超音速分子線照射による遷移金属材料に対する原子層エッチング表面反応機構の解明

• Project/Area Number: 24K08246
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 29020:Thin film/surface and interfacial physical properties-related
• Research Institution: Osaka University
• Principal Investigator: 伊藤 智子 大阪大学, 大学院工学研究科, 助教 (10724784)
• Project Period (FY): 2024-04-01 – 2027-03-31
• Project Status: Declined (Fiscal Year 2024)
• Budget Amount: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2026: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2025: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2024: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)