The creation of single crystal diamond MEMS/NEMS switch
| Project/Area Number |
24760285
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Multi-year Fund |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | National Institute for Materials Science |
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Principal Investigator |
LIAO MEIYONG 独立行政法人物質・材料研究機構, 光・電子材料ユニット, 主任研究員 (70528950)
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| Project Period (FY) |
2012-04-01 – 2014-03-31
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| Project Status |
Completed (Fiscal Year 2013)
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| Budget Amount *help |
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2013: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2012: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
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| Keywords | MEMS・NEMS / マイクロマシン / ダイヤモンド |
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| Research Abstract |
The current micro/nanoelectromechanical system (MEMS/NEMS) switches based on silicon technologies are suffering from problems of stiction, abrasion, and poor mechanical/tribological properties, not able to work under extreme conditions such as high temperature,environments with corrosive chemicals, and high-speed/high-power radio-frequency switches, etc. Diamond is the ideal material for high-performance MEMS devices dthe highest hardness, hydrophobic surface due to its outstanding properties such as extremely high Young's modulus,the highest hardness,hydrophobic surface,low mass density,the highest thermal conductivity,high corrosion resistance upon caustic chemicals, and biocompatibility. In this project, we demonstrated high-performance all-single crystal diamond NEMS switches with well-controlled dimensions.The developed NEMS switches exhibit no stiction, high controllability,high reproducibility, high-temperature stability above 500 K,and repeated switching.
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Report
(3 results)
Research Products
(22 results)
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[Presentation] Diamond MEMS2013
Author(s)
Meiyong Liao, Yasuo Koide
Organizer
The 9^<th> IUPAC International Symposium on Novel Materials and Their Synthesis
Place of Presentation
Shanghai, China
Related Report
Invited
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[Presentation] Diamond MEMS2012
Author(s)
Meiyong Liao, S. Hishita, S. Koizumi, M. Imura, Y. Koide
Organizer
Nanothailand 2012
Place of Presentation
Thailand, Konkon
Related Report
Invited
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