| Project/Area Number |
25286024
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Partial Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Nanomaterials engineering
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| Research Institution | Nagoya University |
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Principal Investigator |
Yahachi Saito 名古屋大学, 工学(系)研究科(研究院), 教授 (90144203)
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| Co-Investigator(Kenkyū-buntansha) |
ASAKA Koji 名古屋大学, 大学院工学研究科, 講師 (50361316)
NAKAHARA Hitoshi 名古屋大学, 大学院工学研究科, 助教 (20293649)
MURATA Eiichi 名城大学, 理工学部, 准教授 (40387759)
NAGAI Shigekazu 三重大学, 大学院工学研究科, 助教 (40577970)
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| Project Period (FY) |
2013-04-01 – 2016-03-31
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| Project Status |
Completed (Fiscal Year 2015)
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| Budget Amount *help |
¥19,370,000 (Direct Cost: ¥14,900,000、Indirect Cost: ¥4,470,000)
Fiscal Year 2015: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2014: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2013: ¥13,520,000 (Direct Cost: ¥10,400,000、Indirect Cost: ¥3,120,000)
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| Keywords | カーボンナノチューブ / 電子源 / 電界放出 / 走査電子顕微鏡 / 電子線 / 電子レンズ / X線像 / X線源 / 分解能 / 近軸軌道計算 / レンズ系 / 収差係数 |
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| Outline of Final Research Achievements |
We have experimentally manufactured a carbon nanotube (CNT)-based compact field emission scanning electron microscope (FE-SEM) by installing an originally designed electron source chamber and a condenser lens system to a commercially available miniature SEM. Structure of an extraction electrode and a Butler lens were designed using the near-axis trajectory and the actual trajectory calculations. The vacuum pressure in the emitter chamber is on the order of 10-7 Pa, and thus a stable emission was obtained without a ballast resistance. SEM images with a resolution of 30 nm were successfully recorded. Furthermore, by setting out a metal target in a specimen chamber of the SEM and a Be window, X-ray micrographs of a SD memory with resolution of 140 μm could be recorded at an acceleration voltage of 17 kV and a beam current of 8.5 nA.
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