プラズマ支援原子層プロセスの表面反応解析

• Project/Area Number: 24KF0241
• Research Category: Grant-in-Aid for JSPS Fellows
• Allocation Type: Multi-year Fund
• Section: 外国
• Review Section: Basic Section 14030:Applied plasma science-related
• Research Institution: Osaka University
• Principal Investigator: 吉村 智 大阪大学, 大学院工学研究科, 准教授 (40294029)
• Co-Investigator(Kenkyū-buntansha): SPISKE LUCAS
• Project Period (FY): 2024-11-15 – 2027-03-31
• Project Status: Adopted (Fiscal Year 2024)
• Budget Amount: ¥2,000,000 (Direct Cost: ¥2,000,000); Fiscal Year 2026: ¥500,000 (Direct Cost: ¥500,000); Fiscal Year 2025: ¥1,100,000 (Direct Cost: ¥1,100,000); Fiscal Year 2024: ¥400,000 (Direct Cost: ¥400,000)