Control of surface properties and nano-structures by means of anisotropic surface stress

• Project/Area Number: 25286061
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Partial Multi-year Fund
• Section: 一般
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: Japan Atomic Energy Agency
• Principal Investigator: Asaoka Hidehito 国立研究開発法人日本原子力研究開発機構, 原子力科学研究部門 先端基礎研究センター, 研究主席 (40370340)
• Co-Investigator(Kenkyū-buntansha): 山田 洋一 筑波大学, 数理物質科学研究科(系), 講師 (20435598) ; 田口 富嗣 国立研究開発法人日本原子力研究開発機構, 原子力科学研究部門 量子ビーム応用研究センター, 研究主幹 (50354832)
• Project Period (FY): 2013-04-01 – 2017-03-31
• Project Status: Completed (Fiscal Year 2016)
• Budget Amount: ¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000); Fiscal Year 2016: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000); Fiscal Year 2015: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000); Fiscal Year 2014: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000); Fiscal Year 2013: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
• Keywords: 結晶成長 / 表面・界面物性 / MBE・エピタキシャル / 自己組織化 / MBE、エピタキシャル

Outline of Final Research Achievements

Surface stress processes reveal nature of growth stages during nano-structural formation. We focused on time evolution of the stress during surfactant-mediated epitaxy and reconstruction. Real-time observations of the stress/strain and morphology were performed simultaneously by using substrate curvature and electron diffraction methods. As a result, we have found a direct evidence for stress of reconstruction. Furthermore, the real-time stress measurement has provided a unique stress evolution during the nano-structure growth. We have realized a stress induced system for fabrication of nano-structures.

Research Products

• [Journal Article] Stress Evolution during Si(111)7×7 Surface Reconstruction (2016)
  • Author(s): 朝岡秀人、魚住雄輝
  • Journal Title: Hyomen Kagaku Volume: 37 Issue: 9 Pages: 446-450
  • DOI: 10.1380/jsssj.37.446
  • NAID: 130005416252
  • ISSN: 0388-5321, 1881-4743
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Processes of silver photo-diffusion into Ge-chalcogenide probed by neutron reflectivity technique (2016)
  • Author(s): Y. Sakaguchi, H. Asaoka, Y. Uozumi, Y. Kawakita, T. Ito, M. Kubota, D. Yamazaki, K. Soyama, G. Sheoran and M. Mitkova
  • Journal Title: Physica Status Solidi A Volume: online Issue: 7 Pages: 1894-1903
  • DOI: 10.1002/pssa.201533037
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Silver photo-diffusion and photo-induced macroscopic surface deformation of Ge33S67/Ag / Si substrate (2016)
  • Author(s): Y. Sakaguchi, H. Asaoka, Y. Uozumi, K. Kondo, D. Yamazaki, K. Soyama, M. Ailavajhala, M. Mitkova
  • Journal Title: J. Appl. Phys. Volume: 120 Issue: 5
  • DOI: 10.1063/1.4959207
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Surface stress measurement of Si(111) 7×7 reconstruction by comparison with hydrogen-terminated 1×1 surface (2015)
  • Author(s): H. Asaoka, Y. Uozumi
  • Journal Title: Thin Solid Films Volume: 591 Pages: 200-203
  • DOI: 10.1016/j.tsf.2015.03.055
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Synthesis of silicon carbide nanotube heterostructure by crystallinity change using ion irradiation technique (2015)
  • Author(s): T Taguchi, S Yamamoto, K Kodama, H Asaoka
  • Journal Title: Carbon Volume: 95 Pages: 279-285
  • DOI: 10.1016/j.carbon.2015.08.056
  • Peer Reviewed
• [Journal Article] Measurement of Transient Photo-induced Changes in Thin Films at J-PARC – Time-resolved Neutron Reflectivity Measurements of Silver Photo-diffusion (2015)
  • Author(s): Yoshifumi SAKAGUCHI, Hidehito ASAOKA, Yuki UOZUMI, Yukinobu, KAWAKITA, Takayoshi ITO, Masato KUBOTA, Dai YAMAZAKI, Kazuhiko SOYAMA, Mahesh AILAVAJHALA, Kasandra WOLF, Maria MITKOVA, and Maximilian W. A. SKODA
  • Journal Title: JPS Conf. Proc. Volume: 8 Pages: 031023-031023
  • DOI: 10.7566/jpscp.8.031023
  • Peer Reviewed / Open Access / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Crystal Structure and Electron Density Distribution Analyses of Nd<i>_x</i>Ce₁₋<i>_x</i>O_{2−<i>&delta;</i>} for Electrolyte by Rietveld/Maximum Entropy Method (2015)
  • Author(s): T. Taguchi, N. Igawa, S. Miwa, A. Birumachi, H. Asaoka, M. Osaka
  • Journal Title: e-Journal of Surface Science and Nanotechnology Volume: 13 Issue: 0 Pages: 339-342
  • DOI: 10.1380/ejssnt.2015.339
  • NAID: 130005083977
  • ISSN: 1348-0391
  • Peer Reviewed
• [Journal Article] Dynamics of silver photo-diffusion into Ge-chalcogenide films: time-resolved neutron reflectometry (2015)
  • Author(s): Y Sakaguchi, H Asaoka, Y Uozumi, Y Kawakita, T Ito, M Kubota, D Yamazaki, K Soyama, M Ailavajhala, M R Latif, K Wolf, M Mitkova and M W A Skoda,
  • Journal Title: Journal of Physics: Conference Series Volume: 619 Pages: 012046-012046
  • DOI: 10.1088/1742-6596/619/1/012046
  • Peer Reviewed / Open Access / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Unique surface structure formation on Ge covered Si(110) surface (2014)
  • Author(s): Y. Yokoyama, Y. Uozumi, H. Asaoka
  • Journal Title: J. Cryst. Growth Volume: 405 Pages: 35-38
  • DOI: 10.1016/j.jcrysgro.2014.07.047
  • Peer Reviewed
• [Journal Article] Studies of silver photo-diffusion dynamics in Ag/GexS1-x (x=0.2 and 0.4) films by means of neutron reflectometry (2014)
  • Author(s): Y. Sakaguchi, H. Asaoka, Y. Uozumi, Y. Kawakita, T. Ito, M. Kubota, D. Yamazaki, K. Soyama, M. Ailavajhala, M. R. Latif, M. Mitkova
  • Journal Title: Can. J. Phys. Volume: 92 Issue: 7/8 Pages: 654-658
  • DOI: 10.1139/cjp-2013-0593
  • Peer Reviewed
• [Journal Article] In-situ synchrotron radiation photoelectron spectroscopy study on oxidation of Ge(100)-2×1 surface by means of supersonic oxygen molecular beam (2014)
  • Author(s): A. Yoshigoe, Y. Teraoka, R. Okada, Y. Yamada, M. Sasaki
  • Journal Title: J. Chem.Phys. Volume: 141 Issue: 17 Pages: 174708-174708
  • DOI: 10.1063/1.4900633
  • Peer Reviewed
• [Journal Article] Direct stress measurement of Si(111) 7×7 reconstruction (2013)
  • Author(s): H. Asaoka, T. Yamazaki, Y. Yokoyama, K. Yamaguchi
  • Journal Title: J. Cryst. Growth Volume: 378 Pages: 37-40
  • DOI: 10.1016/j.jcrysgro.2012.12.124
  • Peer Reviewed
• [Journal Article] Direct measurement of surface stress during Bi-mediated Ge growth on Si (2013)
  • Author(s): H. Asaoka, T. Yamazaki, K. Yamaguchi, S. Shamoto, SN. Filimonov, M Suemitsu
  • Journal Title: Surf. Sci. Volume: 609 Pages: 157-160
  • DOI: 10.1016/j.susc.2012.12.002
  • Peer Reviewed
• [Journal Article] Change of Si(110) reconstructed structure by Ge nano cluster formation (2013)
  • Author(s): Y. Yokoyama, T. Yamazaki, H. Asaoka
  • Journal Title: J. Cryst. Growth Volume: 378 Pages: 230-232
  • DOI: 10.1016/j.jcrysgro.2012.10.047
  • Peer Reviewed
• [Journal Article] Preferential adsorption of C60 molecules to step edges of the Si(110)-16 x 2 single domain surface (2013)
  • Author(s): Y Yokoyama
  • Journal Title: J. Phys Conference Series Volume: 417 Pages: 12036-12036
  • DOI: 10.1088/1742-6596/417/1/012036
  • Peer Reviewed
• [Presentation] Surface stress relief during Ge wetting layer and nanodot formation on Si(111) (2016)
  • Author(s): Y. Uozumi, T. Yamazaki, H. Asaoka
  • Organizer: 29th International Microprocesses and Nanotechnology Conference
  • Place of Presentation: ANAクラウンプラザホテル京都（京都府京都市）
  • Year and Date: 2016-11-08
  • Int'l Joint Research
• [Presentation] Direct determination of surface stress during nano-structural formation on Silicon (2016)
  • Author(s): H. Asaoka
  • Organizer: Annual World Congress of Nano Science & Technology
  • Place of Presentation: Singapore
  • Year and Date: 2016-10-26
  • Int'l Joint Research / Invited
• [Presentation] Relationship between surface stress and reconstruction (2016)
  • Author(s): H. Asaoka
  • Organizer: Energy Materials and Nanotechnology Meeting on Epitaxy
  • Place of Presentation: Budapest（Hungary）
  • Year and Date: 2016-09-04
  • Int'l Joint Research / Invited
• [Presentation] Low temperature formation of Si(110)-16×2 through wet etching (2016)
  • Author(s): M. Yano, S. Suzuki, Y. Uozumi, H. Asaoka
  • Organizer: 18th International Conference on Crystal Growth and Epitaxy
  • Place of Presentation: 名古屋国際会議場（愛知県名古屋市）
  • Year and Date: 2016-08-07
  • Int'l Joint Research
• [Presentation] Real-time measurement of intrinsic stress in silicon reconstruction during hydrogen adsorption/desorption process (2016)
  • Author(s): H. Asaoka, Y. Uozumi
  • Organizer: 16th International Conference on Atomic Layer Deposition
  • Place of Presentation: Dublin（Ireland）
  • Year and Date: 2016-07-24
  • Int'l Joint Research
• [Presentation] ナノ構造形成過程の表面ストレスその場測定 (2016)
  • Author(s): 朝岡秀人
  • Organizer: 電気化学会
  • Place of Presentation: おたる自然の村おこばち山荘（北海道小樽市）
  • Year and Date: 2016-06-25
  • Invited
• [Presentation] Kinetic Study on Silver Photo-diffusion into Ge-chalcogenide using Neutron Reflectivity Technique (2016)
  • Author(s): Y. Sakaguchi, H. Asaoka, Y. Uozumi, K. Soyama, P. Gutfreund, R. Cubitt, M. Mitkova
  • Organizer: 7th International Conference on Optical, Optoelectronic
  • Place of Presentation: Montreal（Canada）
  • Year and Date: 2016-06-12
  • Int'l Joint Research
• [Presentation] ヘテロ成長過程の表面ストレスの解明 (2015)
  • Author(s): 朝岡秀人
  • Organizer: 計算機センター特別研究プロジェクト「結晶成長の数理」第9回研究会 表面―歪み，構造，相転移―
  • Place of Presentation: 学習院大（東京、豊島区）
  • Year and Date: 2015-12-24
  • Invited
• [Presentation] Real-time measurement of surface stress evolution during nano-structural formation on Silicon (2015)
  • Author(s): H. Asaoka
  • Organizer: Collaborative Conference on Crystal Growth (3CG)
  • Place of Presentation: Hong Kong, China
  • Year and Date: 2015-12-14
  • Int'l Joint Research / Invited
• [Presentation] Processes of silver photo-diffusion into Ge-chalcogenides probed by neutron reflectivity technique (2015)
  • Author(s): Y. Sakaguchi, H. Asaoka, Y. Uozumi, Y. Kawakita, T. Ito, M. Kubota, D. Yamazaki, K. Soyama, Gaurav Sheoran, M. Mitkova
  • Organizer: 26th International Conference on Amorphous and Nanocrystalline Semiconductors (ICANS26)
  • Place of Presentation: Aachen, Germany
  • Year and Date: 2015-09-13
  • Int'l Joint Research
• [Presentation] Real-time stress measurement during Si surface reconstruction and Ge nanodot growth on Si (2015)
  • Author(s): H. Asaoka, Y. Uozumi
  • Organizer: 31th European Conference on Surface Science (ECOSS-31)
  • Place of Presentation: Barcelona Spain
  • Year and Date: 2015-08-31
  • Int'l Joint Research
• [Presentation] Real-Time Measurement of Surface Stress Relief during Ge Nanodot Growth on Si (2015)
  • Author(s): H. Asaoka, Y. Uozumi, T. Yamazaki, M. Suemitsu
  • Organizer: 9th International Conference on Silicon Epitaxy and Heterostructures (ICSI-9)
  • Place of Presentation: Montreal, Canada
  • Year and Date: 2015-05-17
  • Int'l Joint Research
• [Presentation] Surface stress evolution during structural formation on Silicon (2014)
  • Author(s): H. Asaoka
  • Organizer: Collaborative Conference on Crystal Growth
  • Place of Presentation: Phuket, Thailand
  • Year and Date: 2014-11-04 – 2014-11-07
  • Invited
• [Presentation] Crystal Structure and Electron Density Distribution Analyses of NdxCe1-xO2-δ for Electrolyte by Rietveld/ Maximum Entropy Method (2014)
  • Author(s): T. Taguchi, N. Igawa, S. Miwa, A. Birumachi, H. Asaoka, M. Osaka
  • Organizer: 7th International Symposium on Surface Science
  • Place of Presentation: Matsue, Japan
  • Year and Date: 2014-11-02 – 2014-11-06
• [Presentation] Surface stress measurement of Si reconstruction (2014)
  • Author(s): H. Asaoka, Y. Uozumi, Y. Yokoyama
  • Organizer: 16th International Conference on Thin Films
  • Place of Presentation: Dubrovnik, Croatia
  • Year and Date: 2014-10-13 – 2014-10-16
• [Presentation] Dynamics of silver photo-diffusion into Ge-chalcogenide films: time-resolved neutron reflectometry (2014)
  • Author(s): Y. Sakaguchi, H. Asaoka, Y. Uozumi, Y. Kawakita, T. Ito, M. Kubota, D. Yamazaki, K. Soyama, M. Ailavajhala, M. R. Latif, K. Wolf, M. Mitkova, M. W. A. Skoda
  • Organizer: International Conference on Optical, Optoelectronic and Photonic Materials
  • Place of Presentation: Leeds, UK
  • Year and Date: 2014-07-27 – 2014-08-01
• [Presentation] Transient measurement for photo-induced changes in J-PARC -time-resolved neutron reflectivity measurement for silver photo-diffusion into Ge-chalcogenide films- (2014)
  • Author(s): Y. Sakaguchi, H. Asaoka, Y. Uozumi, Y. Kawakita, T. Ito, M. Kubota, D. Yamazaki, K. Soyama, M. Ailavajhala, K. Wolf, M. Mitkova, M. W. A. Skoda
  • Organizer: 2nd International Symposium on Science at J-PARC
  • Place of Presentation: Tsukuba, Japan
  • Year and Date: 2014-07-12 – 2014-07-15
• [Presentation] Direct determination of stress evolution during hetero-epitaxial growth (2013)
  • Author(s): H. Asaoka
  • Organizer: Collaborative Conference on Crystal Growth
  • Place of Presentation: Cancun, Mexico
  • Invited
• [Presentation] Stress evolution during Si surface reconstruction (2013)
  • Author(s): H. Asaoka, Y. Uozumi, Y. Yokoyama, K. Yamaguchi
  • Organizer: International Vacuum Congress
  • Place of Presentation: Paris, France
• [Presentation] Unique surface structure formation on Ge covered Si(110) surface (2013)
  • Author(s): Y. Yokoyama, Y. Uozumi, H. Asaoka
  • Organizer: International Vacuum Congress
  • Place of Presentation: Paris, France
• [Presentation] Dynamics of silver photo-diffusion in Ag/GexS1-x (x=0.2 and 0.4) films investigated by neutron reflectivity (2013)
  • Author(s): Y. Sakaguchi, H. Asaoka, Y. Uozumi, Y. Kawakita, T. Ito, M. Kubota, D. Yamazaki, K. Soyama, M. Ailavajhala, M. Mitkova
  • Organizer: International Conference on Amorphous and Nanocrystalline Semiconductors
  • Place of Presentation: Toronto, Canada
• [Presentation] Y. Sakaguchi, H. Asaoka, Y. Uozumi, Y. Kawakita, T. Ito, M. Kubota, D. Yamazaki, K. Soyama, M. Ailavajhala, M. Mitkova (2013)
  • Author(s): Time-resolved neutron reflectivity measurements for silver photo-diffusion in Ag/Ge-S films
  • Organizer: Light and Particle Beams in Materials Science
  • Place of Presentation: Tuskuba, Japan