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Development of high-performance oxide-semiconductor thin-film transistors using rotation magnet sputtering technology

Research Project

Project/Area Number 24760248
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Electronic materials/Electric materials
Research InstitutionTohoku University

Principal Investigator

GOTO Tetsuya  東北大学, 未来科学技術共同研究センター, 准教授 (00359556)

Project Period (FY) 2012-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2013: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2012: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Keywords薄膜トランジスタ / IGZO / マグネトロンスパッタ / キセノン
Research Abstract

Oxide-semiconductor amorphous In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs) were fabricated using the rotation magnet sputtering technology which can realize uniform deposition and plasma irradiation at the substrate due to time averaging effect of moving multiple plasma loops excited on the target surface. Thanks to these merits, uniformity of film properties, the properties of carrier life-time which is related to the carrier mobility measured by microwave photo conductive decay method, can be improved. Also, it is revealed that carrier mobility can be increased by introducing the xenon sputtering instead of the conventional argon sputtering. We also proposed the xenon sputtering by rotation magnet sputtering incorporating a xenon recycle-and-supply system, where a-IGZO TFTs with high mobility with uniform distribution can be fabricated with low-cost even by using high-cost xenon.

Report

(3 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • Research Products

    (12 results)

All 2014 2013 2012 Other

All Journal Article (4 results) (of which Peer Reviewed: 4 results) Presentation (7 results) (of which Invited: 1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Amorphous InGaZnO Thin-Film Transistors Prepared by Magnetron Sputtering Using Kr and Xe Instead of Ar2014

    • Author(s)
      T. Goto, S. Sugawa and T. Ohmi
    • Journal Title

      J. Soc. Info. Disp.

      Volume: (印刷中)

    • Related Report
      2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Low-cost Xe sputtering of amorphous In-Ga-Zn-O thin-film transistors by rotation magnet sputtering incorporating a Xe recycle-and-supply system2014

    • Author(s)
      T. Goto, S. Sugawa and T. Ohmi
    • Journal Title

      J. Vac. Sci. Technol. A

      Volume: 32 Issue: 2

    • DOI

      10.1116/1.4835775

    • Related Report
      2013 Annual Research Report 2013 Final Research Report
    • Peer Reviewed
  • [Journal Article] Amorphous In-Ga-Zn-O thin-film transistors prepared by magnetron sputtering using Kr and Xe instead of Ar2014

    • Author(s)
      Tetsuya Goto, Shigetoshi Sugawa and Tadahiro Ohmi
    • Journal Title

      Journal of the Society for Information Display

      Volume: 印刷中

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Impact of the Use of Xe on Electrical Properties in Magnetron-Sputtering Deposited Amorphous InGaZnO Thin-Film Transistors2013

    • Author(s)
      Tetsuya Goto, Shigetoshi Sugawa and Tadahiro Ohmi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 52 Issue: 5R Pages: 50203-50203

    • DOI

      10.7567/jjap.52.050203

    • Related Report
      2013 Annual Research Report 2013 Final Research Report 2012 Research-status Report
    • Peer Reviewed
  • [Presentation] Impact of the Use of Xe and Its Recycling System for Preparing Amorphous InGaZnO Thin Film Transistors by Dual-Target Rotation Magnet Sputtering2013

    • Author(s)
      T. Goto, H. Ishii, S. Sugawa, and T. Ohmi
    • Organizer
      The Twelfth International Symposium on Sputtering and Plasma Processes (ISSP 2013)
    • Place of Presentation
      Kyoto
    • Year and Date
      2013-07-10
    • Related Report
      2013 Final Research Report
  • [Presentation] Electrical Properties of Amorphous InGaZnO Thin-Film Transistors Prepared by Magnetron Sputtering with Using Kr and Xe Instead of Ar2013

    • Author(s)
      T. Goto, H. Ishii, S. Sugawa, and T. Ohmi
    • Organizer
      Society for Information Display International Symposium 2013
    • Place of Presentation
      Vancouver, Canada
    • Year and Date
      2013-05-23
    • Related Report
      2013 Final Research Report
  • [Presentation] Spatial Distribution of Properties of a-IGZO Films Deposited by Rotation Magnet Sputtering Incorporating Dual Target Structure2012

    • Author(s)
      T. Goto, S. Sugawa, T. Ohmi
    • Organizer
      The 19th International Display Workshops (IDW'12), FMC6-3
    • Place of Presentation
      Kyoto
    • Year and Date
      2012-12-06
    • Related Report
      2013 Final Research Report
  • [Presentation] Electrical Properties of Amorphous InGaZnO Thin-Film Transistors Prepared by Magnetron Sputtering Using Kr and Xe Instead of Ar

    • Author(s)
      T. Goto, S. Sugawa and T. Ohmi
    • Organizer
      Society for Information Display International Symposium 2013
    • Place of Presentation
      Canada, Vancouver
    • Related Report
      2013 Annual Research Report
  • [Presentation] Impact of the Use of Xe and Its Recycling System for Preparing Amorphous InGaZnO Thin Film Transistors by Dual-Target Rotation Magnet Sputtering

    • Author(s)
      Tetsuya Goto, Hidekazu Ishii, Shigetoshi Sugawa, and Tadahiro Ohmi
    • Organizer
      The Twelfth International Symposium on Sputtering and Plasma Processes (ISSP 2013)
    • Place of Presentation
      Kyoto
    • Related Report
      2013 Annual Research Report
  • [Presentation] Application of Rotation Magnet Sputtering Technology to a-IGZO Film Depositions

    • Author(s)
      T. Goto, S. Sugawa and T. Ohmi
    • Organizer
      Society for Information Display International Symposium 2014
    • Place of Presentation
      USA, San Diego
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Spatial Distribution of Properties of a-IGZO Films Deposited by Rotation Magnet Sputtering Incorporating Dual Target Structure

    • Author(s)
      Tetsuya Goto, Shigetoshi Sugawa and Tadahiro Ohmi
    • Organizer
      International Display Workshops (IDW’12)
    • Place of Presentation
      Kyoto
    • Related Report
      2012 Research-status Report
  • [Patent(Industrial Property Rights)] 酸化物半導体装置の製造方法2012

    • Inventor(s)
      後藤哲也
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-266753
    • Filing Date
      2012-12-05
    • Related Report
      2013 Final Research Report

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Published: 2013-05-31   Modified: 2019-07-29  

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