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Development of calibration technique of image sensors toward realization of imaging power meter for high power lasers

Research Project

Project/Area Number 24760327
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Measurement engineering
Research InstitutionNational Institute of Advanced Industrial Science and Technology

Principal Investigator

NUMATA TAKAYUKI  独立行政法人産業技術総合研究所, 計測標準研究部門, 主任研究員 (60420288)

Project Period (FY) 2012-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2013: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2012: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Keywordsレーザ / 感度 / プロファイラ / CCD / 近赤外 / 高出力 / 光減衰器 / 均一性 / パワーメータ / CMOS / 減衰器 / パワー密度 / 校正 / ビームプロファイラ / ビーム診断 / ビームサイズ / イメージセンサ / レーザーパワー
Outline of Final Research Achievements

Responsivity evaluation technique of CCD image sensors and an optical attenuation method applicable for high power lasers were developed to realize an image sensor-based laser power meter. Investigation of pixel to pixel uniformity of responsivity of Si-CCD sensors revealed strong dependence on exposure time and laser wavelength. Proposed optical attenuator utilizing re-coupling of evanescent wave allowed attenuation of 10 W, φ3 mm laser beam down below -70 dB being easily controllable with the gap between two prisms. Incident beam profile was saved through the strong attenuation process. The attenuator and sensitivity-evaluated CCD were assembled to construct the imaging power meter and applied to laser power measurement.

Report

(5 results)
  • 2014 Annual Research Report   Final Research Report ( PDF )
  • 2013 Research-status Report
  • 2012 Research-status Report
  • Products Report
  • Research Products

    (11 results)

All 2019 2018 2017 2014 2013

All Journal Article (2 results) Presentation (6 results) Patent(Industrial Property Rights) (3 results) (of which Overseas: 1 results)

  • [Journal Article] Characterization of CCD detectors for Laser Power Measurement2014

    • Author(s)
      Takayuki Numata
    • Journal Title

      Proceedings of NEWRAD 2014

      Volume: 2014 Pages: 279-280

    • Related Report
      2013 Research-status Report
  • [Journal Article] Towards Realization of Imaging Power Meter ~Radiometric calibration of CCD camera based beam profilers~2013

    • Author(s)
      Takayuki Numata
    • Journal Title

      Proceedings of LAMP 2013

      Volume: #13-094: A058 Pages: 1-4

    • Related Report
      2013 Research-status Report
  • [Presentation] 近赤外波長におけるビーム診断用イメージセンサの感度不均一性2014

    • Author(s)
      沼田 孝之、田辺 稔、雨宮 邦招、福田 大治
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学
    • Year and Date
      2014-09-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] Characterization of CCD Detectors for Laser Power Measurement2014

    • Author(s)
      Takayuki Numata, Minoru Tanabe, Kuniaki Amemiya, Daiji Fukuda, Tatsuya Zama
    • Organizer
      NEWRAD2014 (The 12th International Conference on New Developments and Applications in Optical Radiometry)
    • Place of Presentation
      ヘルシンキ・フィンランド
    • Related Report
      2013 Research-status Report
  • [Presentation] 産総研における高出力レベルレーザ標準の研究展開2014

    • Author(s)
      沼田孝之
    • Organizer
      第9回計量標準総合センター光放射計測クラブ
    • Place of Presentation
      東京・日本
    • Related Report
      2013 Research-status Report
  • [Presentation] CCD型ビームプロファイラにおける近赤外レーザ光の検出感度特性2014

    • Author(s)
      沼田孝之
    • Organizer
      NMIJ2013年度成果発表会
    • Place of Presentation
      茨城・日本
    • Related Report
      2013 Research-status Report
  • [Presentation] Towards Realization of Imaging Power Meter ~Radiometric calibration of CCD camera beam profilers~2013

    • Author(s)
      Takayuki Numata
    • Organizer
      LAMP2013 (The 6th International Congress on Laser Advanced Materials Processing)
    • Place of Presentation
      新潟・日本
    • Related Report
      2013 Research-status Report
  • [Presentation] Towards Realization of Imaging Power Meter ~ Radiometric Caribration of CCD Camera Beam Profilers ~2013

    • Author(s)
      Takayuki Numata
    • Organizer
      The 6th International Congress on Laser Advanced Material Processing
    • Place of Presentation
      Niigata, Japan
    • Related Report
      2012 Research-status Report
  • [Patent(Industrial Property Rights)] レーザ光減衰器の製造装置、この製造装置により製造されたレーザ光減衰器及びこのレーザ光減衰器の製造方法2019

    • Inventor(s)
      沼田 孝之
    • Industrial Property Rights Holder
      産業技術総合研究所
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2018-564600
    • Filing Date
      2019
    • Related Report
      Products Report
  • [Patent(Industrial Property Rights)] レーザ光減衰器の製造装置、この製造装置により製造されたレーザ光減衰器及びこのレーザ光減衰器の製造方法2018

    • Inventor(s)
      沼田 孝之
    • Industrial Property Rights Holder
      産業技術総合研究所
    • Industrial Property Rights Type
      特許
    • Filing Date
      2018
    • Related Report
      Products Report
    • Overseas
  • [Patent(Industrial Property Rights)] レーザ光減衰器の製造装置、この製造装置により製造されたレーザ光減衰器及びこのレーザ光減衰器の製造方法2017

    • Inventor(s)
      沼田 孝之
    • Industrial Property Rights Holder
      産業技術総合研究所
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2017-012500
    • Filing Date
      2017-01-26
    • Related Report
      Products Report

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Published: 2013-05-31   Modified: 2020-07-03  

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