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Evolution of functional single-crystalline oxide thin films by mist deposition

Research Project

Project/Area Number 25286050
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Crystal engineering
Research InstitutionKyoto University

Principal Investigator

Fujita Shizuo  京都大学, 工学(系)研究科(研究院), 教授 (20135536)

Co-Investigator(Renkei-kenkyūsha) TOSHIYUKI KAWAHARAMURA  高知工科大学, 総合研究所, 准教授 (00512021)
Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥18,330,000 (Direct Cost: ¥14,100,000、Indirect Cost: ¥4,230,000)
Fiscal Year 2015: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
Fiscal Year 2014: ¥7,280,000 (Direct Cost: ¥5,600,000、Indirect Cost: ¥1,680,000)
Fiscal Year 2013: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Keywords酸化物半導体 / 環境材料 / 結晶成長 / 省エネルギー / 電子デバイス・機器 / 多機能デバイス
Outline of Final Research Achievements

Our goal was to establish new photonic-electronic-magnetic multifunction for novel devices by “single-crystalline” oxide semiconductor films and heterostructures. With the use of abundant elements and “mist CVD”, we aimed at environmental-friendly semiconductor technology from the growth to disposal. The band gap engineering and function engineering of alloys led new multifunctional materials such as corundum-structured gallium oxide-based wide band gap semiconductor system and ferromagnetic semiconductors with Curie temperature above room temperature, which are effective for next generation devices with novel physics.

Report

(5 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • Products Report
  • Research Products

    (37 results)

All 2021 2016 2015 2014 2013 Other

All Int'l Joint Research (1 results) Journal Article (8 results) (of which Peer Reviewed: 8 results,  Acknowledgement Compliant: 4 results) Presentation (21 results) (of which Int'l Joint Research: 5 results,  Invited: 8 results) Patent(Industrial Property Rights) (7 results) (of which Overseas: 1 results)

  • [Int'l Joint Research] Universite de Versailles/Sorbonne Universites(France)

    • Related Report
      2015 Annual Research Report
  • [Journal Article] Growth characteristics of corundum-structured α-(AlxGa1x)2O3/Ga2O3 heterostructures on sapphire substrates2016

    • Author(s)
      Kentaro Kaneko, Kenta Suzuki, Yoshito Ito, ShizuoFujita
    • Journal Title

      Journal of Crystal Growth

      Volume: 436 Pages: 150-154

    • DOI

      10.1016/j.jcrysgro.2015.12.013

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Growth and metal-oxide-semiconductor field-effect transistrs of corundum-structured alpha indium oxide semiconductors2015

    • Author(s)
      Kentaro Kaneko, Yoshito Ito, Takayuki Uchida, and Shizuo Fujita
    • Journal Title

      Applied Physics Express

      Volume: 8 Issue: 9 Pages: 095503-095503

    • DOI

      10.7567/apex.8.095503

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Enhanced thermal stability of alpha gallium oxide films supported by aluminum doping2015

    • Author(s)
      Sam-Dong Lee, Yoshito Ito, Kentaro Kaneko, and Shizuo Fujita
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 54 Issue: 3 Pages: 030301-030301

    • DOI

      10.7567/jjap.54.030301

    • NAID

      210000144832

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Room temperature ferromagnetism in conducting α-(In1-xFex)2O3 alloy films2015

    • Author(s)
      Kazuaki Akaiwa, Kentaro Kaneko, Shizuo Fujita, Ekaterina Chikoidze, and Yves Dumont
    • Journal Title

      Applied Physics Letters

      Volume: 106 Issue: 6

    • DOI

      10.1063/1.4908050

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Growth of Corundum-Structured (In_xGa_<1-x>_2O_3 Alloy Thin Films on Sapphire Subs trates with Buffer Layers2014

    • Author(s)
      Norihiro Suzuki, Kentaro Kaneko, and Shizuo Fujita
    • Journal Title

      Journal of Crystal Growth

      Volume: (印刷中) Pages: 670-672

    • DOI

      10.1016/j.jcrysgro.2014.02.051

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Epitaxial growth of corundum-structured wide band gap III-oxide semiconductor thin films2014

    • Author(s)
      Shizuo Fujita and Kentaro Kaneko
    • Journal Title

      Journal of Crystal Growth

      Volume: 401 Pages: 588-592

    • DOI

      10.1016/j.jcrysgro.2014.02.032

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Ultrasonic-assisted mist chemical vapor deposition of II-oxide and related oxide compounds2014

    • Author(s)
      Shizuo Fujita, Kentaro Kaneko, Takumi Ikenoue, Toshiyuki Kawaharamura and Mamoru Furuta
    • Journal Title

      Physica status solidi (c)

      Volume: 未定 Issue: 7-8 Pages: 1225-1228

    • DOI

      10.1002/pssc.201300655

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Oriented growth of beta gallium oxide thin films on yttrium-stabilized zirconia su bstrates2013

    • Author(s)
      Kentaro Kaneko, Hiroshi Ito, Sam-Dong Lee, and Shizuo Fujita
    • Journal Title

      Physica Status Solidi (c)

      Volume: 10 Issue: 11 Pages: 1596-1599

    • DOI

      10.1002/pssc.201300257

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Presentation] Electrical properties of Sn-doped corundum-structured Ga2O3 thin films on sapphire substrates2015

    • Author(s)
      Kazuaki Akaiwa, Kentaro Kaneko, Shizuo Fujita
    • Organizer
      1st International Workshop on Gallium Oxide and Related Materials
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2015-11-03
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Recent evolution of oxide semiconductors2015

    • Author(s)
      Shizuo Fujita
    • Organizer
      5th International Workshop on Epitaxial Growth and Fundamental Properties of Semiconductor Nanostructures
    • Place of Presentation
      Hsinchu, Taiwan
    • Year and Date
      2015-09-06
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Electrical property of Sn-doped corundum-structured Ga2O3 thin films on sapphire substrates2015

    • Author(s)
      Kazuaki Akaiwa, Kentaro Kaneko, Shizuo Fujita
    • Organizer
      42nd International Symposium on Compound Semiconductors
    • Place of Presentation
      Santa Barbara, USA
    • Year and Date
      2015-06-28
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Growth and properties of corundum-structured α-(In,Ga)2O3 semiconductor alloys on sapphire substrates for electrical applications2015

    • Author(s)
      Shizuo Fujita, Yoshito Ito, Takayuki Uchida, Riena Jinno, Kentaro Kaneko
    • Organizer
      57th Electronic Materials Conference
    • Place of Presentation
      Ohio State University, USA
    • Year and Date
      2015-06-24
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Crystal stability and electrical defects in corundum-structured α-Ga2O3-based semiconductor thin films2015

    • Author(s)
      Shizuo Fujita, Sam-Dong Lee, Kazuaki Akaiwa, Yoshito Ito, Masashi Kitajima, Kentaro Kaneko
    • Organizer
      2015 Materials Research Society Spring Meeting
    • Place of Presentation
      San Francisco, USA
    • Year and Date
      2015-04-06
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Growth, properties and devices of gallium-oxide-based widegap semiconductors2015

    • Author(s)
      Shizuo Fujita
    • Organizer
      DPG (Deutsche Physikalische Gesellschaft e.V.) Spring Meeting
    • Place of Presentation
      Berlin, Germany
    • Year and Date
      2015-03-15 – 2015-03-20
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Room temperature ferromagnetism in alpha-(Ga,Fe)2O3 semiconductor2014

    • Author(s)
      Kentaro Kaneko, Shigenori Ueda, and Shizuo Fujita
    • Organizer
      32nd Int. Conf. on the Physics of Semiconductors
    • Place of Presentation
      Austin, USA
    • Year and Date
      2014-08-10 – 2014-08-15
    • Related Report
      2014 Annual Research Report
  • [Presentation] Mist deposition technology as a green route for thin film growth2014

    • Author(s)
      Shizuo Fujita
    • Organizer
      14th Int. Workshop on Active-matrix Flatpanel Displays and Devices
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2014-07-02 – 2014-07-04
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Growth and Properties of Corundum-Structured α-(Al,Ga,In)2O3 semiconductor alloys on sapphire substrates2014

    • Author(s)
      Shizuo Fujita, Norihiro Suzuki, Kazuaki Akaiwa, and Kentaro Kaneko
    • Organizer
      46th Electronic Materials Conference
    • Place of Presentation
      Santa Barbara, USA
    • Year and Date
      2014-06-25 – 2014-06-27
    • Related Report
      2014 Annual Research Report
  • [Presentation] Prospective functional materials based on metastable-phased oxides2014

    • Author(s)
      Kentaro Kaneko and Shizuo Fujita
    • Organizer
      2014 Collaborative Conference on Materials Research
    • Place of Presentation
      Inchon, Korea
    • Year and Date
      2014-06-23 – 2014-06-27
    • Related Report
      2014 Annual Research Report
  • [Presentation] Epitaxial growth of corundum-structured α-(Al,Ga,In)2O3 semiconductor alloys on sapphire substrates2014

    • Author(s)
      Shizuo Fujita, Kazuaki Akaiwa, Norihiro Suzuki, and Kentaro Kaneko
    • Organizer
      IUMRS - Int. Conf. on Electronic Materials 2014
    • Place of Presentation
      Taipei, Taiwan
    • Year and Date
      2014-06-10 – 2014-06-14
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Growth and properties of corundum-structured wide band gap α-(Al,Ga,In)2O3 semiconductor alloys2014

    • Author(s)
      Shizuo Fujita, Kazuaki Akaiwa, Norihiro Suzuki, and Kentaro Kaneko
    • Organizer
      41st Int. Symp. Compound Semiconductors
    • Place of Presentation
      Montpellie, France
    • Year and Date
      2014-05-12 – 2014-05-15
    • Related Report
      2014 Annual Research Report
  • [Presentation] Growth and properties of corundum-structured wide band gap alpha-(Al,Ga,In)2O3 semiconductor alloys2014

    • Author(s)
      Shizuo Fujita, Kazuaki Akaiwa, Norihiro Suzuki, Kentaro Kaneko
    • Organizer
      41st International Symposium on Compound Semiconductors
    • Place of Presentation
      Montpellier, France
    • Related Report
      2013 Annual Research Report
  • [Presentation] Epitaxial growth of corundum-structured alpha-(Al,Ga,In)2O3 semiconductor alloys on sapphire substrates2014

    • Author(s)
      Shizuo Fujita, Kazuaki Akaiwa, Norihiro Suzuki, and Kentaro Kaneko
    • Organizer
      International Conference on Electronic Materials 2014
    • Place of Presentation
      Taipei, Taiwan
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Prospective functional materials based on metastable-phased oxidesProspective functional materials based on metastable-phased oxides2014

    • Author(s)
      Kentaro Kaneko and Shizuo Fujita
    • Organizer
      2014 Collaborative Conference on Materials Research
    • Place of Presentation
      Incheon/Seoul, South Korea
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Growth and Properties of Corundum-Structured alpha-(Al,Ga,In)2O3 Semiconductor Alloys on Sapphire Substrates2014

    • Author(s)
      Shizuo Fujita, Norihiro Suzuki, Kazuaki Akaiwa, and Kentaro Kaneko
    • Organizer
      56th Electronic Materials Conference
    • Place of Presentation
      Santa Barbara, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] Epitaxial growth of wide band gap III-oxide semiconductor thin films2013

    • Author(s)
      Shizuo Fujita
    • Organizer
      17th International Conference on Crystal Growth and Epitaxy
    • Place of Presentation
      Warsaw, Poland
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Growth of corundum-structured alpha-(InxGa1-x)2O3 alloy thin films2013

    • Author(s)
      Norihiro Suzuki, Kentaro Kaneko, and Shizuo Fujita
    • Organizer
      17th International Conference on Crystal Growth and Epitaxy
    • Place of Presentation
      Warsaw, Poland
    • Related Report
      2013 Annual Research Report
  • [Presentation] Ultrasonc-assisted mist chemical vapor deposition of II-oxide and related oxide compounds2013

    • Author(s)
      Shizuo Fujita, Kentaro Kaneko, Toshiyuki Kawaharamura, and Mamoru Furuta
    • Organizer
      16th International Conference on II-VI Compounds and Related Materials
    • Place of Presentation
      Nagahama, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Growth and characterization of alpha-Ga2O3 films on sapphire substrates with alpha-(AlGa)2O3 buffer layer2013

    • Author(s)
      Kazuaki Akaiwa, Yoshito Ito, and Shizuo Fujita
    • Organizer
      2013 JSAP-MRS Joint Symposia
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Doping and alloying to alpha-Ga2O3 thin films on sapphire substrates2013

    • Author(s)
      Kazuaki Akaiwa, Norihiro Suzuki, Kentaro Kaneko, and Shizuo Fujita
    • Organizer
      2013 JSAP-MRS Joint Symposia
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2013 Annual Research Report
  • [Patent(Industrial Property Rights)] p型酸化物半導体及びその製造方法(P-TYPE OXIDE SEMICONDUCTOR AND METHOD FOR MANUFACTURING SAME)2021

    • Inventor(s)
      藤田 静雄, 金子 健太郎, 織田 真也, 人羅 俊実
    • Industrial Property Rights Holder
      京都大学 (株)FLOSFIA
    • Industrial Property Rights Type
      特許
    • Acquisition Date
      2021
    • Related Report
      Products Report
  • [Patent(Industrial Property Rights)] 半導体膜の製造方法及び半導体膜並びにドーピング用錯化合物及びドーピング方法2021

    • Inventor(s)
      藤田 静雄, 内田 貴之, 金子 健太郎, 織田 真也, 人羅 俊実
    • Industrial Property Rights Holder
      (株)FLOSFIA 京都大学
    • Industrial Property Rights Type
      特許
    • Acquisition Date
      2021
    • Related Report
      Products Report
    • Overseas
  • [Patent(Industrial Property Rights)] 深紫外線発光素子及びその製造方法2016

    • Inventor(s)
      藤田 静雄, 津村 圭一, 内田 貴之, 神野 莉衣奈, 金子 健太郎, 人羅 俊実
    • Industrial Property Rights Holder
      京都大学, (株)FLOSFIA
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-094950
    • Filing Date
      2016-05-10
    • Related Report
      Products Report
  • [Patent(Industrial Property Rights)] p型酸化物半導体及びその製造方法2016

    • Inventor(s)
      藤田 静雄, 金子 健太郎, 人羅 俊実
    • Industrial Property Rights Holder
      京都大学, (株)FLOSFIA
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-170330
    • Filing Date
      2016-08-31
    • Related Report
      Products Report
  • [Patent(Industrial Property Rights)] 半導体膜の製造方法及び半導体膜2016

    • Inventor(s)
      藤田 静雄, 内田 貴之, 金子 健太郎, 人羅 俊実, 織田 真也
    • Industrial Property Rights Holder
      京都大学, (株)FLOSFIA
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-181044
    • Filing Date
      2016-09-15
    • Related Report
      Products Report
  • [Patent(Industrial Property Rights)] ドーピング用錯化合物及びドーピング方法2016

    • Inventor(s)
      藤田 静雄, 内田 貴之, 金子 健太郎, 人羅 俊実, 織田 真也
    • Industrial Property Rights Holder
      京都大学, (株)FLOSFIA
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-181045
    • Filing Date
      2016-09-15
    • Related Report
      Products Report
  • [Patent(Industrial Property Rights)] 結晶性ZrO2膜の製造方法および結晶性ZrO2膜2016

    • Inventor(s)
      藤田 静雄, 金子 健太郎, 佐々木 貴博, 人羅 俊実
    • Industrial Property Rights Holder
      京都大学, (株)FLOSFIA
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-216766
    • Filing Date
      2016-11-04
    • Related Report
      Products Report

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Published: 2013-05-21   Modified: 2023-03-30  

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