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Development of defect reduction method for a lattice-matched III-V-N / Si laser monolithically integrated on Si-chip

Research Project

Project/Area Number 25286049
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Crystal engineering
Research InstitutionToyohashi University of Technology

Principal Investigator

WAKAHARA Akihiro  豊橋技術科学大学, 工学(系)研究科(研究院), 教授 (00230912)

Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥19,240,000 (Direct Cost: ¥14,800,000、Indirect Cost: ¥4,440,000)
Fiscal Year 2015: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
Fiscal Year 2014: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Fiscal Year 2013: ¥14,170,000 (Direct Cost: ¥10,900,000、Indirect Cost: ¥3,270,000)
Keywords結晶成長機構 / III-V-N混晶 / 表面超構造 / 組成不均一 / Si上ヘテロエピタキシー / 欠陥制御 / 価電子制御 / Si上ヘテロエピタキシャル成長 / III-V-N / 無転位 / ドーピング制御 / ヘテロエピタキシー / Si基板 / 分子線エピタキシー / 組成不均一性制御 / 非輻射再結合中心 / 組成揺らぎ
Outline of Final Research Achievements

In order to realize a laser composed of III-V-N alloy lattice-matched to Si, it was examined the potential of surface nitridation method, in which partially surface nitridation and regrowth are alternates, to overcome reduction of nitrogen incorporation efficiency at high-temperature and/or generation of non-radiative recombination centers in GaAsN active and GaAsPN cladding layers.
During the surface nitridation, both maintaining the (1x4) surface reconstruction and high-temperature growth (>550°C) are very effective to reduce the non-radiative centers. Also, high-quality GaAsPN cladding layer can be obtain by the use of As2 and P2 as the group-V sources, low V/III ratio (<4), and relatively high-temperature(>550°C).

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • Research Products

    (17 results)

All 2016 2015 2014 2013 Other

All Journal Article (1 results) (of which Peer Reviewed: 1 results,  Acknowledgement Compliant: 1 results) Presentation (16 results) (of which Int'l Joint Research: 2 results,  Invited: 2 results)

  • [Journal Article] Molecular-beam epitaxy growth of dilute GaAsN alloys by surface nitridation2016

    • Author(s)
      N. Urakami, K. Yamane, H. Sekiguchi, H. Okada, A. Wakahara,
    • Journal Title

      Journal of Crystal Growth

      Volume: 435 Pages: 19-23

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] Si基板上格子整合系GaAsPN混晶の導電性制御2016

    • Author(s)
      佐藤健人, 山根啓輔, 西尾卓也, 麦倉俊, 関口寛人, 岡田浩, 若原昭浩
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] DESIGN AND GROWTH OF DISLOCATION-FREE III-V-N/Si FOR Si-BASED MULTIJUNCTION SOLAR CELLS2016

    • Author(s)
      [3]Akihiro Wakahara, Noriyuki Urakami, Shunsuke Mugikura, Keisuke Yamane, Hiroto Sekiguchi
    • Organizer
      The 3rd International Conference of Grobal Network for Innovative Technology (IGNITE2016)
    • Place of Presentation
      Penang, Malaysia
    • Year and Date
      2016-01-17
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Si基板上無転位III-V-N結晶成長と光・電子集積デバイス2015

    • Author(s)
      若原昭浩, 山根啓輔
    • Organizer
      電子情報通信学会シリコンフォトニクス研究会
    • Place of Presentation
      政記念 しいのき迎賓館, 石川
    • Year and Date
      2015-12-10
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] Effects of growth temperature on crystalline quality of high nitrogen composition GaAsPN2015

    • Author(s)
      [1]Kento Sato, Keisuke Yamane, Shun Mugikura, Hiroto Sekiguchi, Hiroshi Okada, Akihiro Wakahara
    • Organizer
      The Irago Conference 2015
    • Place of Presentation
      Irago, Japan
    • Year and Date
      2015-10-22
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effects of growth temperature on crystalline quality of high nitrogen composition GaAsPN2015

    • Author(s)
      [5]S.Mugikura, N. Urakami, K. Yamane, H. Sekiguchi, H. Okada, A. Wakahara
    • Organizer
      34th Electronic Materials Symposium (EMS-34)
    • Place of Presentation
      Shiga
    • Year and Date
      2015-07-12
    • Related Report
      2015 Annual Research Report
  • [Presentation] 表面窒化を用いたGaAsN混晶のN組成制御2015

    • Author(s)
      浦上法之・山根啓輔・関口寛人・岡田 浩・若原昭浩
    • Organizer
      電子情報通信学会研究会
    • Place of Presentation
      豊橋技術科学大学
    • Year and Date
      2015-05-28 – 2015-05-29
    • Related Report
      2014 Annual Research Report
  • [Presentation] 表面窒化を用いたGaAsN混晶のN組成制御2015

    • Author(s)
      浦上法之, 山根啓輔, 関口寛人, 岡田浩, 若原 昭浩
    • Organizer
      電子情報通信学会電子デバイス研究会
    • Place of Presentation
      豊橋技術科学大学
    • Year and Date
      2015-05-28
    • Related Report
      2015 Annual Research Report
  • [Presentation] 表面窒化により成長したGaAsN混晶の発光特性2015

    • Author(s)
      浦上法之、山根啓輔、関口寛人、岡田浩、若原昭浩
    • Organizer
      第62回応用物理学会春期学術講演会
    • Place of Presentation
      東海大学湘南キャンパス
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Annual Research Report
  • [Presentation] Si基板上格子整合系GaAsPN混晶の高品質化2015

    • Author(s)
      麦倉俊、浦上法之、山根啓輔、関口寛人、岡田浩、若原昭浩
    • Organizer
      第62回応用物理学会春期学術講演会
    • Place of Presentation
      東海大学湘南キャパス
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Annual Research Report
  • [Presentation] Growth of Dilute Nitride by Embedding Nitrided Layer and Its Application to GaAs(P)N Quantum Well Structure2014

    • Author(s)
      N. Urakami, H. Sekiguchi, H. Okada, A. Wakahara
    • Organizer
      18th International Conference on Molecular Beam Epitaxy (MBE2014)
    • Place of Presentation
      Flagstaff, Arizona, USA
    • Year and Date
      2014-09-07 – 2014-09-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] III-V-N Compounds for Multi-Junction Solar Cells on Si2014

    • Author(s)
      Akihiro Wakahara, Noriyuki Urakami, Keisuke Yamane, and Hiroto Sekiguchi
    • Organizer
      IEEE PVSC-40
    • Place of Presentation
      Denvor、USA
    • Year and Date
      2014-06-08 – 2014-06-13
    • Related Report
      2014 Annual Research Report
  • [Presentation] Growth of GaAsN quantum well structure by surface nitridation2013

    • Author(s)
      N. Urakami, H. Ito, H. Sekiguchi, H. Okada, A. Wakahara
    • Organizer
      40th Int. Symp. On Compound Semiconductors (ISCS2013)
    • Place of Presentation
      Kobe
    • Related Report
      2013 Annual Research Report
  • [Presentation] III-N-based optoelectronic devices and their integration2013

    • Author(s)
      A Wakahara, N.Urakami, H.Itho, H. Okada, and H. Sekiguchi
    • Organizer
      10th Topical Workshop on Heterostructure Microelectronics(TWHM2013)
    • Place of Presentation
      Hakodate
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] 表面窒化によるGaAsN混晶の形成

    • Author(s)
      浦上法之、若原昭浩、関口寛人、岡田 浩
    • Organizer
      電子情報通信学会 電子デバイス研究会
    • Place of Presentation
      静岡大学(浜松)
    • Related Report
      2013 Annual Research Report
  • [Presentation] Growth of GaAsN quantum wells by using surface nitridation enhanced N incorporation

    • Author(s)
      N. Urakami, H. Ito, H. Sekiguchi, H. Okada, A. Wakahara
    • Organizer
      第32回電子材料シンポジウム
    • Place of Presentation
      守山市
    • Related Report
      2013 Annual Research Report
  • [Presentation] 希薄窒化物GaAsN混晶の成長における表面窒化の有効性

    • Author(s)
      浦上法之,関口寛人,岡田浩,若原昭浩
    • Organizer
      第61回応用物理学会春期学術講演会
    • Place of Presentation
      青山学院大相模原キャンパス
    • Related Report
      2013 Annual Research Report

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Published: 2013-05-21   Modified: 2019-07-29  

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