |
Completed (Fiscal Year 2014)
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| Budget Amount *help |
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2013: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2012: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
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| Keywords | 石英ガラス基板 / 反り / 冷凍ピンチャック / 平坦化研磨 / 冷凍液 / 凝固固着 / マスク基板 / 薄型基板 / 石英ウエハ |
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| Outline of Final Research Achievements |
As the warpage of a substrate deteriorates the flatness of that, it is required to fabricate a nonwarped substrate. So we have proposed the new method to chuck a substrate without deforming during polishing that is realized by a freezing pin chuck. In this technique, freezing liquid is applied on the pins by a rotary spray type atomizer. And coolant water flows among pins to cool frozen freezing liquid. The substrate is chucked by coagulating the freezing liquid. We use MW-1(EMINENT supply Co. Ltd.) as freezing liquid, which has 17 ℃ of freezing point. The possibility of fabricating a nonwarped substrate using a freezing pin chuck was investigated by experiments. It was clarified that this chuck had the ability to chuck without changing the profile of a substrate and was demonstrated experimentally to polish a quartz glass substrate without peeling.
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