Study on three-dimensional microfabrication using proton beam writing

• Project/Area Number: 24760723
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Multi-year Fund
• Research Field: Nuclear engineering
• Research Institution: Japan Atomic Energy Agency
• Principal Investigator: OHKUBO Takeru 独立行政法人日本原子力研究開発機構, 原子力科学研究部門・高崎量子応用研究所・放射線高度利用施設部, 研究職 (40446456)
• Project Period (FY): 2012-04-01 – 2015-03-31
• Project Status: Completed (Fiscal Year 2014)
• Budget Amount: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2014: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2013: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2012: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
• Keywords: イオンビーム / マイクロビーム / プロトンビーム / 加速レンズ / PBW / ナノビーム / ３次元加工 / 量子ビーム

Outline of Final Research Achievements

A compact focused gaseous ion beam system (gas-FIB) has been developed to form proton microbeams of a few hundreds of keV with a penetration depth of micrometer range in 3D proton beam writing. Proton microbeams with kinetic energies of 100-140 keV were experimentally formed. The experimental results indicate that the beam diameters were measured at the same point to be almost constant at approximately 6 μm with the kinetic energy range at a constant ratio of the kinetic energy of the object side to that of the image side. In addition, these characteristics of the system were also numerically demonstrated in a kinetic energy range of 100-1000 keV to be maintained as long as the ratio was constant. It was concluded that the gas-FIB has feasibility as a tool for 3D proton beam writing.

Research Products

• [Journal Article] Proton microbeam formation with continuously variable kinetic energy using a compact system for three-dimensional proton beam writing (2015)
  • Author(s): T. Ohkubo and Y. Ishii
  • Journal Title: Review of Scientific Instruments Volume: 86 Issue: 3 Pages: 036102-036102
  • DOI: 10.1063/1.4915319
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Preliminary study on development of 300 Kv compact focused gaseous ion beam system (2013)
  • Author(s): T. Ohkubo, Y. Ishii, Y. Miyake, and T. Kamiya
  • Journal Title: AIP Coference Proceedings Volume: AIP Conf. Proc. 1525 Pages: 370-374
  • DOI: 10.1063/1.4802353
  • Peer Reviewed
• [Presentation] 小型マイクロビーム装置で形成されるプロトンビーム径の縮小化 (2014)
  • Author(s): 大久保猛、石井保行
  • Organizer: 日本原子力学会2014年秋の大会
  • Place of Presentation: 京都大学吉田キャンパス（京都府京都市）
  • Year and Date: 2014-09-08 – 2014-09-10
• [Presentation] Preliminary study on formation of proton microbeam with continuously variable kinetic energy for 3-Dimensional proton lithography (2014)
  • Author(s): T. Ohkubo, Y. Ishii and T. Kamiya
  • Organizer: 23rd International Conference on the Application of Accelerators in Research and Industry (CAARI 2014)
  • Place of Presentation: Grand Hyatt San Antonio（米国テキサス州サンアントニオ）
  • Year and Date: 2014-05-25 – 2014-05-30
• [Presentation] 300kV単ギャップ加速レンズを用いたイオンナノビーム形成小型装置開発
  • Author(s): 大久保 猛、石井 保行、齋藤 勇一
  • Organizer: 日本原子力学会2013年秋の大会
  • Place of Presentation: 八戸工業大学
• [Presentation] Preliminary Study On Development Of 300 kV Compact Focused Gaseous Ion Beam System
  • Author(s): T. Ohkubo, Y. Ishii, Y. Miyake and T. Kamiya
  • Organizer: 22nd International Conference on the Application of Accelerators in Research and Industry (CAARI2012)
  • Place of Presentation: Fort Worth, Texas, USA
• [Presentation] 300kV小型加速レンズ装置によるガスイオンビーム集束
  • Author(s): 大久保猛、石井保行、神谷富裕
  • Organizer: 日本原子力学会2012年秋の大会
  • Place of Presentation: 広島大学東広島キャンパス
• [Presentation] 300kV小型加速レンズ装置によるエネルギー連続可変ガスイオン集束ビーム
  • Author(s): 大久保猛、石井保行、神谷富裕
  • Organizer: 日本原子力学会2013年春の年会
  • Place of Presentation: 近畿大学東大阪キャンパス