Budget Amount *help |
¥44,460,000 (Direct Cost: ¥34,200,000、Indirect Cost: ¥10,260,000)
Fiscal Year 2015: ¥7,930,000 (Direct Cost: ¥6,100,000、Indirect Cost: ¥1,830,000)
Fiscal Year 2014: ¥26,260,000 (Direct Cost: ¥20,200,000、Indirect Cost: ¥6,060,000)
Fiscal Year 2013: ¥10,270,000 (Direct Cost: ¥7,900,000、Indirect Cost: ¥2,370,000)
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Outline of Final Research Achievements |
The purpose of this study is to analyze the charging phenomena under the electron irradiation and clarify the motion of secondary electrons emitted from a specimen. First, by utilizing the phase reconstruction process of electron holography, the charging state of the specimen was quantitatively evaluated. On the other hand, by carrying out the amplitude reconstruction process and detecting the electric field variations due to the motion of electrons, accumulation and collective motion of electrons could be visualized. Furthermore, by developing and introducing an analytical instrument of secondary electrons for a transmission electron microscope, the energy spectra of secondary electrons were obtained and the correlation between the change of the energy spectra of secondary electrons and the charging state of charged insulating specimens was successfully analyzed.
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