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Study on performance improvement of SOI MOSFET single-photon detector

Research Project

Project/Area Number 25286068
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Optical engineering, Photon science
Research InstitutionShizuoka University

Principal Investigator

Inokawa Hiroshi  静岡大学, 電子工学研究所, 教授 (50393757)

Co-Investigator(Kenkyū-buntansha) SATOH Hiroaki  静岡大学, 電子工学研究所, 助教 (00380113)
ONO Atsushi  静岡大学, 電子工学研究所, 准教授 (20435639)
Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥18,720,000 (Direct Cost: ¥14,400,000、Indirect Cost: ¥4,320,000)
Fiscal Year 2015: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2014: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2013: ¥8,840,000 (Direct Cost: ¥6,800,000、Indirect Cost: ¥2,040,000)
Keywords単一フォトン検出器 / ホール寿命 / 最大カウント・レート / ダーク・カウント / 表面プラズモンアンテナ / FinFET / 単電子トランジスタ / 最大カウントレート / ダークカウントレート
Outline of Final Research Achievements

SOI MOSFET single-photon detector features low dark count at room temperature, photon-number resolution when multiple photons enter at the same time, and low-voltage operation. In order to make the detector practical, performances are improved from the view points of light receiving area, quantum efficiency, and operation speed, and the following results are attained. (1) Increase of the light receiving area and quantum efficiency by the use of surface plasmon (SP) antenna, (2) Reduction of noise and hole lifetime by the substrate bias control, (3) Clarification of the requirements for high-speed operation through the output signal simulation and the investigation of signal processing method, and the realization of the real-time digital signal processing, (4) Realization of fast read out by RF reflectance method, and (5) World first demonstration of photon detection and the improved quantum efficiency by the use of FinFET.

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • Research Products

    (27 results)

All 2016 2015 2014 2013 Other

All Journal Article (7 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 7 results,  Acknowledgement Compliant: 3 results,  Open Access: 3 results) Presentation (15 results) (of which Int'l Joint Research: 2 results,  Invited: 3 results) Remarks (4 results) Patent(Industrial Property Rights) (1 results) (of which Overseas: 1 results)

  • [Journal Article] Identification of Double Quantum Dots in Nanowire Devices by Single-Gate Sweeps2016

    • Author(s)
      H. Inokawa and Y. Takahashi
    • Journal Title

      JJAP Conf. Proc.

      Volume: 4 Pages: 011201-011201

    • DOI

      10.7567/jjapcp.4.011201

    • NAID

      120005746315

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Fabrication and single-electron-transfer operation of a triple-dot single-electron transistor2015

    • Author(s)
      M. Jo, T. Uchida, A. Tsurumaki-Fukuchi, M. Arita, A. Fujiwara, Y. Ono, K. Nishiguchi, H. Inokawa, Y. Takahashi
    • Journal Title

      J. Appl. Phys.

      Volume: 118 Issue: 21

    • DOI

      10.1063/1.4936790

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Analysis of RF Reflection Method for MOSFET Electrometer Fabricated by Standard Integrated-Circuit Technology2015

    • Author(s)
      Hiroshi Inokawa, Mitsuru Kawai, Hiroaki Satoh
    • Journal Title

      International Journal of ChemTech Research

      Volume: 7 Pages: 1623-1627

    • NAID

      120005556115

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Effects of substrate voltage on noise characteristics and hole lifetime in SOI metal-oxide-semiconductor field-effect transistor photon detector2014

    • Author(s)
      Dedy Septono Catur Putranto, Purnomo Sidi Priambodo, Djoko Hartanto, Wei Du, Hiroaki Satoh, Atsushi Ono, Hiroshi Inokawa
    • Journal Title

      Optics Express

      Volume: 22 Issue: 18 Pages: 22072-22079

    • DOI

      10.1364/oe.22.022072

    • NAID

      120005479950

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Analysis of Hole Lifetime in SOI MOSFET Single-Photon Detector2013

    • Author(s)
      Dedy Septono Catur Putranto,Wei Du,Hiroaki Satoh,Atsushi Ono,Purnomo Sidi Priambodo,Djoko Hartanto,Hiroshi Inokawa
    • Journal Title

      MAKARA Journal of Technology

      Volume: 17(1) Pages: 7-10

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Enhancement of SOI Photodiode Sensitivity by Aluminum Grating2013

    • Author(s)
      Hiroshi Inokawa, Hiroaki Satoh, Ken Kawakubo, and Atsushi Ono .
    • Journal Title

      ECS Trans

      Volume: 53 Issue: 5 Pages: 127-130

    • DOI

      10.1149/05305.0127ecst

    • NAID

      120005479953

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Material Dependence of Metal Grating on SOI Photodiode for Enhanced Quantum Efficiency2013

    • Author(s)
      Hiroaki Satoh, Ken Kawakubo, Atsushi Ono, and Hiroshi Inokawa
    • Journal Title

      IEEE Photonics Technology Letters

      Volume: 25 Issue: 12 Pages: 1133-1136

    • DOI

      10.1109/lpt.2013.2260138

    • NAID

      120005479954

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Presentation] Fabrication of Triple-Dot Single-Electron Transistor and its Turnstile Operation2015

    • Author(s)
      M. Jo, T. Uchida, A. Tsurumaki-Fukuchi, M. Arita, A. Fujiwara, Y. Ono, K. Nishiguchi, H. Inokawa and Y. Takahashi
    • Organizer
      28th International Microprocesses and Nanotechnology Conference (MNC 2015)
    • Place of Presentation
      Toyama International Conference Center, Toyama, Japan
    • Year and Date
      2015-11-10
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Refractive Index Measurement toward Integrated Optical Biosensing by Silicon-On-Insulator Photodiode with Surface Plasmon Antenna2015

    • Author(s)
      H. Satoh, S. Iwata, D. Sugiyama, A. Ono, and H. Inokawa
    • Organizer
      The 14th International Conference on Global Research and Education (Inter-Academia 2015)
    • Place of Presentation
      Congress Center in Hamamatsu ACTCITY, Hamamatsu, Japan
    • Year and Date
      2015-09-28
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 表面プラズモンアンテナ付SOIフォトダイオードを用いたショ糖水溶液の屈折率測定における性能評価2015

    • Author(s)
      佐藤 弘明、岩田 将平、小野 篤史、猪川 洋
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場(愛知県名古屋市)
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] 表面プラズモンアンテナ付フォトダイオードを用いた屈折率測定の高感度化2015

    • Author(s)
      佐藤弘明、岩田将平、小野篤史、猪川 洋
    • Organizer
      信学技報 (IEICE Technical Report) ED2014-142, SDM2014-151
    • Place of Presentation
      北海道大学、札幌市
    • Year and Date
      2015-02-05 – 2015-02-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] Recent Progress in Photodetectors Based on Silicon-On-Insulator2014

    • Author(s)
      Hiroshi Inokawa, Hiroaki Satoh, Atsushi Ono, Dedy Septono Catur Putranto
    • Organizer
      International Conference on Optoelectronics and Microelectronics Technology and Application (OMTA) 2014
    • Place of Presentation
      Tianjin, China
    • Year and Date
      2014-11-12 – 2014-11-14
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] ホールアレイ型金属回折格子付SOIフォトダイオードの斜入射光に対する分光感度特性2014

    • Author(s)
      佐藤弘明、岩田将平、小野篤史、猪川洋
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学、札幌市
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] 金ナノ粒子高密度配列による高感度SOIフォトダイオードの開発2014

    • Author(s)
      小野篤史、榎本靖、松村康史、佐藤弘明、猪川洋
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学、札幌市
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] SOI photodiode with surface plasmon antenna: from sensitivity enhancement to refractive index measurement for biosensing2014

    • Author(s)
      Hiroshi Inokawa
    • Organizer
      2014 IEEE International Conference on Semiconductor Electronics (ICSE2014)
    • Place of Presentation
      Kuala Lumpur, Malaysia
    • Year and Date
      2014-08-27 – 2014-08-29
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 金属回折格子によるSOIフォトダイオードの感度向上2014

    • Author(s)
      佐藤弘明、岩田将平、小野篤史、猪川 洋
    • Organizer
      信学技報 (IEICE Technical Report) MW2014-61, OPE2014-30, EST2014-22, MWP2014-19
    • Place of Presentation
      室蘭工大、室蘭市
    • Year and Date
      2014-07-17 – 2014-07-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] Recent Advances in Photodetectors Based on Silicon-On-Insulator2013

    • Author(s)
      Hiroshi Inokawa, Hiroaki Satoh, Atsushi Ono, Dedy Septono Putranto, and Tiwari Ajay
    • Organizer
      The 2013 Korean-Japanese Student (KJS) Workshop
    • Place of Presentation
      Shizuoka Univ., Japan
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Performance Estimation of SOI MOSFET Single-Photon Detector2013

    • Author(s)
      Hiroshi Inokawa, Yuki Nakagami, Dedy Septono Catur Putranto, Hiroaki Satoh, Atsushi Ono, Purnomo Sidi Priambodo, and Djoko Hartanto
    • Organizer
      The 12th International Conference on Global Research and Education (Inter-Academia 2013)
    • Place of Presentation
      Sofia, Bulgaria
    • Related Report
      2013 Annual Research Report
  • [Presentation] Evolution of Photodetectors by Silicon-On-Insulator Material2013

    • Author(s)
      Hiroshi Inokawa, Hiroaki Satoh, Atsushi Ono, Dedy Septono Catur Putranto, Wei Du, Purnomo Sidi Priambodob, Djoko Hartanto
    • Organizer
      The 13th International Conference on QIR (Quality in Research)
    • Place of Presentation
      Yogyakarta, Indonesia
    • Related Report
      2013 Annual Research Report
  • [Presentation] Substrate Bias Effects on Noise and Minority Carrier Lifetime in SOI MOSFET Single-Photon Detector2013

    • Author(s)
      Dedy Septono Catur Putranto, Hiroaki Satoh, Atsushi Ono, Hiroshi Inokawa, Purnomo Sidi Priambodo, Djoko Hartanto, and Wei Du
    • Organizer
      The 13th International Conference on QIR (Quality in Research)
    • Place of Presentation
      Yogyakarta, Indonesia
    • Related Report
      2013 Annual Research Report
  • [Presentation] hotodetection Characteristics of Fin-Type Field-Effect Transistors2013

    • Author(s)
      Dedy Septono Catur Putranto, Kazuhiko Endo, Meishoku Masahara, Hiroaki Satoh, Atsushi Ono, Purnomo Sidi Priambodo, Djoko Hartanto, and Hiroshi Inokawa
    • Organizer
      The 15th Takayanagi Kenjiro Memorial Symposium
    • Place of Presentation
      Hamamatsu, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Analysis of Photoresponse in SOI FinFET2013

    • Author(s)
      Dedy Putranto,遠藤和彦,昌原明植,佐藤弘明,小野篤史,Purnomo Priambodo,Djoko Hartanto,猪川洋
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      志社大学、京田辺市
    • Related Report
      2013 Annual Research Report
  • [Remarks] ナノシステム集積化分野

    • URL

      http://www.rie.shizuoka.ac.jp/?page_id=57

    • Related Report
      2015 Annual Research Report
  • [Remarks] SOI MOSFETによる単一フォトン検出

    • URL

      http://www.oisc.shizuoka.ac.jp/cmsdesigner/dlfile.php?entryname=sangaku&entryid=00679&fileid=00000003&/zai15inokawa.pdf&disp=inline

    • Related Report
      2015 Annual Research Report
  • [Remarks] 研究内容 | 猪川研究室

    • URL

      http://www.rie.shizuoka.ac.jp/~nanosys/research.html

    • Related Report
      2014 Annual Research Report
  • [Remarks] ナノシステム集積化分野 | 静岡大学 電子工学研究所

    • URL

      http://www.rie.shizuoka.ac.jp/?page_id=57

    • Related Report
      2013 Annual Research Report
  • [Patent(Industrial Property Rights)] 屈折率測定装置2016

    • Inventor(s)
      猪川洋、佐藤弘明、小野篤史
    • Industrial Property Rights Holder
      静岡大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2016-02-10
    • Related Report
      2015 Annual Research Report
    • Overseas

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Published: 2013-05-21   Modified: 2019-07-29  

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