Low dislocation diamond wafer for power device
| Project/Area Number |
25249036
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electronic materials/Electric materials
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| Research Institution | Kwansei Gakuin University (2015)
National Institute of Advanced Industrial Science and Technology |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
TOUGE Mutsumi 熊本大学, 先進マグネシウム国際研究センター, 教授 (00107731)
CHAYAHARA Akiyosshi 国立研究開発法人産業技術総合研究所, 先進パワーエレクトロニクスセンター, 上級主任研究員 (10357501)
MOKUNO Yoshiaki 国立研究開発法人産業技術総合研究所, 先進パワーエレクトロニクスセンター, チーム長 (60358166)
UMEZAWA Hitoshi 国立研究開発法人産業技術総合研究所, 先進パワーエレクトロニクスセンター, 主任研究員 (80329135)
KATOU Yukako 国立研究開発法人産業技術総合研究所, 先進パワーエレクトロニクスセンター, 主任研究員 (90509837)
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| Project Period (FY) |
2013-05-31 – 2016-03-31
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| Project Status |
Completed (Fiscal Year 2015)
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| Budget Amount *help |
¥44,460,000 (Direct Cost: ¥34,200,000、Indirect Cost: ¥10,260,000)
Fiscal Year 2015: ¥7,280,000 (Direct Cost: ¥5,600,000、Indirect Cost: ¥1,680,000)
Fiscal Year 2014: ¥20,410,000 (Direct Cost: ¥15,700,000、Indirect Cost: ¥4,710,000)
Fiscal Year 2013: ¥16,770,000 (Direct Cost: ¥12,900,000、Indirect Cost: ¥3,870,000)
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| Keywords | 省エネルギー / パワーデバイス / ダイヤモンド |
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| Outline of Final Research Achievements |
Low dislocation density CVD diamond wafer has been studied toward diamond power device application. The evaluation technique including X ray topography has been developed and applied to HPHT seed and CVD crystal. Using high quality seed crystal of low dislocation density less than 2000cm-2, high quality CVD crystal copying technology with low dislocation density up to 400cm-2 and low distortion of 2x10-5 has been developed associated with sophisticated UV assist polishing and dry etching techniques for the surface treatment prior to the CVD deposition.
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Report
(4 results)
Research Products
(43 results)
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[Presentation] Diamond Wafer Prospect for the Power Device Application2014
Author(s)
S.Shikata, H.Umezawa, Y.Kato, S.Ohmagari, H.Yamada, N.Tsubouchi, Y.Mokuno, and A.Chayahara,
Organizer
6th International Workshop on Crystal Growth Technology
Place of Presentation
Novotel, Berlin, Germany
Year and Date
2014-06-16 – 2014-06-20
Related Report
Invited
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[Presentation] Diamond based power devices2014
Author(s)
S.Shikata, H.Umezawa, Y.Kato, S.Ohmagari, H.Yamada, N.Tsubouchi, Y.Mokuno, and A.Chayahara,
Organizer
New Diamond and Nano Carbons 2014
Place of Presentation
Hyatt Regency,Chicago, USA
Year and Date
2014-05-26 – 2014-05-30
Related Report
Invited
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[Presentation] Diamond based power device2013
Author(s)
S.Shikata, H.Umezawa,Y.Kato,H.YamadamN.Tsubouchi,Y.Mokuno,A.Chayahara and T.Funaki
Organizer
Int'l Conf.SiC and Related Materials
Place of Presentation
Miyazaki, Japan
Related Report
Invited
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