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Control of surface properties and nano-structures by means of anisotropic surface stress

Research Project

Project/Area Number 25286061
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionJapan Atomic Energy Agency

Principal Investigator

Asaoka Hidehito  国立研究開発法人日本原子力研究開発機構, 原子力科学研究部門 先端基礎研究センター, 研究主席 (40370340)

Co-Investigator(Kenkyū-buntansha) 山田 洋一  筑波大学, 数理物質科学研究科(系), 講師 (20435598)
田口 富嗣  国立研究開発法人日本原子力研究開発機構, 原子力科学研究部門 量子ビーム応用研究センター, 研究主幹 (50354832)
Project Period (FY) 2013-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000)
Fiscal Year 2016: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2015: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Fiscal Year 2014: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000)
Fiscal Year 2013: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000)
Keywords結晶成長 / 表面・界面物性 / MBE・エピタキシャル / 自己組織化 / MBE、エピタキシャル
Outline of Final Research Achievements

Surface stress processes reveal nature of growth stages during nano-structural formation. We focused on time evolution of the stress during surfactant-mediated epitaxy and reconstruction. Real-time observations of the stress/strain and morphology were performed simultaneously by using substrate curvature and electron diffraction methods. As a result, we have found a direct evidence for stress of reconstruction. Furthermore, the real-time stress measurement has provided a unique stress evolution during the nano-structure growth. We have realized a stress induced system for fabrication of nano-structures.

Report

(5 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • Research Products

    (37 results)

All 2016 2015 2014 2013

All Journal Article (15 results) (of which Int'l Joint Research: 4 results,  Peer Reviewed: 15 results,  Acknowledgement Compliant: 5 results,  Open Access: 2 results) Presentation (22 results) (of which Int'l Joint Research: 10 results,  Invited: 7 results)

  • [Journal Article] Stress Evolution during Si(111)7×7 Surface Reconstruction2016

    • Author(s)
      朝岡秀人、魚住雄輝
    • Journal Title

      Hyomen Kagaku

      Volume: 37 Issue: 9 Pages: 446-450

    • DOI

      10.1380/jsssj.37.446

    • NAID

      130005416252

    • ISSN
      0388-5321, 1881-4743
    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Processes of silver photo-diffusion into Ge-chalcogenide probed by neutron reflectivity technique2016

    • Author(s)
      Y. Sakaguchi, H. Asaoka, Y. Uozumi, Y. Kawakita, T. Ito, M. Kubota, D. Yamazaki, K. Soyama, G. Sheoran and M. Mitkova
    • Journal Title

      Physica Status Solidi A

      Volume: online Issue: 7 Pages: 1894-1903

    • DOI

      10.1002/pssa.201533037

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Silver photo-diffusion and photo-induced macroscopic surface deformation of Ge33S67/Ag / Si substrate2016

    • Author(s)
      Y. Sakaguchi, H. Asaoka, Y. Uozumi, K. Kondo, D. Yamazaki, K. Soyama, M. Ailavajhala, M. Mitkova
    • Journal Title

      J. Appl. Phys.

      Volume: 120 Issue: 5

    • DOI

      10.1063/1.4959207

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Surface stress measurement of Si(111) 7×7 reconstruction by comparison with hydrogen-terminated 1×1 surface2015

    • Author(s)
      H. Asaoka, Y. Uozumi
    • Journal Title

      Thin Solid Films

      Volume: 591 Pages: 200-203

    • DOI

      10.1016/j.tsf.2015.03.055

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Synthesis of silicon carbide nanotube heterostructure by crystallinity change using ion irradiation technique2015

    • Author(s)
      T Taguchi, S Yamamoto, K Kodama, H Asaoka
    • Journal Title

      Carbon

      Volume: 95 Pages: 279-285

    • DOI

      10.1016/j.carbon.2015.08.056

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Measurement of Transient Photo-induced Changes in Thin Films at J-PARC – Time-resolved Neutron Reflectivity Measurements of Silver Photo-diffusion2015

    • Author(s)
      Yoshifumi SAKAGUCHI, Hidehito ASAOKA, Yuki UOZUMI, Yukinobu, KAWAKITA, Takayoshi ITO, Masato KUBOTA, Dai YAMAZAKI, Kazuhiko SOYAMA, Mahesh AILAVAJHALA, Kasandra WOLF, Maria MITKOVA, and Maximilian W. A. SKODA
    • Journal Title

      JPS Conf. Proc.

      Volume: 8 Pages: 031023-031023

    • DOI

      10.7566/jpscp.8.031023

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Crystal Structure and Electron Density Distribution Analyses of Nd<i><sub>x</sub></i>Ce<sub>1−</sub><i><sub>x</sub></i>O<sub>2−<i>&delta;</i></sub> for Electrolyte by Rietveld/Maximum Entropy Method2015

    • Author(s)
      T. Taguchi, N. Igawa, S. Miwa, A. Birumachi, H. Asaoka, M. Osaka
    • Journal Title

      e-Journal of Surface Science and Nanotechnology

      Volume: 13 Issue: 0 Pages: 339-342

    • DOI

      10.1380/ejssnt.2015.339

    • NAID

      130005083977

    • ISSN
      1348-0391
    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Dynamics of silver photo-diffusion into Ge-chalcogenide films: time-resolved neutron reflectometry2015

    • Author(s)
      Y Sakaguchi, H Asaoka, Y Uozumi, Y Kawakita, T Ito, M Kubota, D Yamazaki, K Soyama, M Ailavajhala, M R Latif, K Wolf, M Mitkova and M W A Skoda,
    • Journal Title

      Journal of Physics: Conference Series

      Volume: 619 Pages: 012046-012046

    • DOI

      10.1088/1742-6596/619/1/012046

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Unique surface structure formation on Ge covered Si(110) surface2014

    • Author(s)
      Y. Yokoyama, Y. Uozumi, H. Asaoka
    • Journal Title

      J. Cryst. Growth

      Volume: 405 Pages: 35-38

    • DOI

      10.1016/j.jcrysgro.2014.07.047

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Studies of silver photo-diffusion dynamics in Ag/GexS1-x (x=0.2 and 0.4) films by means of neutron reflectometry2014

    • Author(s)
      Y. Sakaguchi, H. Asaoka, Y. Uozumi, Y. Kawakita, T. Ito, M. Kubota, D. Yamazaki, K. Soyama, M. Ailavajhala, M. R. Latif, M. Mitkova
    • Journal Title

      Can. J. Phys.

      Volume: 92 Issue: 7/8 Pages: 654-658

    • DOI

      10.1139/cjp-2013-0593

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] In-situ synchrotron radiation photoelectron spectroscopy study on oxidation of Ge(100)-2×1 surface by means of supersonic oxygen molecular beam2014

    • Author(s)
      A. Yoshigoe, Y. Teraoka, R. Okada, Y. Yamada, M. Sasaki
    • Journal Title

      J. Chem.Phys.

      Volume: 141 Issue: 17 Pages: 174708-174708

    • DOI

      10.1063/1.4900633

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Direct stress measurement of Si(111) 7×7 reconstruction2013

    • Author(s)
      H. Asaoka, T. Yamazaki, Y. Yokoyama, K. Yamaguchi
    • Journal Title

      J. Cryst. Growth

      Volume: 378 Pages: 37-40

    • DOI

      10.1016/j.jcrysgro.2012.12.124

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Direct measurement of surface stress during Bi-mediated Ge growth on Si2013

    • Author(s)
      H. Asaoka, T. Yamazaki, K. Yamaguchi, S. Shamoto, SN. Filimonov, M Suemitsu
    • Journal Title

      Surf. Sci.

      Volume: 609 Pages: 157-160

    • DOI

      10.1016/j.susc.2012.12.002

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Change of Si(110) reconstructed structure by Ge nano cluster formation2013

    • Author(s)
      Y. Yokoyama, T. Yamazaki, H. Asaoka
    • Journal Title

      J. Cryst. Growth

      Volume: 378 Pages: 230-232

    • DOI

      10.1016/j.jcrysgro.2012.10.047

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Preferential adsorption of C60 molecules to step edges of the Si(110)-16 x 2 single domain surface2013

    • Author(s)
      Y Yokoyama
    • Journal Title

      J. Phys Conference Series

      Volume: 417 Pages: 12036-12036

    • DOI

      10.1088/1742-6596/417/1/012036

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Presentation] Surface stress relief during Ge wetting layer and nanodot formation on Si(111)2016

    • Author(s)
      Y. Uozumi, T. Yamazaki, H. Asaoka
    • Organizer
      29th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      ANAクラウンプラザホテル京都(京都府京都市)
    • Year and Date
      2016-11-08
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Direct determination of surface stress during nano-structural formation on Silicon2016

    • Author(s)
      H. Asaoka
    • Organizer
      Annual World Congress of Nano Science & Technology
    • Place of Presentation
      Singapore
    • Year and Date
      2016-10-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Relationship between surface stress and reconstruction2016

    • Author(s)
      H. Asaoka
    • Organizer
      Energy Materials and Nanotechnology Meeting on Epitaxy
    • Place of Presentation
      Budapest(Hungary)
    • Year and Date
      2016-09-04
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Low temperature formation of Si(110)-16×2 through wet etching2016

    • Author(s)
      M. Yano, S. Suzuki, Y. Uozumi, H. Asaoka
    • Organizer
      18th International Conference on Crystal Growth and Epitaxy
    • Place of Presentation
      名古屋国際会議場(愛知県名古屋市)
    • Year and Date
      2016-08-07
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Real-time measurement of intrinsic stress in silicon reconstruction during hydrogen adsorption/desorption process2016

    • Author(s)
      H. Asaoka, Y. Uozumi
    • Organizer
      16th International Conference on Atomic Layer Deposition
    • Place of Presentation
      Dublin(Ireland)
    • Year and Date
      2016-07-24
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ナノ構造形成過程の表面ストレスその場測定2016

    • Author(s)
      朝岡秀人
    • Organizer
      電気化学会
    • Place of Presentation
      おたる自然の村おこばち山荘(北海道小樽市)
    • Year and Date
      2016-06-25
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] Kinetic Study on Silver Photo-diffusion into Ge-chalcogenide using Neutron Reflectivity Technique2016

    • Author(s)
      Y. Sakaguchi, H. Asaoka, Y. Uozumi, K. Soyama, P. Gutfreund, R. Cubitt, M. Mitkova
    • Organizer
      7th International Conference on Optical, Optoelectronic
    • Place of Presentation
      Montreal(Canada)
    • Year and Date
      2016-06-12
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ヘテロ成長過程の表面ストレスの解明2015

    • Author(s)
      朝岡秀人
    • Organizer
      計算機センター特別研究プロジェクト「結晶成長の数理」第9回研究会 表面―歪み,構造,相転移―
    • Place of Presentation
      学習院大(東京、豊島区)
    • Year and Date
      2015-12-24
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] Real-time measurement of surface stress evolution during nano-structural formation on Silicon2015

    • Author(s)
      H. Asaoka
    • Organizer
      Collaborative Conference on Crystal Growth (3CG)
    • Place of Presentation
      Hong Kong, China
    • Year and Date
      2015-12-14
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Processes of silver photo-diffusion into Ge-chalcogenides probed by neutron reflectivity technique2015

    • Author(s)
      Y. Sakaguchi, H. Asaoka, Y. Uozumi, Y. Kawakita, T. Ito, M. Kubota, D. Yamazaki, K. Soyama, Gaurav Sheoran, M. Mitkova
    • Organizer
      26th International Conference on Amorphous and Nanocrystalline Semiconductors (ICANS26)
    • Place of Presentation
      Aachen, Germany
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Real-time stress measurement during Si surface reconstruction and Ge nanodot growth on Si2015

    • Author(s)
      H. Asaoka, Y. Uozumi
    • Organizer
      31th European Conference on Surface Science (ECOSS-31)
    • Place of Presentation
      Barcelona Spain
    • Year and Date
      2015-08-31
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Real-Time Measurement of Surface Stress Relief during Ge Nanodot Growth on Si2015

    • Author(s)
      H. Asaoka, Y. Uozumi, T. Yamazaki, M. Suemitsu
    • Organizer
      9th International Conference on Silicon Epitaxy and Heterostructures (ICSI-9)
    • Place of Presentation
      Montreal, Canada
    • Year and Date
      2015-05-17
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Surface stress evolution during structural formation on Silicon2014

    • Author(s)
      H. Asaoka
    • Organizer
      Collaborative Conference on Crystal Growth
    • Place of Presentation
      Phuket, Thailand
    • Year and Date
      2014-11-04 – 2014-11-07
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Crystal Structure and Electron Density Distribution Analyses of NdxCe1-xO2-δ for Electrolyte by Rietveld/ Maximum Entropy Method2014

    • Author(s)
      T. Taguchi, N. Igawa, S. Miwa, A. Birumachi, H. Asaoka, M. Osaka
    • Organizer
      7th International Symposium on Surface Science
    • Place of Presentation
      Matsue, Japan
    • Year and Date
      2014-11-02 – 2014-11-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] Surface stress measurement of Si reconstruction2014

    • Author(s)
      H. Asaoka, Y. Uozumi, Y. Yokoyama
    • Organizer
      16th International Conference on Thin Films
    • Place of Presentation
      Dubrovnik, Croatia
    • Year and Date
      2014-10-13 – 2014-10-16
    • Related Report
      2014 Annual Research Report
  • [Presentation] Dynamics of silver photo-diffusion into Ge-chalcogenide films: time-resolved neutron reflectometry2014

    • Author(s)
      Y. Sakaguchi, H. Asaoka, Y. Uozumi, Y. Kawakita, T. Ito, M. Kubota, D. Yamazaki, K. Soyama, M. Ailavajhala, M. R. Latif, K. Wolf, M. Mitkova, M. W. A. Skoda
    • Organizer
      International Conference on Optical, Optoelectronic and Photonic Materials
    • Place of Presentation
      Leeds, UK
    • Year and Date
      2014-07-27 – 2014-08-01
    • Related Report
      2014 Annual Research Report
  • [Presentation] Transient measurement for photo-induced changes in J-PARC -time-resolved neutron reflectivity measurement for silver photo-diffusion into Ge-chalcogenide films-2014

    • Author(s)
      Y. Sakaguchi, H. Asaoka, Y. Uozumi, Y. Kawakita, T. Ito, M. Kubota, D. Yamazaki, K. Soyama, M. Ailavajhala, K. Wolf, M. Mitkova, M. W. A. Skoda
    • Organizer
      2nd International Symposium on Science at J-PARC
    • Place of Presentation
      Tsukuba, Japan
    • Year and Date
      2014-07-12 – 2014-07-15
    • Related Report
      2014 Annual Research Report
  • [Presentation] Direct determination of stress evolution during hetero-epitaxial growth2013

    • Author(s)
      H. Asaoka
    • Organizer
      Collaborative Conference on Crystal Growth
    • Place of Presentation
      Cancun, Mexico
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Stress evolution during Si surface reconstruction2013

    • Author(s)
      H. Asaoka, Y. Uozumi, Y. Yokoyama, K. Yamaguchi
    • Organizer
      International Vacuum Congress
    • Place of Presentation
      Paris, France
    • Related Report
      2013 Annual Research Report
  • [Presentation] Unique surface structure formation on Ge covered Si(110) surface2013

    • Author(s)
      Y. Yokoyama, Y. Uozumi, H. Asaoka
    • Organizer
      International Vacuum Congress
    • Place of Presentation
      Paris, France
    • Related Report
      2013 Annual Research Report
  • [Presentation] Dynamics of silver photo-diffusion in Ag/GexS1-x (x=0.2 and 0.4) films investigated by neutron reflectivity2013

    • Author(s)
      Y. Sakaguchi, H. Asaoka, Y. Uozumi, Y. Kawakita, T. Ito, M. Kubota, D. Yamazaki, K. Soyama, M. Ailavajhala, M. Mitkova
    • Organizer
      International Conference on Amorphous and Nanocrystalline Semiconductors
    • Place of Presentation
      Toronto, Canada
    • Related Report
      2013 Annual Research Report
  • [Presentation] Y. Sakaguchi, H. Asaoka, Y. Uozumi, Y. Kawakita, T. Ito, M. Kubota, D. Yamazaki, K. Soyama, M. Ailavajhala, M. Mitkova2013

    • Author(s)
      Time-resolved neutron reflectivity measurements for silver photo-diffusion in Ag/Ge-S films
    • Organizer
      Light and Particle Beams in Materials Science
    • Place of Presentation
      Tuskuba, Japan
    • Related Report
      2013 Annual Research Report

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Published: 2013-05-21   Modified: 2019-07-29  

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