Development of Thermo-Mechanical Sensor as Optical Power Standard with Fast Response and High Sensitivity at Room Temperature
| Project/Area Number |
24760326
|
|---|
| Research Category |
Grant-in-Aid for Young Scientists (B)
|
| Allocation Type | Multi-year Fund |
|---|
| Research Field |
Measurement engineering
|
|---|
| Research Institution | National Institute of Advanced Industrial Science and Technology |
|---|
Principal Investigator |
AMEMIYA Kuniaki 独立行政法人産業技術総合研究所, 計測標準研究部門, 主任研究員 (60361531)
|
|---|
| Project Period (FY) |
2012-04-01 – 2014-03-31
|
| Project Status |
Completed (Fiscal Year 2013)
|
| Budget Amount *help |
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2013: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2012: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
|
|---|
| Keywords | 計測機器 / 光カロリメータ / バイメタル / MEMS / 高速高感度 / 光吸収体 / レーザパワー / 計測標準 |
|---|
| Research Abstract |
The design and fabrication of a bimetal calorimeter was investigated as a high-speed and high-sensitivity photo thermal detector. Using finite element method, the thermo-mechanical properties of large-size bimetal sensors of up to several mm-square sensitive area were simulated. Several designs were found to have noise equivalent power (NEP) and time constant of one order smaller than that of conventional thermo module type optical calorimeter with similar sensitive area. Experimental results for the first prototype of the bimetal sensors also supported those theoretical predictions. Besides, the mechanism of the ultra low reflectance of a micro-cavity type optical absorber was also investigated, which lead to the development of a novel broadband optical absorber. These will be expected to provide high throughput spectral absolute optical power measurement.
|
Report
(3 results)
Research Products
(13 results)
