A study on a polymer actuator device fabricated by using dry process
| Project/Area Number |
24760209
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | Wakayama University |
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Principal Investigator |
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| Project Period (FY) |
2012-04-01 – 2014-03-31
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| Project Status |
Completed (Fiscal Year 2013)
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| Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2013: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2012: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
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| Keywords | 高分子アクチュエータ / 微細加工 / プラズマ処理 / 反応性イオンエッチング / 選択的無電解めっき / イオン導電性高分子 / 無電解めっき / センサ特性 |
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| Research Abstract |
In this research, we have developed a basic fabrication techniques for an ionic polymer conductive polymer actuator by using dry plasma processes as typical fabrication processes for conventional microelectromechanical systems (MEMS). Ionic polymer-metal composite (IPMC) is used as an ionic polymer conductive polymer actuator. In order to confirm the efficiencies of our developed techniques, a prototype of a miniaturized IPMC (0.1mm width, 10mm length) of cantilever-type was fabricated and the characteristics of it was evaluated. IPMCs of this size have been previously-unreported. As a result, we confirmed the operation of the fabricated miniaturized IPMCs and the effectiveness of our developed techniques.
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Report
(3 results)
Research Products
(26 results)
