| Budget Amount *help |
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2013: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2012: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
|
|---|
| Research Abstract |
The current micro/nanoelectromechanical system (MEMS/NEMS) switches based on silicon technologies are suffering from problems of stiction, abrasion, and poor mechanical/tribological properties, not able to work under extreme conditions such as high temperature,environments with corrosive chemicals, and high-speed/high-power radio-frequency switches, etc. Diamond is the ideal material for high-performance MEMS devices dthe highest hardness, hydrophobic surface due to its outstanding properties such as extremely high Young's modulus,the highest hardness,hydrophobic surface,low mass density,the highest thermal conductivity,high corrosion resistance upon caustic chemicals, and biocompatibility. In this project, we demonstrated high-performance all-single crystal diamond NEMS switches with well-controlled dimensions.The developed NEMS switches exhibit no stiction, high controllability,high reproducibility, high-temperature stability above 500 K,and repeated switching.
|
