| Project/Area Number |
24760282
|
|---|
| Research Category |
Grant-in-Aid for Young Scientists (B)
|
| Allocation Type | Multi-year Fund |
|---|
| Research Field |
Electron device/Electronic equipment
|
|---|
| Research Institution | Okayama Prefectural University |
|---|
Principal Investigator |
|
|---|
| Co-Investigator(Renkei-kenkyūsha) |
UTSUMI Yuichi 兵庫県立大学, 高度産業科学技術研究所, 教授 (80326298)
|
|---|
| Project Period (FY) |
2012-04-01 – 2014-03-31
|
| Project Status |
Completed (Fiscal Year 2013)
|
| Budget Amount *help |
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2013: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2012: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
|
|---|
| Keywords | ミリ波 / 導波管 / 放射光 / 放射光エッチング / マイクロデバイス / スパッタ蒸着 / 導波管フィルタ / X線リソグラフィ / 短ミリ波 / テフロン導波管 / 微細加工 / 電解めっき |
|---|
| Research Abstract |
In this study, the PTFE microstructures were fabricated by direct exposure to synchrotron radiation, and the waveguide components for short millimeter-wave frequencies (G-band, 140-220 ) were obtained by sputter deposition of metal on the PTFE surface, for the purpose of establishing the fabrication technology which could apply directly to submillimeter-wave region (300GHz>).
Then, the frequency tripler and the detector were used to equip a G-band measurement system, and the transmission losses were evaluated. It was confirmed that the fabricated structures worked as waveguide. Next, the trial fabrication of the filter circuits was performed at a center frequency 180 GHz. The passband characteristics of the filter were confirmed by the measurement. The present fabrication process for the short millimeter-wave frequencies was validated.
|
