Investigation of optical modulators using optical waveguides with cantilever beam structure

• Project/Area Number: 24760281
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Electron device/Electronic equipment
• Research Institution: Hiroshima University
• Principal Investigator: Yoshiteru Amemiya 広島大学, ナノデバイス・バイオ融合科学研究所, 特任助教 (20448260)
• Project Period (FY): 2012-04-01 – 2016-03-31
• Project Status: Completed (Fiscal Year 2015)
• Budget Amount: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000); Fiscal Year 2014: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000); Fiscal Year 2013: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000); Fiscal Year 2012: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
• Keywords: 光変調素子 / マイクロ・ナノデバイス / マクロ・ナノデバイス

Outline of Final Research Achievements

Optical waveguides with a beam structure was fabricated. The beam structure is the slot structure arranged in vertical direction at the center of the waveguide where silicon nitride and silicon oxide layers are multi-layered. Ring resonator type device was formed using these waveguides and the performance for bio-sensor was evaluated. It was confirmed that detection sensitivity of the solution concentration is comparable to the level necessary for the diagnosis of tumor markers.
The ring resonator optical modulator using silicon slot waveguides with a beam structure was proposed. The low operation voltage of less than 0.5 V was estimated by simulation. The fabrication process for the device with the desired structure was established and optical modulation was confirmed using the fabricated device. The operation voltage was high compared with the simulation. The origin of high voltage will be searched and the further improvement of operation performance will be aimed in the future.

Research Products

• [Journal Article] Design and characterization of MEMS optical devices using slot-ring resonator for low-voltage operation (2016)
  • Author(s): Yoshiteru Amemiya, Kazuki Noda, Takuma Sennichi, and Shin Yokoyama
  • Journal Title: Japanese Journal of Applied Physics Volume: 55 Issue: 4S Pages: 04EC15-04EC15
  • DOI: 10.7567/jjap.55.04ec15
  • NAID: 210000146295
  • Peer Reviewed / Acknowledgement Compliant
• [Presentation] MEMS Optical Switches Using Slot Ring Resonator for Low Voltage Operation (2015)
  • Author(s): Yoshiteru Amemiya, Kazuki Noda, Takuma Sennichi, and Shin Yokoyama
  • Organizer: 2015 International Conference on Solid State Devices and Materials (SSDM 2015)
  • Place of Presentation: 北海道札幌市
  • Year and Date: 2015-09-27
  • Int'l Joint Research
• [Presentation] 狭間隔スロットリング共振器型MEMS光学素子の検討 (2015)
  • Author(s): 雨宮 嘉照，岡田 一也，本澤 圭太， 野田 和希，千日 拓馬，福山 正隆，横山 新
  • Organizer: 第62回応用物理学会春季学術講演会
  • Place of Presentation: 神奈川県平塚市東海大学
  • Year and Date: 2015-03-11 – 2015-03-14
• [Presentation] 梁構造付加スロットリング共振器型光学素子の改善 (2014)
  • Author(s): 雨宮 嘉照，サナ アムリタ クマル， 岡田 一也，本澤 圭太，野田 和希，千日 拓馬，福山 正隆，横山 新
  • Organizer: 第75回応用物理学会秋季学術講演会
  • Place of Presentation: 北海道札幌市北海道大学
  • Year and Date: 2014-09-17 – 2014-09-20
• [Presentation] Proposal of MEMS Optical Device Using Slot-Ring Resonator with Low-Voltage Operation (2014)
  • Author(s): Y. Amemiya, S. Amrita Kumar, K. Okada, H. Keita, M. Fukuyama and S. Yokoyama
  • Organizer: 11th Int. Conf. on Group IV Photonics 2014
  • Place of Presentation: Cite Internationale Universitare de Paris,Paris, France
  • Year and Date: 2014-08-27 – 2014-08-29
• [Presentation] 梁構造付加リング共振器型光学素子の検討 (2014)
  • Author(s): 雨宮嘉照，サナアムリタクマル，原田 祥典，岡田 一也，本澤 圭太，福山 正隆，横山 新
  • Organizer: 第61回応用物理学会春季学術講演会
  • Place of Presentation: 神奈川県相模原市青山学院大学
• [Presentation] Multi-slot stack-type ring resonator for high sensitivity biosensor and low voltage optical modulator (2013)
  • Author(s): Yoshiteru Amemiya, Tomoya Taniguchi, Takeshi Ikeda, Masataka Fukuyama, Akio Kuroda, and Shin Yokoyama
  • Organizer: 10th International Conference on Group IV Photonics
  • Place of Presentation: Grand Hilton Seoul, Seoul, Korea (South)
• [Presentation] 梁構造付加シリコン光変調素子の検討 (2013)
  • Author(s): 雨宮嘉照，サナアムリタクマル，原田 祥典，岡田 一也，本澤 圭太，福山 正隆，横山 新
  • Organizer: 第74回応用物理学会秋季学術講演会
  • Place of Presentation: 京都府京田辺市同志社大学
• [Presentation] スタック型多重スロットバイオセンサの特性 (2013)
  • Author(s): 雨宮嘉照，谷口智哉，坂元崇宣，池田丈，福山正隆，黒田章夫，横山新
  • Organizer: 第60回応用物理学会春季学術講演会
  • Place of Presentation: 神奈川県厚木市神奈川工科大学
• [Presentation] スタック型マルチスロットバイオセンサの研究 (2012)
  • Author(s): 雨宮嘉照，谷口智哉，坂元崇宣，池田丈，福山正隆，黒田章夫，横山新
  • Organizer: 第73回応用物理学会秋季学術講演会
  • Place of Presentation: 香川県松山市愛媛大学松山大学
• [Presentation] High Sensitive Biosensors with Slot and Stack-Type Structure using Silicon Nitride Waveguides (2012)
  • Author(s): Y. Amemiya, A. Hirowatari, T. Taniguchi, T. Ikeda, M. Fukuyama, A. Kuroda and S. Yokoyama
  • Organizer: International Conference on Solid State Devices and Materials 2012
  • Place of Presentation: Kyoto International Conference Center, Kyoto, Japan