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Femto watt thermal sensor

Research Project

Project/Area Number 25246031
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field General applied physics
Research InstitutionTohoku University

Principal Investigator

Ono Takahito  東北大学, 工学(系)研究科(研究院), 教授 (90282095)

Co-Investigator(Kenkyū-buntansha) Toda Masaya  東北大学, 大学院工学研究科, 准教授 (40509890)
Kawai Yusuke  東北大学, 大学院工学研究科, 助教 (20451536)
Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥46,280,000 (Direct Cost: ¥35,600,000、Indirect Cost: ¥10,680,000)
Fiscal Year 2015: ¥12,740,000 (Direct Cost: ¥9,800,000、Indirect Cost: ¥2,940,000)
Fiscal Year 2014: ¥14,950,000 (Direct Cost: ¥11,500,000、Indirect Cost: ¥3,450,000)
Fiscal Year 2013: ¥18,590,000 (Direct Cost: ¥14,300,000、Indirect Cost: ¥4,290,000)
Keywords熱量センサ / 振動子 / 細胞 / マイクロチャンネル / サーミスタ / pn接合 / 温度センサ / マイクロセンサ / マイクロシステム
Outline of Final Research Achievements

Thermal sensors for the detection of tiny heat from a single biological cell in a solution have been developed using a microfabrication technique. This sensor utilizes the temperature dependence of the mechanical resonance, and heat transmits to the sensor by thermal conduction via a heat guide. The resonant sensor is thermally isolated from surronding area using vacuum isolation, thus the thermal loss is minimized. Scaling down of the sensor decreases the thermal capasitance of the sensor, which enhance the temperature response. Heat detection from a single cell is demonstrated using the developed thermal sensor.

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • Research Products

    (38 results)

All 2016 2015 2014 2013 Other

All Journal Article (16 results) (of which Peer Reviewed: 16 results,  Acknowledgement Compliant: 12 results) Presentation (22 results) (of which Int'l Joint Research: 5 results,  Invited: 3 results)

  • [Journal Article] High Aspect Ratio SiO<sub>2</sub> Pillar Structures Capable of the Integration of an Image Sensor for Application of Optical Modulator2016

    • Author(s)
      N.V. Toan, Suguru Sangu, Takahito Ono
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 136 Issue: 2 Pages: 41-42

    • DOI

      10.1541/ieejsmas.136.41

    • NAID

      130005122063

    • ISSN
      1341-8939, 1347-5525
    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Sensitive thermal microsensor with pn junction for heat measurement of a single cell2016

    • Author(s)
      Taito Yamada, Naoki Inomata, and Takahito Ono
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 2 Pages: 027001-027001

    • DOI

      10.7567/jjap.55.027001

    • NAID

      210000146044

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Temperature-depended mechanical properties of microfabricated vanadium oxide mechanical resonators for thermal sensing2016

    • Author(s)
      N. Inomata, L. Pan, M. Toda, and T. Ono
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 3 Pages: 037201-037201

    • DOI

      10.7567/jjap.55.037201

    • NAID

      210000146154

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] ulse-Reverse Electrodeposition and Micromachining of Graphene-Nickel Composite: An Efficient Strategy toward High-Performance Microsystem Application2016

    • Author(s)
      Junhua Li, Zhonglie An, Zhuqing Wang, Masaya Toda, and Takahito Ono
    • Journal Title

      Applied Materials & Interfaces

      Volume: 8 Issue: 6 Pages: 3969-3976

    • DOI

      10.1021/acsami.5b11164

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] An Investigation of Processes for Glass Micromachining2016

    • Author(s)
      Nguyen Van Toan, Masaya Toda, and Takahito Ono
    • Journal Title

      Micromachines

      Volume: 7 Issue: 3 Pages: 1-12

    • DOI

      10.3390/mi7030051

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Microstructuring of carbon nanotubes-nickel nanocomposite2015

    • Author(s)
      Zhonglie An, Liang He, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, and Takahito Ono
    • Journal Title

      Nanotechnology

      Volume: 26 Issue: 19 Pages: 195601-195601

    • DOI

      10.1088/0957-4484/26/19/195601

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Chip-Level Microassembly of XYZ-Microstage with Large Displacements2015

    • Author(s)
      Gaopeng Xue, Masaya Toda, Takahito Ono
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 135 Issue: 6 Pages: 236-237

    • DOI

      10.1541/ieejsmas.135.236

    • NAID

      130005072486

    • ISSN
      1341-8939, 1347-5525
    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Impact of thermal contact resistances on micro-gap heat losses for microthermionic power generators2015

    • Author(s)
      Remi Yacine Belbachir, Zhonglie An, and Takahito Ono
    • Journal Title

      Microsystem Technologies

      Volume: 15 Pages: 1-10

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Fabrication of nano-gap strcutrues based on plastic deformation of strained Si springs by stiction effects2015

    • Author(s)
      Masaya Toda, Atsushi Yokoyama, Nguyen Van Toan, Naoki Inomata, and Takahito Ono
    • Journal Title

      Microsystem Technologies

      Volume: 21 Issue: 3 Pages: 649-654

    • DOI

      10.1007/s00542-014-2182-z

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Synchronized micromechanical resonators with a nonlinear coupling element2014

    • Author(s)
      Takahito Ono, Keitaro Tanno, and Yusuke Kawai
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 24 Issue: 2 Pages: 025012-025012

    • DOI

      10.1088/0960-1317/24/2/025012

    • Related Report
      2014 Annual Research Report 2013 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] A Long Bar Type Silicon Resonator with a High Quality Factor2014

    • Author(s)
      Nguyen Van Toan, Masaya Toda, Yusuke kawai, and Takahito Ono
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 134 Issue: 2 Pages: 26-31

    • DOI

      10.1541/ieejsmas.134.26

    • NAID

      130003391578

    • ISSN
      1341-8939, 1347-5525
    • Related Report
      2014 Annual Research Report 2013 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] A capacitive silicon resonator with a movable electrode structure for gap width reduction2014

    • Author(s)
      Nguyen Van Toan, Masaya Toda, Yusuke kawai, and Takahito Ono
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 24 Issue: 2 Pages: 025006-025006

    • DOI

      10.1088/0960-1317/24/2/025006

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Nonlinear Coupled Silicon Resonator with Binary Vibration2014

    • Author(s)
      三井陽介,小野崇人
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 134 Issue: 8 Pages: 270-275

    • DOI

      10.1541/ieejsmas.134.270

    • NAID

      130004677817

    • ISSN
      1341-8939, 1347-5525
    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Synthesis and Characterization of Carbon Nanotube-Cu Composite using Supercritical Fluid Deposition2014

    • Author(s)
      Zhongle An, Masaya Toda, and Takahito Ono
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 134 Issue: 2 Pages: 38-39

    • DOI

      10.1541/ieejsmas.134.38

    • NAID

      130003391580

    • ISSN
      1341-8939, 1347-5525
    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis2013

    • Author(s)
      L. He, M. Toda, Y. Kawai, H. Miyashita, M. Omori, T. Hashida, R. Berger, T. Ono
    • Journal Title

      Microsystem Technologies

      Volume: (online) Issue: 2 Pages: 201-208

    • DOI

      10.1007/s00542-013-1771-6

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Thermal sensor probe with a Si resonator in a cavity for thermal insulator2013

    • Author(s)
      Naoki Inomata and Takahito Ono
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 52 Issue: 11R Pages: 117201-117201

    • DOI

      10.7567/jjap.52.117201

    • NAID

      40019883606

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Presentation] Microfabricated vanadium oxide resonant thermal sensor with a high temeperature coefficient of resonant frequency2016

    • Author(s)
      Naoki Inomata, Libao Pan, Masaya Toda, and Takahito Ono
    • Organizer
      The 29th IEEE International Conference on Micro Electro Mechanical Systems
    • Place of Presentation
      新潟 朱鷺メッセ
    • Year and Date
      2016-01-24
    • Related Report
      2015 Annual Research Report
  • [Presentation] Zhonglie An and Takahito Ono, Electrodeposition of Copper Nanocomposite with High Content of Carbon Nanotube2015

    • Author(s)
      Zhonglie An and Takahito Ono
    • Organizer
      センサ・マイクロマシンと応用システムシンポジウム
    • Place of Presentation
      新潟 朱鷺メッセ
    • Year and Date
      2015-10-27
    • Related Report
      2015 Annual Research Report
  • [Presentation] 酸化バナジウムを用いた共振型マイクロ熱量センサ2015

    • Author(s)
      猪股直生,潘立葆,戸田雅也,小野崇人
    • Organizer
      センサ・マイクロマシンと応用システムシンポジウム
    • Place of Presentation
      新潟 朱鷺メッセ
    • Year and Date
      2015-10-27
    • Related Report
      2015 Annual Research Report
  • [Presentation] Biosensor using Vox microresistance thermometer2015

    • Author(s)
      Lobao Pan, Takahito Ono, Naoki Inomata, Zhuqing Wang, Mitsuteru Kimura
    • Organizer
      センサ・マイクロマシンと応用システムシンポジウム
    • Place of Presentation
      新潟 朱鷺メッセ
    • Year and Date
      2015-10-27
    • Related Report
      2015 Annual Research Report
  • [Presentation] 単一細胞熱計測のためのpnダイオード型マイクロ熱センサ2015

    • Author(s)
      山田泰斗,猪股直生,小野崇人
    • Organizer
      センサ・マイクロマシンと応用システムシンポジウム
    • Place of Presentation
      新潟 朱鷺メッセ
    • Year and Date
      2015-10-27
    • Related Report
      2015 Annual Research Report
  • [Presentation] Pulse Reverse electrodeposition of Nickel-Graphene Composite Thin Film with Enhanced Mechanical Properties2015

    • Author(s)
      Jinhua Li, Zhonglie An and Takahito Ono
    • Organizer
      The 6th Japan-Chine-Korea MEMS/NEMS Conference
    • Place of Presentation
      Xi’an Jaotong University, China
    • Year and Date
      2015-09-23
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Synthesis of Cu composite thin film with positively charged carbon nanotubes2015

    • Author(s)
      Zhonglie An and Takahito Ono
    • Organizer
      The 6th Japan-Chine-Korea MEMS/NEMS Conference
    • Place of Presentation
      Xi’an Jaotong University, China
    • Year and Date
      2015-09-23
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Electrodeposition of chitosan thin film in completely packaged microfluidic for thermocouple calorimetric biosensor2015

    • Author(s)
      Zhuqing Wang, Mitsuteru Kimura and Takahito Ono
    • Organizer
      The 6th Japan-Chine-Korea MEMS/NEMS Conference
    • Place of Presentation
      Xi’an Jaotong University, China
    • Year and Date
      2015-09-23
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Resonant Micro/Nanomechanical Si Sensors for Ultimate Detection2015

    • Author(s)
      Takahito Ono
    • Organizer
      Microsystems & Nanoengineering Summit
    • Place of Presentation
      Beijing China
    • Year and Date
      2015-08-02
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Si-based micro-nanomechanics for ultimate sensing2015

    • Author(s)
      Takahito Ono, Masaya toda, Yong-Jun Seo, Naoki Inomata
    • Organizer
      Electrochemical Society (ECS) spring sympojium
    • Place of Presentation
      Chicago, Ilinois, USA
    • Year and Date
      2015-05-24
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Synthesis of Carbon Nanotube-Ni Composite for Micromechanical Elements Application2015

    • Author(s)
      Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, and Takahito Ono
    • Organizer
      The 28th IEEE International Conference on Micro Electro Mechanical Systems
    • Place of Presentation
      Estoril, Portugal
    • Year and Date
      2015-01-18 – 2015-01-22
    • Related Report
      2014 Annual Research Report
  • [Presentation] Highly Sensitive Thermal Micro Sensor with PN Junction for Thermal Measurements of a Single Cell2014

    • Author(s)
      Taito Yamada, Nanoki Inomata, and Takahito Ono
    • Organizer
      27th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      ヒルトンホテル、福岡、日本
    • Year and Date
      2014-11-04 – 2014-11-07
    • Related Report
      2014 Annual Research Report
  • [Presentation] Shytheisis and Characterization of Carbon Nanotube-Nickel Composite with High Content of Carbon Nanotubes2014

    • Author(s)
      Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, and Takahito Ono
    • Organizer
      The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies
    • Place of Presentation
      Daegu, Korea
    • Year and Date
      2014-06-29 – 2014-07-02
    • Related Report
      2014 Annual Research Report
  • [Presentation] Low-voltage Driven Nano Electro Mechanical Switches2014

    • Author(s)
      Hiro Iisuka and Takahito Ono
    • Organizer
      The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies
    • Place of Presentation
      Daegu, Korea
    • Year and Date
      2014-06-29 – 2014-07-02
    • Related Report
      2014 Annual Research Report
  • [Presentation] Micro/Nano-mechanical Resonators for Ultimate Sensing,2014

    • Author(s)
      Takahito Ono, Naoki Inomata and Masaya Toda
    • Organizer
      The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies
    • Place of Presentation
      Daegu, Korea
    • Year and Date
      2014-06-29 – 2014-07-02
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Synchronization of stochastic resonance using coupled nonlinear silicon resonators2013

    • Author(s)
      Yosuke Mitsui, Yusuke Kawai, and Takahito Ono
    • Organizer
      The International Conference on Solid State Sensors, Actuators and Microsystems
    • Place of Presentation
      Barcelona, Spain
    • Related Report
      2013 Annual Research Report
  • [Presentation] Silicon Nanowire Probe with Nd-Fe-B magnet for Magnetic Resonance Force Microscopy2013

    • Author(s)
      Yongjun Seo, Masaya Toda, Yusuke Kawai, and Takahito Ono
    • Organizer
      39th International Conference on Micro and Nano Engineering (MNE)
    • Place of Presentation
      英国、ロンドン
    • Related Report
      2013 Annual Research Report
  • [Presentation] Supercritical Fluid Deposition and Characterization of CarbonNanotubes-Cu Composite

    • Author(s)
      Zhonglie An, Masaya Toda, Takahito Ono
    • Organizer
      The 4th Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2013)
    • Place of Presentation
      仙台
    • Related Report
      2013 Annual Research Report
  • [Presentation] Pico-calorimeter using a resonant thermal sensor

    • Author(s)
      Naoki Inomata, Takahito Ono
    • Organizer
      The 4th Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2013)
    • Place of Presentation
      仙台
    • Related Report
      2013 Annual Research Report
  • [Presentation] バイナリ―振動を示す非線形結合シリコン振動子

    • Author(s)
      三井 陽介, 小野 崇人
    • Organizer
      センサ・マイクロマシンと応用システムシンポジウム
    • Place of Presentation
      仙台
    • Related Report
      2013 Annual Research Report
  • [Presentation] A long bar type silicon resonator with a high quality factor

    • Author(s)
      Nguyen Van Toan,Masaya Toda, Yusuke Kawai and Takahito Ono
    • Organizer
      センサ・マイクロマシンと応用システムシンポジウム
    • Place of Presentation
      仙台
    • Related Report
      2013 Annual Research Report
  • [Presentation] A Si nanowire probe with a Nd-Fe-B magnet for force detection

    • Author(s)
      Yongjun Seo, Masaya Toda, Yusuke Kawai, and Takahito Ono
    • Organizer
      センサ・マイクロマシンと応用システムシンポジウム
    • Place of Presentation
      仙台
    • Related Report
      2013 Annual Research Report

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Published: 2013-05-15   Modified: 2019-07-29  

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