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Development of Thermo-Mechanical Sensor as Optical Power Standard with Fast Response and High Sensitivity at Room Temperature

Research Project

Project/Area Number 24760326
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Measurement engineering
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

AMEMIYA Kuniaki  独立行政法人産業技術総合研究所, 計測標準研究部門, 主任研究員 (60361531)

Project Period (FY) 2012-04-01 – 2014-03-31
Project Status Completed (Fiscal Year 2013)
Budget Amount *help
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2013: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2012: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Keywords計測機器 / 光カロリメータ / バイメタル / MEMS / 高速高感度 / 光吸収体 / レーザパワー / 計測標準
Research Abstract

The design and fabrication of a bimetal calorimeter was investigated as a high-speed and high-sensitivity photo thermal detector. Using finite element method, the thermo-mechanical properties of large-size bimetal sensors of up to several mm-square sensitive area were simulated. Several designs were found to have noise equivalent power (NEP) and time constant of one order smaller than that of conventional thermo module type optical calorimeter with similar sensitive area. Experimental results for the first prototype of the bimetal sensors also supported those theoretical predictions. Besides, the mechanism of the ultra low reflectance of a micro-cavity type optical absorber was also investigated, which lead to the development of a novel broadband optical absorber. These will be expected to provide high throughput spectral absolute optical power measurement.

Report

(3 results)
  • 2013 Annual Research Report   Final Research Report ( PDF )
  • 2012 Research-status Report
  • Research Products

    (13 results)

All 2014 2013 2012 Other

All Journal Article (1 results) (of which Peer Reviewed: 1 results) Presentation (12 results)

  • [Journal Article] Comprehensive characterization of broadband ultralow reflectance of a porous nickel-phosphorus black surface by numerical simulation2012

    • Author(s)
      雨宮邦招、福田大治、沼田孝之、田辺稔、市野善朗
    • Journal Title

      Appl. Opt.

      Volume: Vol. 51、No. 29 Issue: 29 Pages: 6917-6925

    • DOI

      10.1364/ao.51.006917

    • Related Report
      2013 Final Research Report 2012 Research-status Report
    • Peer Reviewed
  • [Presentation] Development of Ultra-Low Reflectance Optical Absorber Using Etched Ion Tracks2014

    • Author(s)
      雨宮邦招、越川博、前川康成、沼田孝之、木下健一、蔀洋司、市野善朗、座間達也
    • Organizer
      The 12th International Conference on New Development and Applications in Optical Radiometry (NEWRAD 2014)
    • Place of Presentation
      Dipoli Congress Center in Otaniemi, Espoo(フィンランド)
    • Year and Date
      2014-06-25
    • Related Report
      2013 Final Research Report
  • [Presentation] イオントラックエッチピットを用いた極低反射光吸収体の開発2014

    • Author(s)
      雨宮邦招、越川博、前川康成、沼田孝之、木下健一、蔀洋司、市野善朗、座間達也
    • Organizer
      2014年第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス(神奈川県)
    • Year and Date
      2014-03-17
    • Related Report
      2013 Final Research Report
  • [Presentation] MEMS方式による光カロリメータの高速高感度化の検討II2014

    • Author(s)
      雨宮邦招、座間達也
    • Organizer
      産総研計量標準総合センター2013年度成果発表会
    • Place of Presentation
      産総研つくば中央(茨城県)
    • Year and Date
      2014-01-23
    • Related Report
      2013 Final Research Report
  • [Presentation] イオントラックエッチピットを用いた極低反射光吸収体の開発2014

    • Author(s)
      雨宮 邦招、越川 博、前川 康成、沼田 孝之、木下 健一、蔀 洋司、市野 善朗、座間 達也
    • Organizer
      2014年 第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス
    • Related Report
      2013 Annual Research Report
  • [Presentation] MEMS方式による光カロリメータの高速高感度化の検討II2014

    • Author(s)
      雨宮 邦招、座間 達也
    • Organizer
      産総研計量標準総合センター2013年度成果発表会
    • Place of Presentation
      産総研つくば中央
    • Related Report
      2013 Annual Research Report
  • [Presentation] Development of Ultra-Low Reflectance Optical Absorber Using Etched Ion Tracks2014

    • Author(s)
      Kuniaki Amemiya, Hiroshi Koshikawa, Yasunari Maekawa, Takayuki Numata, Kenichi Kinoshita, Hiroshi Shitomi, Yoshiro Ichino, Tatsuya Zama
    • Organizer
      The 12th International Conference on New Developments and Applications in Optical Radiometry (NEWRAD 2014)
    • Place of Presentation
      Dipoli Congress Center in Otaniemi, Espoo, Finland
    • Related Report
      2013 Annual Research Report
  • [Presentation] 高速高感度光パワー精密計測器としてのMEMS方式カロリメータの検討II2013

    • Author(s)
      雨宮邦招
    • Organizer
      第34回日本熱物性シンポジウム
    • Place of Presentation
      富山県民会館(富山県)
    • Year and Date
      2013-11-20
    • Related Report
      2013 Final Research Report
  • [Presentation] MEMS方式による光カロリメータの高速高感度化の検討2013

    • Author(s)
      雨宮邦招
    • Organizer
      産総研計量標準総合センター2012年度成果発表会
    • Place of Presentation
      産総研つくば中央(茨城県)
    • Year and Date
      2013-01-24
    • Related Report
      2013 Final Research Report
  • [Presentation] 高速高感度光パワー精密計測器としてのMEMS方式カロリメータの検討II2013

    • Author(s)
      雨宮 邦招
    • Organizer
      第34回 日本熱物性シンポジウム
    • Place of Presentation
      富山県民会館
    • Related Report
      2013 Annual Research Report
  • [Presentation] 高速高感度光パワー精密計測器としてのMEMS方式カロリメータの検討2012

    • Author(s)
      雨宮邦招
    • Organizer
      第33回日本熱物性シンポジウム
    • Place of Presentation
      大阪市立大学杉本キャンパス(大阪府)
    • Year and Date
      2012-10-03
    • Related Report
      2013 Final Research Report
  • [Presentation] 高速高感度光パワー精密計測器としてのMEMS方式カロリメータの検討

    • Author(s)
      雨宮 邦招
    • Organizer
      第33回日本熱物性シンポジウム
    • Place of Presentation
      大阪市立大学杉本キャンパス
    • Related Report
      2012 Research-status Report
  • [Presentation] MEMS方式による光カロリメータの高速高感度化の検討

    • Author(s)
      雨宮 邦招
    • Organizer
      産総研計量標準総合センター2012年度成果発表会
    • Place of Presentation
      産総研つくば中央
    • Related Report
      2012 Research-status Report

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Published: 2013-05-31   Modified: 2019-07-29  

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